WO2010137392A1 - Dispositif de mesure de débit et de pression de fluide - Google Patents

Dispositif de mesure de débit et de pression de fluide Download PDF

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Publication number
WO2010137392A1
WO2010137392A1 PCT/JP2010/054869 JP2010054869W WO2010137392A1 WO 2010137392 A1 WO2010137392 A1 WO 2010137392A1 JP 2010054869 W JP2010054869 W JP 2010054869W WO 2010137392 A1 WO2010137392 A1 WO 2010137392A1
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WO
WIPO (PCT)
Prior art keywords
pressure
fluid
flow rate
measuring device
pressure sensor
Prior art date
Application number
PCT/JP2010/054869
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English (en)
Japanese (ja)
Inventor
尊三 佐藤
了至 安藤
紀一郎 富岡
義文 川村
Original Assignee
東京エレクトロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン株式会社 filed Critical 東京エレクトロン株式会社
Priority to KR1020117024305A priority Critical patent/KR101305775B1/ko
Publication of WO2010137392A1 publication Critical patent/WO2010137392A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0023—Fluidic connecting means for flowthrough systems having a flexible pressure transmitting element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G01F1/88—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure with differential-pressure measurement to determine the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor

Definitions

  • the present invention relates to a flow rate measuring device for measuring a flow rate of fluid by measuring a fluid pressure on a upstream side and a downstream side of a throttle mechanism provided between piping members by using a pressure sensor, and more particularly to manufacturing a semiconductor.
  • the present invention relates to an apparatus that is preferably used by being installed in a line for sending various chemicals, cleaning liquids, various gas fluids, etc. to an apparatus, an FPD manufacturing apparatus, a solar cell manufacturing apparatus, and the like.
  • Patent Document 1 In a conventional flow measurement device using this type of pressure sensor (hereinafter also referred to as a differential pressure type flow meter), as shown in Patent Document 1, pressure is applied to the pressure sensor from a main pipe through which a fluid to be measured flows. A conduit for guiding is provided. As shown in Patent Document 1, this conduit portion is branched from the main piping, and is formed of, for example, a small hole or a thin tube.
  • Japanese Patent Application Laid-Open No. H10-228667 discloses a pressure sensor using a quartz disk. In this document, the quartz disk is configured so that the pressure acts perpendicularly to the face plate part, and a conduit part is formed from the main pipe to the quartz disk, although it is a short distance.
  • Patent Document 1 JP 2004-226144 A
  • Patent Document 2 JP 2002-54959 A
  • the conduit portion may be clogged.
  • deposits are generated in the conduit portion, or the deposits are peeled off and flow downstream to cause contamination. This contamination has a great adverse effect in semiconductor processes and the like.
  • the measurement accuracy at a low flow rate deteriorates.
  • the present invention eliminates the conduit portion itself by using a configuration in which the pressure of the fluid can be measured through the wall of the piping member, and drastically solves the problems caused by the presence of the conduit portion. This is the main intended issue.
  • the present invention has a secondary feature in that the pressure can be measured without difficulty even when the piping member is a thin tube by improving the arrangement of the quartz plate, and the measurement accuracy at a low flow rate can be improved. It was made a difficult problem.
  • the flow measurement device includes a piping member through which a fluid to be measured for flow flows, a throttle mechanism provided between the piping members, and an upstream side and a downstream side of the throttle mechanism. And a pair of pressure sensors for measuring the pressure of the fluid, and the flow rate of the fluid is measured based on the pressure measured by each pressure sensor, and the outer surface side is recessed at a required portion of the outer wall of the piping member.
  • a thin portion is provided, and projecting and projecting portions that project and retract by elastic deformation of the thin portion due to pressure fluctuation of the fluid are formed on the upstream side and the downstream side of the throttle mechanism, and pressure is applied to the outer surface of the projecting portion.
  • the pressure-sensitive surface of the sensor is in contact.
  • the conduit part for guiding the pressure to the pressure sensor is completely unnecessary, and the projecting / recessing part for transmitting the pressure is formed by a thin part in which the outside of the outer wall of the piping member is recessed. Therefore, the unevenness on the inner surface of the piping member can be completely eliminated, so that the retention of fluid can be prevented. Furthermore, generation of bubbles, pressure loss, contamination, and the like due to the stagnation of the fluid can be prevented.
  • the pressure sensor can be disposed outside the piping member, it can be easily attached and detached, the convenience of maintenance can be improved, and the size can be reduced.
  • the face plate portion of the crystal plate is arranged so as to be perpendicular to the pressure direction. This is made vertical, i.e., the edge of the quartz plate is used as a pressure-sensitive surface, and the quartz plate is arranged in a posture substantially perpendicular to the surface of the protruding and recessed portion, and the pressing force from the protruding and recessed portion is If it is configured to act on the edge, even if the piping member is a thin tube, pressure can be measured without difficulty, and the resolution in a low flow rate region can be improved.
  • the pressure sensor is attached to the piping member so that the face plate portion of the crystal plate is parallel to the fluid flow direction. This is because the pressure receiving area is increased and the pressure transmission efficiency can be improved.
  • a bottomed groove is provided around the outer wall of the piping member, and the bottom of the bottomed groove functions as the protruding and recessed portion. Can be mentioned.
  • an outer shell body that is tightly fixed around the bottomed groove and the piping members before and after the bottomed groove is provided. It is preferable that a through-hole extending from the surface to the bottomed groove is formed and the quartz plate is accommodated and held in the through-hole.
  • an annular bottomed groove that opens outward is provided on the outer wall of the piping member, and the thin-walled portion is formed at the bottom of the bottomed groove.
  • the thing which makes the outer wall part enclosed by the bottom groove function as the said protrusion part can be mentioned. If this is the case, the part where the pressure-sensitive surface is in contact with the protruding part will be a thick part similar to other outer walls, so the deflection of the protruding part due to the pressure-sensitive surface and the damage of the protruding part at the contact part will be Can be avoided.
  • the piping member is made of resin or metal
  • the throttle mechanism is the same material as the piping member and is continuously provided integrally. Can do. This is because a throttle mechanism can be easily formed by deforming part of the piping member by pressing or applying heat.
  • the present invention can also be applied as a fluid pressure measuring device by omitting the throttle mechanism. With such a configuration, it is possible to measure the pressure while maintaining a contamination-free state.
  • the conduit portion for guiding the pressure to the pressure sensor is not necessary, and the projecting and recessed portion for transmitting the pressure is formed by a thin portion in which the outside of the outer wall of the piping member is recessed. Therefore, the unevenness of the inner surface of the piping member can be eliminated, so that the retention of fluid can be prevented. Furthermore, it is possible to prevent the occurrence of contamination due to the retention of the fluid.
  • the pressure sensor can be arranged outside the piping member, it can be easily attached and detached, and maintainability and the like can be improved.
  • FIG. 6 is a cross-sectional view taken along line AA in FIG.
  • the graph which shows the flow volume characteristic of the pressure sensor in the embodiment.
  • FIG. 9 is an end view taken along line AA in FIG. 8.
  • the flow rate measuring device 100 is disposed between a piping member 1 through which a fluid to be measured for flow flows and the piping member 1.
  • the throttle mechanism 3 provided, a pair of pressure sensors 2 provided on the upstream side and the downstream side of the throttle mechanism 3 for measuring the pressure of the fluid, and the pressures measured by the pressure sensors 2 and the measured pressures Is a so-called differential pressure type apparatus including an information processing means 5 for calculating the flow rate of the fluid based on the above.
  • the piping member 1 is a resin (for example, PFA) tube having a circular cross section, the inner diameter thereof is equal, and the thickness of the outer wall 11 is also described later. Except for the thin-walled portion 11a.
  • resin for example, PFA
  • the throttle mechanism 3 is a tube-shaped member using the same material as the piping member 1. Specifically, the center portion has a minimum inner diameter, and this center The inner diameter is gradually increased from the part to form a shape that reaches both ends smoothly.
  • the inner diameters of both end portions are matched with the inner diameter of the piping member 1, and both end portions are integrally and continuously connected to the end portions of the upstream and downstream piping members 1.
  • the pressure sensor 2 includes a crystal plate 21 and a crystal plate 21 supported by the casing 22, and an oscillation frequency is generated by an external pressure acting on the crystal plate 21. Therefore, the oscillation signal of the quartz plate 21 is output as a pressure signal.
  • the casing 22 has a substantially oval shape in plan view, and in the present embodiment, the casing 22 is shared by the two pressure sensors 2. Of course, the housing 22 may be separated.
  • the casing 22 is provided with a storage wall 22c that is surrounded by a bottom wall 22a and a side peripheral wall 22b that stands up from the bottom wall 22a and is open on one side. Is placed inside.
  • the quartz plate 21 has, for example, an equal-thick disc shape having an orientation flat portion (hereinafter also referred to as an orientation flat portion 21a). It is. Then, the orientation flat portion 21a is fixed to a holding base 25 attached to the bottom wall 22a of the housing chamber 22c, and the quartz plate 21 rises from the bottom wall 22a, and the tip pressure-sensitive surface 21b (orientation flat) of the quartz plate 21 is fixed. The part 21a is opposed to the opening P (shown in FIG. 1) of the storage chamber 22c.
  • the quartz plate 21 is also supported at its side edges by a pair of elastic supports 24 with slits erected from the bottom wall 22a.
  • the elastic support 24 is made of a conductive material such as a metal, and is configured to hold a crystal plate 21 and an electrode plate 23 together by a vertically extending slit (not shown) and to also function as a lead wire. .
  • the quartz plate 21 is transmitted in the vertical direction (contour direction) as it is, and is compressed and deformed to bend. It is set not to move in the horizontal direction.
  • an annular bottomed groove 4 is formed in the outer wall 11 of the piping member 1 on the upstream side and the downstream side of the throttle mechanism 3.
  • the bottomed groove 4 has an oval shape extending in the longitudinal direction of the piping member 1.
  • the thickness of the outer wall 11 at the bottom of the bottomed groove 4 is larger than the thickness of the other outer walls 11.
  • the region surrounded by the bottomed groove 4 protrudes and decreases in pressure due to the elastic deformation of the thin portion 11a. It will function as the sunk portion 6 that sometimes immerses.
  • tip pressure sensitive surface of the quartz plate 21, may contact the surface of this protrusion part 6.
  • the pressure-sensitive surface of the crystal plate 21 is fixed to the outer surface of the protrusion 6 by passing the piping member 1 and the throttle mechanism 3 through the housing 22 and fixing them.
  • the pressure sensor 2 can detect the pressure of the fluid via the protrusions 6.
  • the face plate portion of the crystal plate 21 is parallel to the fluid flow direction, that is, the longitudinal direction of the piping member 1, and the tip of the side peripheral wall 22 b in the accommodation chamber 22 c is the piping member 1 around the protruding portion 6.
  • the accommodation chamber 22 c becomes an airtight space.
  • Reference numeral 8 in FIG. 1 denotes a screw feed mechanism for adjusting the initial value (offset) of the pressing force with respect to the projecting portion 6 of the crystal plate 21 by moving the holding base 25 forward and backward.
  • the information processing means 5 is an electric circuit including a CPU, a memory, a counter, and the like.
  • the information processing means 5 receives an oscillation signal from the pressure sensor 2, measures its frequency with a counter, and calculates a pressure from the frequency. .
  • the correlation between the pressure and the frequency is a linear function as shown in Table 1 and FIG. 7, and the reproducibility is very good. Therefore, the pressure can be accurately calculated from the frequency. it can.
  • the information processing means 5 calculates the flow rate Q by multiplying the square root of the frequency difference ⁇ f by a coefficient k determined by experiment.
  • the instrumental error of each pressure sensor 2 is corrected by the counter in the information processing means 5.
  • the flow measuring device 100A includes an upstream side and a downstream side piping member 1A through which a fluid to be subjected to flow rate measurement flows, and the piping member 1A. 3A, a pair of pressure sensors 2A provided on each piping member 1A for measuring the pressure of the fluid, and receiving pressures measured by the pressure sensors 2A and based on the measured pressures. It is a so-called differential pressure type equipped with information processing means 5A for calculating the flow rate of the fluid.
  • the piping member 1A is, for example, a resin (for example, PFA) tube having a circular cross section, and the inner diameter thereof is the same. It is structured equally.
  • the throttle mechanism 3A has a block body shape, more specifically, a rectangular parallelepiped shape, and a flow path 31A having a throttle function is penetrated therein. And the edge part of each said piping member 1A is inserted in the both ends of this aperture mechanism 3A, and it is comprised so that the piping member 1A and the said flow path 31A may be connected in series.
  • the flow path 3A has a shape in which the central portion has a minimum inner diameter, the inner diameter gradually increases from the central portion, and reaches both ends smoothly.
  • the flow path 31A is configured to be smoothly continuous with the upstream and downstream piping members 1A.
  • the pressure sensor 2A includes a quartz plate 21A and a support 22A that supports the quartz plate 21A, and the oscillation frequency is increased by an external pressure acting on the quartz plate 21A. Since it changes, it is the type which outputs the oscillation signal of the crystal plate 21A as a pressure signal.
  • the support body 22A includes a side edge support portion 22aA that supports the left and right side edge portions of the crystal plate 21A, and a base end support portion 22bA that supports the base end portion of the crystal plate 21A, and this base end support portion 22bA. Further, an electric circuit board PA for taking out an electric signal from the crystal plate 21A is attached.
  • quartz plate 21A is the same as that of the first embodiment, description thereof is omitted here.
  • bottomed grooves 4 ⁇ / b> A that circulate in the circumferential direction are provided in the piping member outer wall 11 ⁇ / b> A on the upstream side and the downstream side of the throttle mechanism 3 ⁇ / b> A, respectively.
  • the bottomed groove 4A has a constant width that goes around the piping member 1A.
  • the thickness of the outer wall 11A at the bottom of the bottomed groove 4A is thinner than the thickness of the other outer wall 11A. .
  • the thin portion 11aA is more easily elastically deformed than the other outer wall 11A, in this embodiment, a partial region of the thin portion 11aA protrudes when the fluid pressure increases and immerses when the pressure decreases. It is comprised so that it may function as the protrusion part 6A. Then, the pressure sensitive surface of the pressure sensor 2A, that is, the tip pressure sensitive surface of the crystal plate 21A is brought into contact with the surface of the protruding portion 6A via a spacer 8A described later.
  • an outer shell body 7A having a block shape is tightly fixed around the bottomed groove 4A and the piping member 1A before and after the bottomed groove 4A, and the outer shell body 7A is fixed.
  • a rectangular through hole 7aA extending from the surface of the groove to a part of the bottomed groove 4A is formed, and the pressure sensor 2A including the crystal plate 21A and the spacer 8A are accommodated and held in the through hole 7aA.
  • the outer shell body 7A has a cross-sectional contour shape equal to that of the throttle mechanism 3A, and the outer shell body 7A and the throttle mechanism 3A are continuously elongated. It is comprised so that it may make.
  • the outer shell body 7A can be divided vertically into two along the longitudinal direction, and the periphery of the piping member 1A can be covered by combining the divided halves 71A and 72A.
  • the spacer 8A has a block body shape whose bottom surface is curved in accordance with the curvature of the bottomed groove 4A, and is a protruding portion that is a part of the bottomed groove 4A exposed by the through hole 7aA.
  • the through hole 7aA is fitted so as to be in contact with the outer surface of 6A. Further, the spacer 8A is disposed in the through hole 7aA so as to be movable only in the vertical direction in accordance with the projecting and retracting operation of the projecting and recessed portion 6A.
  • the pressure sensor 2A can detect the pressure of the fluid via the projecting part 6A and the spacer 8A by arranging the pressure-sensitive surface of the quartz plate 21A so as to contact the outer surface of the spacer 8A. ing.
  • the crystal plate 21A is arranged so that its face plate portion is parallel to the fluid flow direction, that is, the longitudinal direction of the piping member 1A.
  • the pressure sensor is not necessarily required upstream and downstream of the throttle mechanism.
  • the upstream or downstream pressure is known, for example, connected to a vacuum or a constant pressure source, There is no need for a pressure sensor on the pressure side, or a through-hole or a projecting portion for holding the pressure sensor.
  • a fluid pressure measuring device that measures the pressure of the fluid flowing inside may be configured by using a piping member and a single pressure sensor without providing a throttle mechanism.
  • the present invention can also be applied as a fluid pressure measuring device capable of measuring pressure while maintaining a contamination-free state.
  • the opening of the storage chamber 22c may be sealed beforehand with a thin film member, for example, and the storage chamber 22c may be made into airtight space beforehand. That is, a part of the wall forming the storage chamber 22c is made of a thin film member such as a deformable metal, the surface of the thin film member is set as a pressure sensitive surface, and the crystal plate 21 is placed in the airtight space in the airtight space. You may arrange
  • the projecting portion may be configured such that, for example, a certain region of the outer wall of the piping member is a thin portion 11a, and the thin portion itself functions as the projecting portion.
  • the pressure sensor is not limited to the quartz plate, and a piezoelectric sensor or other types may be used.

Abstract

Par l'élimination de parties de tuyaux elles-mêmes, la présente invention réduit considérablement les problèmes dus à la présence de ces tuyaux. Le dispositif de mesure de débit comporte un mécanisme de restriction (3) installé dans la partie intermédiaire d'un élément de tuyauterie (1) et mesure le débit du fluide sur la base d'une pression mesurée par un capteur de pression (2) installé en amont et en aval du mécanisme de restriction (3). Une partie paroi fine (11a) dont le côté surface extérieure est en retrait est installée sur des zones requises de la paroi extérieure (11) dudit élément de tuyauterie (1). Formée côté amont et côté aval dudit mécanisme de restriction (3), une partie rétractable (6) qui se rétracte grâce à la déformation élastique de ladite partie paroi fine (11a) selon la variation de pression dudit débit, met en contact la surface sensible à la pression du capteur de pression (2) avec la surface extérieure de ladite partie rétractable (6).
PCT/JP2010/054869 2009-05-29 2010-03-19 Dispositif de mesure de débit et de pression de fluide WO2010137392A1 (fr)

Priority Applications (1)

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KR1020117024305A KR101305775B1 (ko) 2009-05-29 2010-03-19 유량 측정 장치 및 유체 압력 측정 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-131032 2009-05-29
JP2009131032A JP2010276533A (ja) 2009-05-29 2009-05-29 流量測定装置及び流体圧力測定装置

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130247675A1 (en) * 2010-11-29 2013-09-26 Stephane Poissy In-line contactless pressure sensors and methods of measuring pressure
US10215597B2 (en) 2014-01-17 2019-02-26 Alphinity, Llc Fluid monitoring assembly with sensor functionality
US10267701B2 (en) 2013-10-30 2019-04-23 Alphinity, Llc Fluid monitoring device with disposable inner liner with sensor integration
WO2019129480A1 (fr) * 2017-12-29 2019-07-04 Endress+Hauser Flowtec Ag Tuyau pour un transducteur, transducteur comprenant un tuyau de ce type et système de mesure ainsi formé

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018179715A (ja) * 2017-04-11 2018-11-15 北陸電気工業株式会社 パルス圧力検出装置
KR102252038B1 (ko) 2019-06-21 2021-05-14 세메스 주식회사 유체 분사량 산출 장치 및 이를 구비하는 스토커 시스템

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US3274828A (en) * 1963-08-27 1966-09-27 Charles F Pulvari Force sensor
US4175243A (en) * 1977-11-17 1979-11-20 Corbett James P Temperature compensated oscillating crystal force transducer systems
JP2000510575A (ja) * 1996-02-15 2000-08-15 エヌティー インターナショナル インコーポレーテッド 非汚染性本体を有する腐食性流体内の流量計
JP2002340716A (ja) * 2001-04-25 2002-11-27 Oertli-Instrumente Ag 圧力測定システム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3274828A (en) * 1963-08-27 1966-09-27 Charles F Pulvari Force sensor
US4175243A (en) * 1977-11-17 1979-11-20 Corbett James P Temperature compensated oscillating crystal force transducer systems
JP2000510575A (ja) * 1996-02-15 2000-08-15 エヌティー インターナショナル インコーポレーテッド 非汚染性本体を有する腐食性流体内の流量計
JP2002340716A (ja) * 2001-04-25 2002-11-27 Oertli-Instrumente Ag 圧力測定システム

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130247675A1 (en) * 2010-11-29 2013-09-26 Stephane Poissy In-line contactless pressure sensors and methods of measuring pressure
US9857256B2 (en) 2010-11-29 2018-01-02 Corning Incorporated In-line contactless pressure sensors and methods of measuring pressure
US10267701B2 (en) 2013-10-30 2019-04-23 Alphinity, Llc Fluid monitoring device with disposable inner liner with sensor integration
US10502650B2 (en) 2013-10-30 2019-12-10 Alphinity, Llc Fluid monitoring device with disposable inner liner with sensor integration
EP3063506B1 (fr) * 2013-10-30 2024-03-06 Repligen Corporation Dispositif de contrôle de fluide à revêtement intérieur jetable avec capteur intégré
US10215597B2 (en) 2014-01-17 2019-02-26 Alphinity, Llc Fluid monitoring assembly with sensor functionality
US10451451B2 (en) 2014-01-17 2019-10-22 Alphinity, Llc Fluid monitoring assembly with sensor functionality
US11015962B2 (en) 2014-01-17 2021-05-25 Repligen Corporation Fluid monitoring assembly with replaceable sensor functionality
US11512987B2 (en) 2014-01-17 2022-11-29 Repligen Corporation Fluid monitoring assembly with replaceable sensor functionality
WO2019129480A1 (fr) * 2017-12-29 2019-07-04 Endress+Hauser Flowtec Ag Tuyau pour un transducteur, transducteur comprenant un tuyau de ce type et système de mesure ainsi formé
US11441930B2 (en) 2017-12-29 2022-09-13 Endress+Hauser Flowtec Ag Tube for a transducer, transducer comprising such a tube, and measuring system formed therewith

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KR101305775B1 (ko) 2013-09-06
JP2010276533A (ja) 2010-12-09

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