KR101305775B1 - 유량 측정 장치 및 유체 압력 측정 장치 - Google Patents

유량 측정 장치 및 유체 압력 측정 장치 Download PDF

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Publication number
KR101305775B1
KR101305775B1 KR1020117024305A KR20117024305A KR101305775B1 KR 101305775 B1 KR101305775 B1 KR 101305775B1 KR 1020117024305 A KR1020117024305 A KR 1020117024305A KR 20117024305 A KR20117024305 A KR 20117024305A KR 101305775 B1 KR101305775 B1 KR 101305775B1
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KR
South Korea
Prior art keywords
pressure
fluid
flow rate
piping member
measuring device
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KR1020117024305A
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English (en)
Korean (ko)
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KR20120011011A (ko
Inventor
다카미 사토
료지 안도
Original Assignee
도쿄엘렉트론가부시키가이샤
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Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20120011011A publication Critical patent/KR20120011011A/ko
Application granted granted Critical
Publication of KR101305775B1 publication Critical patent/KR101305775B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0023—Fluidic connecting means for flowthrough systems having a flexible pressure transmitting element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G01F1/88—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure with differential-pressure measurement to determine the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)
KR1020117024305A 2009-05-29 2010-03-19 유량 측정 장치 및 유체 압력 측정 장치 KR101305775B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2009-131032 2009-05-29
JP2009131032A JP2010276533A (ja) 2009-05-29 2009-05-29 流量測定装置及び流体圧力測定装置
PCT/JP2010/054869 WO2010137392A1 (fr) 2009-05-29 2010-03-19 Dispositif de mesure de débit et de pression de fluide

Publications (2)

Publication Number Publication Date
KR20120011011A KR20120011011A (ko) 2012-02-06
KR101305775B1 true KR101305775B1 (ko) 2013-09-06

Family

ID=43222515

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117024305A KR101305775B1 (ko) 2009-05-29 2010-03-19 유량 측정 장치 및 유체 압력 측정 장치

Country Status (3)

Country Link
JP (1) JP2010276533A (fr)
KR (1) KR101305775B1 (fr)
WO (1) WO2010137392A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2458358B1 (fr) * 2010-11-29 2017-09-27 Corning Incorporated Capteurs de pression sans contact en ligne et procédés de mesure de la pression
EP3063506B1 (fr) * 2013-10-30 2024-03-06 Repligen Corporation Dispositif de contrôle de fluide à revêtement intérieur jetable avec capteur intégré
CN106233119B (zh) 2014-01-17 2019-07-26 艾尔菲能堤有限责任公司 具有传感器功能的流体监测组件
JP2018179715A (ja) * 2017-04-11 2018-11-15 北陸電気工業株式会社 パルス圧力検出装置
DE102017012067A1 (de) * 2017-12-29 2019-07-04 Endress+Hauser Flowtec Ag Rohr für einen Meßwandler, Meßwandler mit einem solchen Rohr sowie damit gebildetes Meßsystem
KR102252038B1 (ko) 2019-06-21 2021-05-14 세메스 주식회사 유체 분사량 산출 장치 및 이를 구비하는 스토커 시스템
JP2024135326A (ja) * 2023-03-22 2024-10-04 横河電機株式会社 測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000510575A (ja) 1996-02-15 2000-08-15 エヌティー インターナショナル インコーポレーテッド 非汚染性本体を有する腐食性流体内の流量計
JP2002340716A (ja) 2001-04-25 2002-11-27 Oertli-Instrumente Ag 圧力測定システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3274828A (en) * 1963-08-27 1966-09-27 Charles F Pulvari Force sensor
US4175243A (en) * 1977-11-17 1979-11-20 Corbett James P Temperature compensated oscillating crystal force transducer systems

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000510575A (ja) 1996-02-15 2000-08-15 エヌティー インターナショナル インコーポレーテッド 非汚染性本体を有する腐食性流体内の流量計
JP2002340716A (ja) 2001-04-25 2002-11-27 Oertli-Instrumente Ag 圧力測定システム

Also Published As

Publication number Publication date
WO2010137392A1 (fr) 2010-12-02
JP2010276533A (ja) 2010-12-09
KR20120011011A (ko) 2012-02-06

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