JP2010261890A5 - - Google Patents

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Publication number
JP2010261890A5
JP2010261890A5 JP2009114445A JP2009114445A JP2010261890A5 JP 2010261890 A5 JP2010261890 A5 JP 2010261890A5 JP 2009114445 A JP2009114445 A JP 2009114445A JP 2009114445 A JP2009114445 A JP 2009114445A JP 2010261890 A5 JP2010261890 A5 JP 2010261890A5
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JP
Japan
Prior art keywords
light beam
light
fabry
wavelength
optical filter
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Pending
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JP2009114445A
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English (en)
Japanese (ja)
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JP2010261890A (ja
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Priority to JP2009114445A priority Critical patent/JP2010261890A/ja
Priority claimed from JP2009114445A external-priority patent/JP2010261890A/ja
Publication of JP2010261890A publication Critical patent/JP2010261890A/ja
Publication of JP2010261890A5 publication Critical patent/JP2010261890A5/ja
Pending legal-status Critical Current

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JP2009114445A 2009-05-11 2009-05-11 光波干渉計測装置 Pending JP2010261890A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009114445A JP2010261890A (ja) 2009-05-11 2009-05-11 光波干渉計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009114445A JP2010261890A (ja) 2009-05-11 2009-05-11 光波干渉計測装置

Publications (2)

Publication Number Publication Date
JP2010261890A JP2010261890A (ja) 2010-11-18
JP2010261890A5 true JP2010261890A5 (enExample) 2012-06-14

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ID=43360075

Family Applications (1)

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JP2009114445A Pending JP2010261890A (ja) 2009-05-11 2009-05-11 光波干渉計測装置

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JP (1) JP2010261890A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012115044A (ja) 2010-11-25 2012-06-14 Okuma Corp モータの磁極位置補正方法
JP5984351B2 (ja) * 2011-09-14 2016-09-06 キヤノン株式会社 計測装置
JP2015137996A (ja) * 2014-01-24 2015-07-30 株式会社東京精密 計測システム、ファブリーペロー共振器及び計測方法
JP6269334B2 (ja) * 2014-06-12 2018-01-31 株式会社東京精密 多点距離測定装置及び形状測定装置
JP6503618B2 (ja) * 2015-08-26 2019-04-24 株式会社東京精密 距離測定装置及びその方法
JP6628030B2 (ja) * 2015-10-22 2020-01-08 株式会社東京精密 距離測定装置及びその方法
DE102017122689A1 (de) * 2017-09-29 2019-04-04 Precitec Optronik Gmbh Verfahren und Vorrichtung zur berührungslosen Messung eines Abstands zu einer Oberfläche oder eines Abstands zwischen zwei Oberflächen
US11085825B2 (en) * 2018-03-30 2021-08-10 Si-Ware Systems Self-referenced spectrometer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6118300A (ja) * 1984-07-04 1986-01-27 Matsushita Electric Ind Co Ltd 光学的マイクロホン
JPH05118922A (ja) * 1991-10-24 1993-05-14 Advantest Corp 分光器の回折格子角度−波長特性誤差測定方法
US6421120B1 (en) * 1999-10-29 2002-07-16 Agilent Technologies, Inc. Extended wavelength calibration reference
JP4362631B2 (ja) * 2003-09-26 2009-11-11 日本電信電話株式会社 可変波長光発生装置
US7440112B2 (en) * 2004-08-18 2008-10-21 National University Corporation Method and an apparatus for shape measurement, and a frequency comb light generator
JP4963708B2 (ja) * 2007-01-22 2012-06-27 学校法人北里研究所 オプティカル・コヒーレンス・トモグラフィー装置
JP2009025245A (ja) * 2007-07-23 2009-02-05 Optical Comb Inc 光干渉観測装置
JP5228828B2 (ja) * 2008-11-19 2013-07-03 株式会社ニコン 低コヒーレンス干渉計、低コヒーレンス干渉装置、及び低コヒーレンス干渉測定方法

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