JP2010261890A5

JP2010261890A5 -

Info

Publication number: JP2010261890A5
Application number: JP2009114445A
Authority: JP
Filing date: 2009-05-11
Publication date: 2012-06-14

Description

その目的を達成するために、本発明の一側面としての計測装置は、複数の波長帯域を有する第１の光束が被検面に入射して前記被検面で反射した被検光束と、前記第１の光束と異なる複数の波長帯域を有する第２の光束が参照面に入射して前記参照面で反射した参照光束との干渉信号を検出し、前記参照面と前記被検面の光路長差を計測する計測装置において、前記第１の光束と前記第２の光束は、広帯域な波長の光を射出する光源と、前記広帯域な波長の光を複数の波長帯域を有する光にする光学フィルタにより生成されることを特徴とする。 In order to achieve the object, a measuring apparatus according to one aspect of the present invention includes a test light beam in which a first light beam having a plurality of wavelength bands is incident on a test surface and reflected by the test surface; An interference signal between a second light beam having a plurality of wavelength bands different from the first light beam and incident on a reference surface and reflected by the reference surface is detected, and an optical path length between the reference surface and the test surface In the measuring apparatus for measuring a difference, the first light flux and the second light flux are a light source that emits light with a wide wavelength, and an optical filter that converts the light with a wide wavelength to light having a plurality of wavelength bands. It is produced | generated by .

Claims

A test light beam in which a first light beam having a plurality of wavelength bands is incident on a test surface and reflected by the test surface , and a second light beam having a plurality of wavelength bands different from the first light beam are reference surfaces. the measuring device is incident to detect the interference signal and the reference light beam reflected by the reference surface, to measure the optical path length difference between the test surface and the reference surface,
The first light flux and the second light flux are generated by a light source that emits light having a broad wavelength and an optical filter that converts the light having a wide wavelength to light having a plurality of wavelength bands. A measuring device characterized by that.

The measuring apparatus according to claim 1, further comprising means for maintaining a wavelength difference between the first light flux and the second light flux .

The measuring apparatus according to claim 1, further comprising an optical amplifier for amplifying the intensity of light transmitted through the optical filter.

The measuring apparatus according to claim 1, wherein the optical filter is a Fabry-Perot etalon.

The means for maintaining is a frequency shifter that extracts a part of a light beam emitted from the first light beam and shifts a frequency of the extracted light beam to generate the second light beam. 2. The measuring device according to 2 .

The optical filter is a Fabry-Perot etalon;
The measuring device according to claim 2 , wherein the means for maintaining is an FSR control device of the Fabry-Perot etalon.

The measuring apparatus according to claim 4, wherein the first light beam and the second light beam have a comb-like spectrum that repeats a peak for each FSR of the Fabry-Perot etalon.