JP2010253658A - 非接触ワーク保持装置 - Google Patents

非接触ワーク保持装置 Download PDF

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Publication number
JP2010253658A
JP2010253658A JP2009109824A JP2009109824A JP2010253658A JP 2010253658 A JP2010253658 A JP 2010253658A JP 2009109824 A JP2009109824 A JP 2009109824A JP 2009109824 A JP2009109824 A JP 2009109824A JP 2010253658 A JP2010253658 A JP 2010253658A
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Japan
Prior art keywords
flow path
contact
work holding
spiral
holding device
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JP2009109824A
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Japanese (ja)
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JP2010253658A5 (enExample
Inventor
Harumi Shimada
晴示 島田
Nobuyuki Asari
信之 浅里
Yasuaki Taniguchi
泰章 谷口
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Nitta Moore Co
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Nitta Moore Co
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Priority to JP2009109824A priority Critical patent/JP2010253658A/ja
Publication of JP2010253658A publication Critical patent/JP2010253658A/ja
Publication of JP2010253658A5 publication Critical patent/JP2010253658A5/ja
Withdrawn legal-status Critical Current

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JP2009109824A 2009-04-28 2009-04-28 非接触ワーク保持装置 Withdrawn JP2010253658A (ja)

Priority Applications (1)

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JP2009109824A JP2010253658A (ja) 2009-04-28 2009-04-28 非接触ワーク保持装置

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JP2009109824A JP2010253658A (ja) 2009-04-28 2009-04-28 非接触ワーク保持装置

Publications (2)

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JP2010253658A true JP2010253658A (ja) 2010-11-11
JP2010253658A5 JP2010253658A5 (enExample) 2012-01-05

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JP2009109824A Withdrawn JP2010253658A (ja) 2009-04-28 2009-04-28 非接触ワーク保持装置

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013049097A (ja) * 2011-08-30 2013-03-14 Fuji Mach Mfg Co Ltd 部品装着ヘッド
JP2013146837A (ja) * 2012-01-20 2013-08-01 Murata Machinery Ltd 吸引チャック及び移載装置
CN103386689A (zh) * 2012-05-11 2013-11-13 株式会社妙德 输送夹具及输送保持装置
CN111673559A (zh) * 2020-05-14 2020-09-18 夏惠 一种基于气流压力式的硅片减薄磨削机构

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013049097A (ja) * 2011-08-30 2013-03-14 Fuji Mach Mfg Co Ltd 部品装着ヘッド
JP2013146837A (ja) * 2012-01-20 2013-08-01 Murata Machinery Ltd 吸引チャック及び移載装置
CN103386689A (zh) * 2012-05-11 2013-11-13 株式会社妙德 输送夹具及输送保持装置
CN111673559A (zh) * 2020-05-14 2020-09-18 夏惠 一种基于气流压力式的硅片减薄磨削机构
CN111673559B (zh) * 2020-05-14 2022-07-15 瑟德莱伯(嘉兴)科技智造有限公司 一种基于气流压力式的硅片减薄磨削机构

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