JP2010225687A5 - - Google Patents
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- Publication number
- JP2010225687A5 JP2010225687A5 JP2009068969A JP2009068969A JP2010225687A5 JP 2010225687 A5 JP2010225687 A5 JP 2010225687A5 JP 2009068969 A JP2009068969 A JP 2009068969A JP 2009068969 A JP2009068969 A JP 2009068969A JP 2010225687 A5 JP2010225687 A5 JP 2010225687A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009068969A JP2010225687A (ja) | 2009-03-19 | 2009-03-19 | 基板の処理装置 |
| TW099103799A TW201037782A (en) | 2009-03-19 | 2010-02-08 | Substrate processing apparatus |
| KR1020100023402A KR101179819B1 (ko) | 2009-03-19 | 2010-03-16 | 기판 처리 장치 |
| CN201010143066A CN101840848A (zh) | 2009-03-19 | 2010-03-19 | 基板处理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009068969A JP2010225687A (ja) | 2009-03-19 | 2009-03-19 | 基板の処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010225687A JP2010225687A (ja) | 2010-10-07 |
| JP2010225687A5 true JP2010225687A5 (ja) | 2011-04-28 |
Family
ID=42744148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009068969A Pending JP2010225687A (ja) | 2009-03-19 | 2009-03-19 | 基板の処理装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2010225687A (ja) |
| KR (1) | KR101179819B1 (ja) |
| CN (1) | CN101840848A (ja) |
| TW (1) | TW201037782A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102674006A (zh) * | 2011-03-14 | 2012-09-19 | 无锡康力电子有限公司 | 玻璃镀膜机用装片架 |
| KR101796627B1 (ko) * | 2013-08-28 | 2017-11-10 | 에이피시스템 주식회사 | 배기장치 및 이를 포함하는 기판 처리 장치 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4464724B2 (ja) * | 2004-03-29 | 2010-05-19 | 芝浦メカトロニクス株式会社 | 基板の搬送装置 |
| JP4641168B2 (ja) * | 2004-09-22 | 2011-03-02 | 芝浦メカトロニクス株式会社 | 基板の処理装置 |
| US20080251019A1 (en) * | 2007-04-12 | 2008-10-16 | Sriram Krishnaswami | System and method for transferring a substrate into and out of a reduced volume chamber accommodating multiple substrates |
| JP2010241510A (ja) * | 2007-08-13 | 2010-10-28 | Hirata Corp | 自動倉庫システム及びその容器移載方法 |
| JP4195497B2 (ja) * | 2007-12-12 | 2008-12-10 | 住友重機械工業株式会社 | ステージ装置 |
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2009
- 2009-03-19 JP JP2009068969A patent/JP2010225687A/ja active Pending
-
2010
- 2010-02-08 TW TW099103799A patent/TW201037782A/zh unknown
- 2010-03-16 KR KR1020100023402A patent/KR101179819B1/ko not_active IP Right Cessation
- 2010-03-19 CN CN201010143066A patent/CN101840848A/zh active Pending