JP2010204491A - 基板貼合せ装置 - Google Patents

基板貼合せ装置 Download PDF

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Publication number
JP2010204491A
JP2010204491A JP2009051234A JP2009051234A JP2010204491A JP 2010204491 A JP2010204491 A JP 2010204491A JP 2009051234 A JP2009051234 A JP 2009051234A JP 2009051234 A JP2009051234 A JP 2009051234A JP 2010204491 A JP2010204491 A JP 2010204491A
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JP
Japan
Prior art keywords
substrate
holding plate
upper substrate
plate
support
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Pending
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JP2009051234A
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Japanese (ja)
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JP2010204491A5 (enExample
Inventor
Takao Kojima
孝夫 小島
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Ulvac Inc
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Ulvac Inc
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Priority to JP2009051234A priority Critical patent/JP2010204491A/ja
Publication of JP2010204491A publication Critical patent/JP2010204491A/ja
Publication of JP2010204491A5 publication Critical patent/JP2010204491A5/ja
Pending legal-status Critical Current

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JP2009051234A 2009-03-04 2009-03-04 基板貼合せ装置 Pending JP2010204491A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009051234A JP2010204491A (ja) 2009-03-04 2009-03-04 基板貼合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009051234A JP2010204491A (ja) 2009-03-04 2009-03-04 基板貼合せ装置

Publications (2)

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JP2010204491A true JP2010204491A (ja) 2010-09-16
JP2010204491A5 JP2010204491A5 (enExample) 2012-01-19

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JP2009051234A Pending JP2010204491A (ja) 2009-03-04 2009-03-04 基板貼合せ装置

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JP (1) JP2010204491A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012133098A (ja) * 2010-12-21 2012-07-12 Hitachi Plant Technologies Ltd 基板組立装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0618829A (ja) * 1992-06-30 1994-01-28 Shinetsu Eng Kk 液晶表示板用ガラス基板の貼り合せ装置
JP2007212572A (ja) * 2006-02-07 2007-08-23 Ulvac Japan Ltd 貼合せ基板の製造方法、及び貼合せ基板製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0618829A (ja) * 1992-06-30 1994-01-28 Shinetsu Eng Kk 液晶表示板用ガラス基板の貼り合せ装置
JP2007212572A (ja) * 2006-02-07 2007-08-23 Ulvac Japan Ltd 貼合せ基板の製造方法、及び貼合せ基板製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012133098A (ja) * 2010-12-21 2012-07-12 Hitachi Plant Technologies Ltd 基板組立装置

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