JP2010198028A - Liquid droplet discharge apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To shorten cycle time in image plotting processing, even when periodical weight measurement processings are to be carried out. <P>SOLUTION: A liquid droplet discharge apparatus 1 includes a plurality of functional liquid droplet discharge heads 17 for plotting an image on a work W by an ink jet system; a work stage 21 for mounting the work W; a work-moving means 22 for moving the work W in the main scanning direction; a flashing unit 14 for receiving waste discharge from the plurality of functional liquid droplet discharge heads 17; a discharge inspection unit 18 for inspecting the discharge performance of the plurality of functional liquid droplet discharge heads 17; a weight-measuring unit 90 for measuring the weight of the functional liquid drops discharged from the plurality of functional liquid droplet discharge heads 17; and a unit-moving means 23 for mounting the flashing unit 14, the discharge inspection unit 18 and the weight-measuring unit 90 and moving the flashing unit 14, the discharge inspection unit 18 and the weight-measuring unit 90 in the main scanning direction, on the same track as the work stage 21. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a droplet discharge device that performs drawing on a workpiece using an ink jet type functional droplet discharge head, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

  Conventionally, as this type of droplet discharge device, a set table (work stage) for setting a workpiece, a flushing unit for performing discharge from the discharge nozzle of the functional droplet discharge head, and a functional liquid from the discharge nozzle are appropriate. A discharge inspection unit for inspecting whether or not the liquid droplets are discharged, a suction unit for recovering the function of the functional liquid droplet discharge head, and a wiping unit for wiping the nozzle surface of the functional liquid droplet discharge head after suction The thing is known (refer patent document 1). The flushing unit and the discharge inspection unit are provided on the movement axis of the work stage (main scanning direction), and the suction unit and the wiping unit are provided on another axis (sub scanning direction) orthogonal to the movement axis of the work stage.

Japanese Patent Laid-Open No. 2006-076067

  By the way, in order to perform highly accurate drawing, it is preferable to include a weight measuring unit that measures the weight of the functional liquid ejected from the ejection nozzle of the functional liquid droplet ejection head and adjusts the amount of functional liquid droplets. Since the weight measurement unit is performed, for example, before the drawing process, it can be considered that the weight measurement unit is provided on the other shaft together with the suction unit and the wiping unit in consideration of the maintenance process.

  However, in the conventional droplet discharge device, in order to improve the drawing accuracy, when the weight measurement is periodically performed, the weight measurement in which the functional droplet discharge head is provided on another axis is performed every time the weight measurement process is performed. Since it is necessary to face the unit, there is a problem that the tact time in the drawing process becomes long.

  It is an object of the present invention to provide a droplet discharge device, a method of manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus that can reduce the tact time in the drawing process even when the weight measurement processing is periodically performed. And

  A droplet discharge device according to the present invention includes a plurality of functional droplet discharge heads that perform drawing on a workpiece by an inkjet method, a work stage on which the workpiece is mounted, and a work stage with respect to the plurality of functional droplet discharge heads. A workpiece moving means for moving the liquid droplets in the main scanning direction, a flushing unit that receives discarded discharge from the plurality of functional liquid droplet ejection heads, a discharge inspection unit that inspects the ejection performance of the plurality of functional liquid droplet ejection heads, and a plurality of functions Equipped with a weight measurement unit that measures the weight of functional droplets discharged from the droplet discharge head, a flushing unit, a discharge inspection unit, and a weight measurement unit, as well as a flushing unit, a discharge inspection unit, and a weight measurement unit. Unit moving means for moving in the main scanning direction on the same orbit. Characterized in that was.

  According to this configuration, since the work moving means for moving the work stage and the unit moving means for moving the flushing unit, the discharge inspection unit, and the weight measuring unit are on the same track, the weight measurement is performed immediately before the drawing process. Can be performed. For this reason, even when the weight measurement is performed regularly, the transition from the weight measurement process to the drawing process can be performed in a short time, and the tact time as a whole can be shortened.

  In this case, it is preferable that the workpiece moving unit and the unit moving unit have a common linear motor and are individually driven by the linear motor.

  According to this configuration, the workpiece and each unit can be moved with high accuracy, and the structure of the workpiece moving means and the unit moving means can be simplified.

  In these cases, the weight measurement unit performs measurement in units of nozzle rows for a plurality of functional liquid droplet ejection heads, and the plurality of functional liquid droplet ejection heads are relative to the weight measurement unit in the sub-scanning direction. It is preferable to further comprise sub-moving means for moving the target.

  According to this configuration, the plurality of functional liquid droplet ejection heads are moved relative to the weight measurement unit in the sub-scanning direction, whereby the weight measurement of the plurality of functional liquid droplet ejection heads is performed by one weight measurement unit. be able to.

  In this case, for the measurement discharge, in a state where any one functional liquid droplet ejection head faces the liquid receiving container of the weight measurement unit, all other functional liquid droplet ejection heads can receive the waste liquid ejection. It is preferable that the weight measuring unit and the flushing unit are integrally formed.

  According to this configuration, all the other functional liquid droplet ejection heads waiting for weight measurement can be discharged while any one functional liquid droplet ejection head is performing measurement ejection for weight measurement. . Thus, the nozzle of the functional liquid droplet ejection head does not suffer from problems such as drying (thickening of the functional liquid) during the weight measurement waiting state.

  In this case, it is preferable that the flushing unit is formed in a size that can simultaneously receive the discarded discharge of the plurality of functional liquid droplet discharge heads at a position away from the liquid receiving container.

  According to this configuration, since the flushing is at a position away from the liquid receiving container, the discarded functional liquid droplets do not enter the liquid receiving container. Thereby, unnecessary replacement of the liquid receiving container can be prevented.

  In these cases, the discharge inspection unit receives the inspection discharge from the plurality of functional liquid droplet discharge heads, and recognizes the image of the belt-like inspection sheet extending in the sub-scanning direction and the landing dots that are inspected and discharged on the inspection sheet. And a recognition camera fixed in the main scanning direction in the vicinity of the plurality of functional liquid droplet ejection heads, and the flushing unit has a recognition camera for image recognition within the width of the inspection sheet. Even when facing the position, it is preferable that the size is formed so as to be able to simultaneously receive the discarded discharge of the plurality of functional liquid droplet discharge heads.

  According to this configuration, at the time of discharge inspection in which the recognition camera recognizes an image of a landing dot, the flushing unit can receive the discarded discharge of the plurality of functional liquid droplet discharge heads, thereby maintaining the function of the functional liquid droplet discharge head. be able to.

  In these cases, an image of the alignment mark of the workpiece is recognized, and an alignment camera fixedly provided in the main scanning direction in the vicinity of the plurality of functional liquid droplet ejection heads is further provided, and the alignment mark is aligned by the workpiece moving means. The flushing unit can simultaneously receive the discarded discharge of a plurality of functional liquid droplet ejection heads while the flushing unit is brought close to the work stage facing the position where the image of the camera can be recognized by the unit moving means. It is preferable that it is formed in a size.

  According to this configuration, when the alignment camera recognizes an image of the alignment mark of the workpiece, the flushing unit can receive the discarded discharge of the plurality of functional liquid droplet ejection heads, thereby maintaining the function of the functional liquid droplet ejection head. be able to.

  In these cases, it is preferable that a windshield member on which the electronic balance of the weight measurement unit faces directly below is disposed on a trajectory escaped from the plurality of functional liquid droplet ejection heads in the main scanning direction.

  According to this configuration, when the weight is measured, the electronic balance of the weight measuring unit is moved directly below the windproof member by the moving means, so that the electronic balance can accurately measure the weight without being affected by the airflow. .

  In these cases, a suction unit for sucking functional liquid from a plurality of functional liquid droplet ejection heads, a wiping unit for wiping each nozzle surface of the plurality of functional liquid droplet ejection heads, a suction unit and a wiping unit, and suction It is preferable to further include a subunit moving means for moving the unit and the wiping unit in the main scanning direction on the same track as the work stage.

  According to this configuration, the suction unit sucks the functional liquid from the functional liquid droplet ejection head, and the wiping unit wipes the nozzle surface of the functional liquid droplet ejection head that has been sucked. Thereby, the tact time in a series of processes consisting of suction, wiping and weight measurement can be shortened.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  An electro-optical device according to the present invention is characterized in that a film forming unit using functional droplets is formed on a workpiece using the above-described droplet discharge device.

  According to these configurations, the work cycle time can be shortened by performing the workpiece alignment process and the functional droplet discharge head discharge performance inspection in parallel using the droplet discharge device. Productivity can be improved. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

It is a top view of a droplet discharge device concerning an embodiment of the present invention. It is the side view which looked at the droplet discharge device concerning this embodiment from the main scanning direction. It is the side view which looked at the droplet discharge device concerning this embodiment from the subscanning direction. It is an external appearance perspective view of a functional droplet discharge head. It is a figure of the functional droplet discharge head which comprises a head group. It is explanatory drawing of the color arrangement pattern of the functional droplet discharge head mounted in the head unit. It is explanatory drawing of the color arrangement pattern of a color filter, (a) is a stripe arrangement | sequence, (b) is a mosaic arrangement | sequence, (c) has shown the delta arrangement | sequence. It is an external appearance perspective view around a discharge inspection unit. It is the block diagram explaining the main control system of the droplet discharge apparatus. It is a top view of a weight measurement unit. It is a side view of a weight measurement unit. It is a schematic diagram for demonstrating the regular flushing process at the time of alignment. It is a schematic diagram for demonstrating a weight measurement process. It is a schematic diagram for demonstrating a weight measurement process. It is a schematic diagram for demonstrating a regular flushing process. It is a top view of the droplet discharge device concerning a 2nd embodiment of the present invention. It is a side view of the droplet discharge device concerning this embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

  Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus according to the present embodiment is incorporated in a flat panel display production line, and uses, for example, a functional liquid droplet ejection head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced, and a liquid crystal A color filter of a display device, a light emitting element to be each pixel of an organic EL device, or the like is formed.

  As shown in FIGS. 1, 2 and 3, the droplet discharge device 1 is disposed on an X-axis support base 2 supported by a stone surface plate and extends in the X-axis direction which is the main scanning direction. The X-axis table 11 for moving the workpiece (substrate) W in the X-axis direction (main scanning direction) and a pair (two pieces) spanning the X-axis table 11 via the plurality of columns 4 ) And the Y-axis table 12 extending in the Y-axis direction, which is the sub-scanning direction, and a pair of alignment cameras 81, and span the X-axis table 11. 10 mounted with the image recognition unit 80, the flushing unit 14, the discharge inspection unit 18 and the weight measurement unit 90 provided on the X-axis table 11, and a plurality of functional liquid droplet discharge heads 17 (not shown). Carriage unit 51 and 10 carriage unit 51 is suspended from the Y-axis table 12. Then, the functional liquid droplet ejection head 17 is ejected and driven in synchronism with the driving of the X-axis table 11 and the Y-axis table 12, thereby ejecting R, G, and B3 functional liquid droplets, and a pair of reference marks (alignment). Mark) A predetermined drawing pattern is drawn on a plurality of types of workpieces W having different positions of M. The weight measuring unit 90 and the flushing unit 14 are integrally formed (details will be described later).

  Further, the droplet discharge device 1 includes a maintenance unit 5 including a suction unit 15 and a wiping unit 16, and these units are used for maintenance of the functional droplet discharge head 17, and the function of the functional droplet discharge head 17 is provided. Maintenance and functional recovery are planned. The suction unit 15 and the wiping unit 16 are disposed on the gantry 6 that is separated from the X-axis table 11 and is disposed at a position where the carriage unit 51 can be moved by the Y-axis table 12.

  The suction unit 15 has a plurality of divided suction units 141, sucks the functional liquid droplet ejection head 17, and forcibly discharges the functional liquid from the ejection nozzle 98 of the functional liquid droplet ejection head 17. The wiping unit 16 has a wiping sheet 151 sprayed with a cleaning liquid, and wipes (performs wiping) the nozzle surface 97 of the functional liquid droplet ejection head 17 after suction.

  Although not shown in the figure, the droplet discharge device 1 is provided with a control means 7 (see FIG. 9) for controlling the entire device, and a weight measurement process, a drawing process and a maintenance process, which will be described later, are controlled. This is performed based on control by means 7.

  Hereinafter, components of the droplet discharge device 1 will be described. As shown in FIG. 1 or FIG. 2, the X-axis table 11 includes a work stage 21 on which a work W is set, an X-axis first slider 22 that slidably supports the work stage 21 in the X-axis direction, and the weight described above. An X-axis second slider 23 that supports the measurement unit 90 and the discharge inspection unit 18 slidably in the X-axis direction, and extends in the X-axis direction, and the workpiece W is moved in the X-axis direction via the X-axis first slider 22. A pair of left and right X-axis linear motors 26 that move the weight measuring unit 90 and the discharge inspection unit 18 in the X-axis direction via the X-axis second slider 23 and the X-axis linear motor 26 are arranged in parallel. A pair of (two) X-axis common support bases 24 for guiding the movement of the first shaft slider 22 and the second X-axis slider 23. The X-axis first slider 22 and the X-axis common support base 24 constitute work moving means as claimed in the claims, and the X-axis second slider 23 and the X-axis common support base 24 as claimed in unit claims. These can be individually driven by the X-axis linear motor 26.

  The work stage 21 has a suction table 31 for sucking and setting the work W, a θ table 32 for supporting the suction table 31 and correcting the position of the work W set on the suction table 31 in the θ-axis direction. ing. The position on the left side of the drawing in FIG. 1 is an alignment position 41 (discharge material position) for aligning the workpiece W, and when an unprocessed workpiece W is introduced (feed material) into the suction table 31, When the processed workpiece W is collected (material removal), the suction table 31 is moved to this position. Then, the work W is carried in and out (replaced) by the robot arm (not shown). Further, the suction table 31 incorporates a mechanism (not shown) for pre-aligning the supplied workpiece W so as to draw it in the X-axis direction and the Y-axis direction. Note that a pair of pre-drawing flushing boxes 121 of the pre-drawing flushing unit 111 are attached to a pair of sides parallel to the Y-axis direction of the work stage 21.

  The image recognition unit 80 faces the X-axis table 11 from the upper side, and two alignment cameras 81 for recognizing each reference mark (alignment mark) M of the various workpieces W supplied and the X-axis common support base 24. And a camera moving mechanism 82 that moves the two alignment cameras 81 only in the sub-scanning direction via a camera holder (not shown). Each recognition camera 81 images the alignment marks of various workpieces W supplied by the robot arm while moving in the sub-scanning direction by the camera moving mechanism 82 in cooperation with the movement of the work stage 21 in the main scanning direction. Then, the positions of various workpieces W are recognized. Based on the imaging result of the alignment camera 81, θ correction of the workpiece W by the θ table 32 is performed.

  The Y-axis table 12 includes 10 bridge plates 52 each of which fixes 10 carriage units 51 constituting the head unit 13 and 10 sets of Y-axis sliders (10 pairs of Y-axis sliders) that support the 10 bridge plates 52 in both ends. A pair of Y-axis linear motors (not shown) installed on the pair of Y-axis support bases 3 and moving the bridge plate 52 in the Y-axis direction via 10 sets of Y-axis sliders; It has. Note that the Y-axis table 12 constitutes sub-moving means in the claims.

  When the pair of Y-axis linear motors are driven (synchronously), each Y-axis slider translates in the Y-axis direction simultaneously with the pair of Y-axis support bases 3 as a guide. As a result, the bridge plate 52 moves in the Y-axis direction, and the carriage unit 51 moves in the Y-axis direction (sub scanning). In this case, by controlling the drive of the Y-axis linear motor, the carriage unit 51 can be moved independently and individually, or the ten carriage units 51 can be moved together. is there. In addition,

  Each carriage unit 51 includes a head unit 13 including twelve functional liquid droplet ejection heads 17 and a sub-carriage 53 that supports the twelve functional liquid droplet ejection heads 17 in two groups. (See FIG. 5). Further, each carriage unit 51 supports the head unit 13 via the θ rotation mechanism 61 that supports the head unit 13 so as to be capable of θ correction (θ rotation), and the Y axis table 12 (each bridge plate 52) via the θ rotation mechanism 61. And a suspension member 62 to be supported on.

  As shown in FIG. 4, the functional liquid droplet ejection head 17 has a so-called double structure, a functional liquid introduction part 91 having two connection needles 92, and a dual head substrate that is continuous with the functional liquid introduction part 91. 93, and a head main body 94 which is connected to the lower side of the functional liquid introducing portion 91 and has an in-head flow path filled with the functional liquid therein. The connection needle 92 is connected to a functional liquid tank (not shown), and supplies the functional liquid to the functional liquid introduction unit 91. The head main body 94 includes a cavity 95 (piezoelectric piezoelectric element) and a nozzle plate 96 having a nozzle surface 97 in which a large number of discharge nozzles 98 are opened. When the functional liquid droplet ejection head 17 is ejected, a functional liquid droplet is ejected from the ejection nozzle 98 by the pump action of the cavity 95 (a voltage is applied to the piezoelectric element).

  In addition, two nozzle rows 98b made up of a large number of discharge nozzles 98 are formed on the nozzle surface 97 in parallel with each other. The two nozzle rows 98b are displaced from each other by a half nozzle pitch. The functional liquid droplet ejection head 17 is configured to freely eject liquid droplets for each ejection nozzle 98.

  As shown in FIG. 5, a plurality of (12) functional liquid droplet ejection heads 17 are mounted on the head unit 13 via the sub-carriage 53. The twelve functional liquid droplet ejection heads 17 are divided into two groups in the Y-axis direction, and six heads (two each for R, G, and B) are arranged in a staircase pattern in the X-axis direction to form a head group 54. Yes. In the present embodiment, RGB three-color drawing lines that are continuous in the Y-axis direction are formed by two sub-scans of the full-function liquid droplet ejection heads 17 (12 × 10). The length of the drawing line corresponds to the width of the maximum size workpiece W that can be mounted on the set table 21.

  By the way, 12 × 10 functional liquid droplet ejection heads 17 mounted on the head unit 13 correspond to any of the R, G, and B functional liquids (see FIG. 6), and the work W has three colors. It is possible to draw a drawing pattern composed of the functional liquid. There are three types of drawing patterns as shown in FIG. 7, and in this embodiment, drawing is performed using the drawing pattern (bitmap data) shown in FIG.

  In the drawing operation of the droplet discharge device 1, first, the first drawing operation (forward path) is performed while moving the workpiece W in the X-axis direction (to the left side in FIG. 1) by the X-axis table. Thereafter, the head unit 13 is moved by two heads in the Y-axis direction (sub-scanning), and the workpiece W is moved in the X-axis direction (to the right side in FIG. 1), and the second drawing operation (return path). I do. Then, the head unit 13 is again sub-scanned by two heads, and the third drawing operation (forward path) is performed while moving the workpiece W in the X-axis direction again (to the left side in FIG. 1). With such a drawing operation, R, G, and B3 color drawing processing is efficiently performed.

  Next, the main control system of the droplet discharge device 1 will be described with reference to FIG. As shown in the figure, the droplet discharge device 1 includes a droplet discharge unit 191 having a head unit 13 (functional droplet discharge head 17) and an X-axis table 11, and moves a workpiece W in the X-axis direction. A workpiece moving unit 192, a Y-axis table 12, a head moving unit 193 that moves the head unit 13 in the Y-axis direction, a maintenance unit 194 having each unit of the maintenance unit 5, and various sensors, A detection unit 195 that performs various types of detection, a drive unit 196 that includes various drivers that drive and control each unit, and a control unit 197 (control unit 7) that is connected to each unit and controls the entire droplet discharge device 1 are provided. Yes.

  The control unit 197 includes an interface 201 for connecting each unit, a storage area that can be temporarily stored, a RAM 202 that is used as a work area for control processing, and various storage areas. ROM 203 for storing programs and control data, and a hard disk for storing drawing data for drawing a predetermined drawing pattern on work W, various data from each unit, and programs for processing various data 204, a CPU 205 that performs arithmetic processing on various data according to programs stored in the ROM 203 and the hard disk 204, and a bus 206 that connects them to each other.

  The control unit 197 inputs various data from each unit via the interface 201 and causes the CPU 205 to perform arithmetic processing according to a program stored in the hard disk 204 (or sequentially read by a CD-ROM drive or the like) The processing result is output to each means via the drive unit 196 (various drivers). Thereby, the entire apparatus is controlled, and various processes of the droplet discharge apparatus 1 are performed.

  As shown in FIGS. 1, 2, and 8, the discharge inspection unit 18 determines whether or not the functional liquid is appropriately discharged from the all-function liquid droplet discharge head 17 (discharge nozzle 98 thereof) mounted on the head unit 13. (Dot missing) is a target for receiving a functional liquid inspected and discharged from all the discharge nozzles 98 of the full-function liquid droplet discharge head 17 of the head unit 13 and drawing a predetermined inspection pattern. A drawing unit 161 and an imaging unit 162 that images and inspects an inspection pattern (landing dots) drawn on the drawing unit 161 are provided. The drawing unit 161 is mounted on the X-axis table 11, and the imaging unit 162 is fixedly provided at an inspection position directly below the Y-axis table 12 (however, an inspection camera (recognition camera) 163 described later is moved). To do).

  The drawing unit 161 receives inspection discharge from the functional liquid droplet discharge head 17 and extends in the sub-scanning direction, a strip-shaped inspection sheet 171, an inspection stage 172 on which the inspection sheet 171 is placed, and an inspection sheet 171. The sheet feeding means 173 for feeding the inspection sheet 171 so as to send the inspected part to the inspection stage 172 and the non-inspected part to the inspection stage 172, the sheet feeding support member 174 for supporting the sheet feeding means 173, and the sheet A unit base 175 that supports the feed support member 174 and a vacuum sensor 178 that detects a set failure of the inspection sheet 171 placed on the inspection stage 172 are provided.

  As shown in FIG. 2, the imaging unit 162 is supported by the above-described Y-axis support base 3, faces the X-axis table 11 from the upper side, and recognizes two landing dots that are inspected and discharged on the inspection sheet 171. An inspection camera 163, a camera movement mechanism 164 fixed to the Y-axis support base 3 and supporting two inspection cameras 163 slidably in the Y-axis direction via a camera holder, and a camera movement mechanism 164 A camera movement motor (not shown) for moving the inspection camera 163 in the Y-axis direction.

  The imaging unit 162 is disposed so that the two inspection cameras 163 face the inspection sheet 171 when the suction table 31 faces the workpiece replacement position. During the alignment, the inspection pattern can be imaged. The imaging results obtained by the two inspection cameras 163 are transmitted to the control means 7 for image recognition, and based on this image recognition, each ejection nozzle 98 of each functional liquid droplet ejection head 17 normally ejects functional liquid. Whether the nozzle is clogged or not (no nozzle clogging) is determined. This determination is also performed during workpiece replacement and alignment. That is, the discharge inspection unit is configured by the imaging unit 162 and the control unit 7.

  As shown in FIGS. 10 and 11, the weight measurement unit 90 is formed integrally with the flushing unit 14, and these units include a plurality of (20 in this embodiment) weight measurement devices 91 and four weights. There are provided five support frames 92 that are collectively supported for each measuring device 91, and a regular flushing box 93 that is accommodated in the weight measuring device 91, and the support frame 92 is sub-scanned on the X-axis second slider 23. It is mounted side by side in the direction. Further, a windshield member 101 with the electronic balance 99 facing directly below is disposed on a locus escaped in the main scanning direction from a position facing the plurality of functional liquid droplet ejection heads 17 of the weight measuring unit 90 (see FIG. 13). . The plurality of weight measuring devices 91 are juxtaposed in the Y-axis direction, and one weight measuring device 91 corresponds to one head group 54.

  Each weight measuring device 91 includes a liquid receiving container 94 that receives a functional liquid discharged from any one of the six functional liquid droplet ejection heads 17 of the six functional liquid droplet ejection heads 17 constituting the head group 54, and a liquid receiving apparatus. An electronic balance 99 that measures the weight of the functional liquid via the container 94 and the X-axis direction so as to sandwich the liquid receiving container 94 are sandwiched and received by the functional liquid droplet ejection head 17 that is not the object of measurement during weight measurement. A pair of regular flushing boxes 95 for weight measurement and a case 96 for housing them are provided. A functional liquid absorbent 97 is laid in the regular flushing box 95 and the regular flushing box 93 at the time of weight measurement in a state where both long sides thereof are pressed by a pair of presser plates 98. The liquid receiving container 94 is formed to a size that can receive the functional liquid for each functional liquid droplet ejection head 17 in units of nozzle rows.

  The electronic balance 99 measures the weight of the functional liquid discharged to the liquid receiving container 94 and outputs the measurement result to the control means 7. The control means 7 controls the drive power (voltage value) applied from the head driver 38 to the functional liquid droplet ejection head 17 based on the measurement result input from the electronic balance 99. That is, when the weight measurement result is within the target range, the next workpiece W is drawn without changing the voltage value. On the other hand, when the weight measurement result is out of the target range, the voltage value is changed based on the resolution data of the applied voltage value and the weight measurement value obtained in advance, and the weight measurement is performed again with the changed voltage value. This weight measurement and voltage value change are repeated until the weight measurement result is within the target range.

  Of the pair of regular flushing boxes 95 for weight measurement, the regular flushing box 95a for weight measurement on the side of the regular flushing box 93 and the regular flushing box 93 are used for discharge inspection, and these are within the width of the inspection sheet 171. Even when the inspection camera 163 faces at any of the positions, the size is formed so as to be able to receive the discarded discharge of the plurality of functional liquid droplet discharge heads 17 at the same time.

  The regular flushing box 93 is for receiving the waste discharge (flushing) of the all-function liquid droplet ejection head 17 of the head unit 13 that is performed when the drawing process is suspended such as when the workpiece W is replaced. It is provided at a position that is out of the range. Thereby, the functional liquid droplets discarded and discharged from the functional liquid droplet ejection head 17 do not enter the liquid receiving container 94, and unnecessary replacement of the liquid receiving container 94 can be prevented. Further, the periodic flushing box 93 is periodically operated by the X-axis second slider 23 with respect to the work stage 21 in which the alignment mark M of the workpiece W faces the position where the image of the alignment camera 81 can be recognized by the X-axis first slider 22. The flushing box 93 is formed in such a size that it can simultaneously receive the discarded ejection of the plurality of functional liquid droplet ejection heads 17 with the flushing box 93 being as close as possible. More specifically, as shown in FIG. 12A, when the workpiece W is set at the center, image recognition is performed on the workpiece W where the alignment mark M is farthest from the functional liquid droplet ejection head 17. In this case, the side (right side in the drawing) of the regular flushing box 93 that is away from the work stage 21 faces directly below the functional liquid droplet ejection head 17 and receives the waste ejection from the plurality of functional liquid droplet ejection heads 17. On the other hand, as shown in FIG. 12B, when image recognition is performed on the workpiece W whose alignment mark M is closest to the functional liquid droplet ejection head 17, periodic flushing is performed immediately below the functional liquid droplet ejection head 17. The side close to the work stage 21 of the box 93 (the left side in the figure) faces and receives the waste discharge from the plurality of functional liquid droplet discharge heads 17. Thereby, even when the alignment camera 81 recognizes the alignment mark M, the periodic flushing box 93 can receive the discarded discharge of the plurality of functional liquid droplet ejection heads 17, and the function of the functional liquid droplet ejection head 17. Can be maintained.

  In the present embodiment, since one weight measuring device 91 measures six functional liquid droplet ejection heads 17 in units of nozzle arrays, one nozzle array of one functional liquid droplet ejection head 17 performs measurement ejection. While the other five functional liquid droplet ejection heads 17 wait for the measurement ejection to end, the functional liquid droplet ejection heads 17 in the “waiting” state can be discarded and ejected. . Therefore, the discharge nozzle is not dried during the “waiting” state, and the measurement discharge can be performed well after the “waiting” state, and an appropriate measurement result can be obtained.

  Next, a series of operations in weight measurement will be described with reference to FIG. 13, FIG. 14, and FIG. When the weight measurement is started, the X-axis second table 23 causes each liquid receiving container 94 of each weight measuring device 91 to face the first functional liquid droplet ejection head 17a of each head group 16 (FIG. 13A). reference). Then, measurement discharge is performed on each liquid receiving container 94 in units of nozzle rows from all nozzles of the first functional liquid droplet discharge head 17a of each head group 16. At this time, the second to sixth functional liquid droplet ejection heads 17b to 17f of each head group 16 discard and eject to the periodic flushing box 95 during weight measurement (see FIG. 14A).

  When the measurement and discharge of the functional liquid droplet discharge head 17a is completed, the X-axis second table 23 moves each liquid receiving container 94 directly below the windshield member 101 provided on the movement locus of the weight measurement unit 91 (FIG. 13 (b)). In this state, the droplet discharge amount is measured for each nozzle row by the electronic balance 99. As a result, the electronic balance 99 can accurately measure the weight without being influenced by the airflow since the airflow (downflow or turbulent flow by the chamber room) is blocked by the windshield member 101. Then, after measuring the weight of the droplet discharge amount of the remaining nozzle row of the first functional droplet discharge head 17a, the second functional droplet discharge head 17b is made to face the liquid receiving container 94, and the measurement discharge is performed in the same manner. (FIG. 14B). In the same manner, the droplet discharge amount is sequentially measured for the six functional droplet discharge heads 17 of each head group 54.

  Further, when drawing processing of the workpiece W or the like is suspended, the X-axis second table 23 causes each of the regular flushing boxes 93 of each of the weight measuring devices 91 to face all the functional liquid droplet ejection heads 17 (FIG. 15 ( a)). Then, all the functional liquid droplet ejection heads 17 discard and eject each periodic flushing box 93 (see FIG. 15B).

  As described above, in the droplet discharge device 1 of the present embodiment, the work moving means for moving the work stage 21 and the unit moving means for moving the flushing unit 14, the discharge inspection unit 18, and the weight measuring unit 90 are the same. Since it is on the orbit, it is possible to measure the weight immediately before the drawing process. For this reason, even when the weight measurement is performed regularly, the transition from the weight measurement process to the drawing process can be performed in a short time, and the tact time as a whole can be shortened.

  Next, with reference to FIG. 16 and FIG. 17, the droplet discharge apparatus 1 which concerns on 2nd Embodiment of this invention is demonstrated. The same components as those of the droplet discharge device 1 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In this embodiment, a suction unit 15 and a wiping unit 16 are provided on the X-axis table 11 of the droplet discharge device 1 in addition to the discharge inspection unit 18 and the weight measurement unit 90. The suction unit 15 is a flushing unit. 14 (periodic flushing unit). Specifically, on the same axis as the work stage 21, the wiping unit 16, the weight measurement unit 90, the suction unit 15, and the discharge inspection unit 18 are provided in this order from the side away from the functional droplet discharge head 17. 90, the suction unit 15 and the discharge inspection unit 18 are mounted on the X-axis second slider 23, and the wiping unit 16 is mounted on the X-axis third slider (subunit moving means) 102.

  When performing the suction process, the X-axis second slider 23 causes the suction unit 15 to face the functional liquid droplet ejection head 17 and sucks the functional liquid from the ejection nozzle 98 of the functional liquid droplet ejection head 17. Thereafter, when performing the wiping process, the suction unit 15 is slightly moved by the X-axis second slider 23, and the wiping unit 16 is brought under the functional liquid droplet ejection head 17 by the X-axis third slider 102. The nozzle surface 97 of the functional liquid droplet ejection head 17 after the suction is wiped off. When performing the weight measurement process, the X-axis third slider 102 moves the wiping unit 16 in a direction away from the functional liquid droplet ejection head 17 and the X-axis second slider 23 functions the weight measurement unit 90. The weight measurement process described above is performed under the droplet discharge head 17.

  As described above, in the droplet discharge device 1 of the present embodiment, the suction unit 15 sucks the functional liquid from the functional droplet discharge head 17 and the nozzle surface 97 of the functional droplet discharge head 17 from which the wiping unit 16 is sucked. Wipe away. Thereby, the tact time in a series of processes consisting of suction, wiping and weight measurement can be shortened.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 18 is a flowchart showing the manufacturing process of the color filter, and FIG. 19 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 19B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 19C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 19 (d), functional droplets are ejected by the functional droplet ejection head 17, and each pixel region 507a surrounded by the partition wall portion 507b is placed. Let it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 19E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 20 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 19, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 20 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 21 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 22 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 23 is a cross-sectional view of an essential part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 24, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), and an opposing surface. It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 25, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane as a processing gas. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the work stage 21 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 27, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. Then, as shown in FIG. 28, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 29, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 29)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 30, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 31, the same steps as in the case of the light emitting layer 617b corresponding to blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 32, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
At the top of the cathode 604, Al film as the electrode, Ag film and a protective layer of SiO _2, SiN, or the like for its antioxidant is appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 33 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the work stage 21 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 34 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 35A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 7 ... Control means 11 ... X-axis table 12 ... Y-axis table 14 Flushing unit 15 ... Suction unit 16 ... Wiping unit 17 ... Functional droplet discharge head 18 ... Discharge performance inspection unit 21 ... Work stage 22 ... X-axis first slider 23 ... X-axis second slider 26 ... Linear motor 90 ... Weight measuring unit 94 ... Liquid receiving container 99 ... Electronic balance 101 ... Wind shield member W ... Workpiece.

Claims (12)

A plurality of functional liquid droplet ejection heads that perform ink-jet drawing on a workpiece;
A work stage on which the work is mounted;
A workpiece moving means for moving the workpiece in the main scanning direction with respect to the plurality of functional liquid droplet ejection heads via the workpiece stage;
A flushing unit that receives discarded discharge from the plurality of functional droplet discharge heads;
A discharge inspection unit for inspecting the discharge performance of the plurality of functional liquid droplet discharge heads;
A weight measuring unit for measuring the weight of the functional liquid droplets ejected from the plurality of functional liquid droplet ejection heads;
Unit moving means for mounting the flushing unit, the discharge inspection unit, and the weight measurement unit, and for moving the flushing unit, the discharge inspection unit, and the weight measurement unit in the main scanning direction on the same track as the work stage. And a droplet discharge device.   The droplet discharge apparatus according to claim 1, wherein the workpiece moving unit and the unit moving unit have a common linear motor and are individually driven by the linear motor. The weight measuring unit is configured to perform measurement in units of nozzle rows for the plurality of functional liquid droplet ejection heads,
3. The droplet discharge according to claim 1, further comprising sub-moving means for moving the plurality of functional droplet discharge heads relative to the weight measuring unit in a sub-scanning direction. apparatus. For measurement discharge, in a state where any one of the functional liquid droplet ejection heads faces the liquid receiving container of the weight measurement unit, so that all other functional liquid droplet ejection heads can be discarded and discharged,
The droplet discharge device according to claim 3, wherein the weight measuring unit and the flushing unit are integrally formed.   5. The droplet according to claim 4, wherein the flushing unit is formed to have a size capable of simultaneously receiving the discarded discharge of the plurality of functional droplet discharge heads at a position outside the liquid receiving container. Discharge device. The discharge inspection unit receives a test discharge from the plurality of functional liquid droplet discharge heads, and extends in the sub-scanning direction, and a strip-shaped test sheet;
Recognizing the landing dots that have been inspected and discharged on the inspection sheet, and having a recognition camera fixedly provided in the main scanning direction in the vicinity of the plurality of functional liquid droplet ejection heads,
The flushing unit has a size capable of receiving the waste discharge of the plurality of functional liquid droplet discharge heads simultaneously even when the recognition camera for image recognition faces any position within the width of the inspection sheet. The droplet discharge device according to claim 1, wherein the droplet discharge device is formed. In addition to recognizing the alignment mark of the workpiece, and further comprising an alignment camera fixedly provided in the main scanning direction in the vicinity of the plurality of functional liquid droplet ejection heads,
The flushing unit is in a state in which the flushing unit is maximally approached by the unit moving means with respect to the work stage in which the alignment mark faces the position where the image of the alignment camera can be recognized by the work moving means. The droplet discharge device according to claim 1, wherein the droplet discharge device is formed to have a size capable of receiving the discharge of the plurality of functional droplet discharge heads simultaneously.   The windshield member in which the electronic balance of the weight measuring unit faces directly below is disposed on the track that has escaped from the plurality of functional liquid droplet ejection heads in the main scanning direction. The liquid droplet ejection apparatus described. A suction unit for sucking a functional liquid from the plurality of functional liquid droplet ejection heads;
A wiping unit for wiping each nozzle surface of the plurality of functional liquid droplet ejection heads;
A sub-unit moving means for mounting the suction unit and the wiping unit and moving the suction unit and the wiping unit in the main scanning direction on the same track as the work stage is further provided. The liquid droplet ejection apparatus according to claim 1.   10. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 1 is used to form a film forming portion with functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 1, wherein a film forming portion is formed by functional droplets on the workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 10 or the electro-optical device according to claim 11.

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