JP2010183021A5 - - Google Patents
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- Publication number
- JP2010183021A5 JP2010183021A5 JP2009027598A JP2009027598A JP2010183021A5 JP 2010183021 A5 JP2010183021 A5 JP 2010183021A5 JP 2009027598 A JP2009027598 A JP 2009027598A JP 2009027598 A JP2009027598 A JP 2009027598A JP 2010183021 A5 JP2010183021 A5 JP 2010183021A5
- Authority
- JP
- Japan
- Prior art keywords
- divided
- semiconductor device
- mim capacitor
- mim
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 9
- 239000003990 capacitor Substances 0.000 description 34
- 238000009792 diffusion process Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009027598A JP5592074B2 (ja) | 2009-02-09 | 2009-02-09 | 半導体装置 |
| US12/704,608 US8525269B2 (en) | 2009-02-09 | 2010-02-12 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009027598A JP5592074B2 (ja) | 2009-02-09 | 2009-02-09 | 半導体装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014139422A Division JP5863892B2 (ja) | 2014-07-07 | 2014-07-07 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010183021A JP2010183021A (ja) | 2010-08-19 |
| JP2010183021A5 true JP2010183021A5 (https=) | 2012-03-22 |
| JP5592074B2 JP5592074B2 (ja) | 2014-09-17 |
Family
ID=42539719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009027598A Expired - Fee Related JP5592074B2 (ja) | 2009-02-09 | 2009-02-09 | 半導体装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8525269B2 (https=) |
| JP (1) | JP5592074B2 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5621357B2 (ja) * | 2010-06-30 | 2014-11-12 | 富士通セミコンダクター株式会社 | 半導体装置 |
| US10134729B2 (en) * | 2013-09-27 | 2018-11-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Vertical noise reduction in 3D stacked semiconductor devices |
| US9524964B2 (en) * | 2014-08-14 | 2016-12-20 | Xilinx, Inc. | Capacitor structure in an integrated circuit |
| JP6318975B2 (ja) * | 2014-08-20 | 2018-05-09 | 株式会社デンソー | 半導体装置 |
| JP2017175146A (ja) * | 2017-05-02 | 2017-09-28 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000241762A (ja) | 1999-02-24 | 2000-09-08 | Tokin Corp | 光アイソレータ |
| JP3522144B2 (ja) | 1999-02-25 | 2004-04-26 | 富士通株式会社 | 容量回路および半導体集積回路装置 |
| JP4220484B2 (ja) * | 2005-03-15 | 2009-02-04 | 日本バーブラウン株式会社 | 集積回路抵抗体アレイ |
| JP2007049309A (ja) | 2005-08-08 | 2007-02-22 | Nec Electronics Corp | スイッチ回路 |
| US7932993B2 (en) * | 2006-09-16 | 2011-04-26 | Wenhui Mei | Divided sub-image array scanning and exposing system |
-
2009
- 2009-02-09 JP JP2009027598A patent/JP5592074B2/ja not_active Expired - Fee Related
-
2010
- 2010-02-12 US US12/704,608 patent/US8525269B2/en not_active Expired - Fee Related
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