JP2010145185A5 - - Google Patents

Download PDF

Info

Publication number
JP2010145185A5
JP2010145185A5 JP2008321477A JP2008321477A JP2010145185A5 JP 2010145185 A5 JP2010145185 A5 JP 2010145185A5 JP 2008321477 A JP2008321477 A JP 2008321477A JP 2008321477 A JP2008321477 A JP 2008321477A JP 2010145185 A5 JP2010145185 A5 JP 2010145185A5
Authority
JP
Japan
Prior art keywords
test surface
positions
light beam
calculation step
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008321477A
Other languages
English (en)
Japanese (ja)
Other versions
JP5289026B2 (ja
JP2010145185A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008321477A priority Critical patent/JP5289026B2/ja
Priority claimed from JP2008321477A external-priority patent/JP5289026B2/ja
Priority to US12/633,107 priority patent/US8345263B2/en
Publication of JP2010145185A publication Critical patent/JP2010145185A/ja
Publication of JP2010145185A5 publication Critical patent/JP2010145185A5/ja
Application granted granted Critical
Publication of JP5289026B2 publication Critical patent/JP5289026B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008321477A 2008-12-17 2008-12-17 測定方法及び測定装置 Expired - Fee Related JP5289026B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008321477A JP5289026B2 (ja) 2008-12-17 2008-12-17 測定方法及び測定装置
US12/633,107 US8345263B2 (en) 2008-12-17 2009-12-08 Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008321477A JP5289026B2 (ja) 2008-12-17 2008-12-17 測定方法及び測定装置

Publications (3)

Publication Number Publication Date
JP2010145185A JP2010145185A (ja) 2010-07-01
JP2010145185A5 true JP2010145185A5 (enExample) 2012-02-02
JP5289026B2 JP5289026B2 (ja) 2013-09-11

Family

ID=42565782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008321477A Expired - Fee Related JP5289026B2 (ja) 2008-12-17 2008-12-17 測定方法及び測定装置

Country Status (1)

Country Link
JP (1) JP5289026B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5618727B2 (ja) * 2010-09-21 2014-11-05 キヤノン株式会社 形状測定法及び形状計測装置
CN117760336B (zh) * 2023-12-22 2024-06-14 霖鼎光学(上海)有限公司 一种五轴干涉测量系统的标定方法、介质及电子设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03156305A (ja) * 1989-11-14 1991-07-04 Matsushita Electric Works Ltd 非球面形状測定装置
JPH0448201A (ja) * 1990-06-15 1992-02-18 Olympus Optical Co Ltd 干渉測定装置
JPH0587542A (ja) * 1991-09-30 1993-04-06 Ricoh Co Ltd 曲面の測定方法及び装置
JP3199487B2 (ja) * 1992-09-02 2001-08-20 オリンパス光学工業株式会社 干渉測定方法
JP2000088547A (ja) * 1998-09-14 2000-03-31 Nikon Corp 形状測定装置
JP2000088546A (ja) * 1998-09-14 2000-03-31 Nikon Corp 形状測定装置および測定方法
US6781700B2 (en) * 2001-06-20 2004-08-24 Kuechel Michael Scanning interferometer for aspheric surfaces and wavefronts
US7218403B2 (en) * 2002-06-26 2007-05-15 Zygo Corporation Scanning interferometer for aspheric surfaces and wavefronts
JP2004045168A (ja) * 2002-07-11 2004-02-12 Nikon Corp 非球面形状計測方法
US7495773B2 (en) * 2006-02-24 2009-02-24 Zygo Corporation In situ determination of pixel mapping in interferometry

Similar Documents

Publication Publication Date Title
CN102565081B (zh) 基于圆结构光视觉检测三维数据点的管道缺陷检测方法
US9389349B2 (en) System and method to determine depth for optical wafer inspection
CN101571379A (zh) 一种无缝圆形钢管直径及直线度参数测量的方法
JP2016528549A5 (enExample)
CN102183213A (zh) 一种基于相位测量偏折术的非球面镜检测方法
MY151213A (en) Apparatus, system and method for measuring thread features on pipe or tube end
JP2013092402A5 (enExample)
CN104390987A (zh) 一种检测钢球表面缺陷的新型光纤传感器及检测方法
JP2009265087A5 (enExample)
JP2010530070A5 (enExample)
JP2009016761A5 (enExample)
CN105157598A (zh) 弯月透镜的透射波前检测装置及检测方法
JP2010145184A5 (enExample)
JP2020522124A5 (enExample)
CN103862327A (zh) 一种球头球心位置检测方法
JP2011124345A5 (enExample)
US10151581B2 (en) Method and device for determining the position and orientation of a specular surface forming a diopter
JP2010145185A5 (enExample)
ATE394648T1 (de) Messvorrichtung zum gleichzeitigen erfassen eines drehwinkels und einer verschiebeposition
JP2009162591A5 (enExample)
JP2012093348A5 (enExample)
JP2010230578A (ja) 偏芯量測定方法
CN106908010B (zh) 一种曲率测量方法及装置
KR20110087551A (ko) 형상 검사장치 및 형상 검사방법
JP6013819B2 (ja) 表面形状検査装置及び表面形状検査方法