JP2010127157A5 - - Google Patents
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- Publication number
- JP2010127157A5 JP2010127157A5 JP2008301737A JP2008301737A JP2010127157A5 JP 2010127157 A5 JP2010127157 A5 JP 2010127157A5 JP 2008301737 A JP2008301737 A JP 2008301737A JP 2008301737 A JP2008301737 A JP 2008301737A JP 2010127157 A5 JP2010127157 A5 JP 2010127157A5
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum
- main pump
- vacuum pump
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 12
- 238000004891 communication Methods 0.000 description 9
- 238000001816 cooling Methods 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 238000009434 installation Methods 0.000 description 6
- 238000007906 compression Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000006835 compression Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002195 synergetic effect Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 229910001200 Ferrotitanium Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008301737A JP5133224B2 (ja) | 2008-11-26 | 2008-11-26 | 真空ポンプユニット |
| PCT/JP2009/070072 WO2010061939A1 (ja) | 2008-11-25 | 2009-11-20 | ドライ真空ポンプユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008301737A JP5133224B2 (ja) | 2008-11-26 | 2008-11-26 | 真空ポンプユニット |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010127157A JP2010127157A (ja) | 2010-06-10 |
| JP2010127157A5 true JP2010127157A5 (enrdf_load_stackoverflow) | 2011-01-06 |
| JP5133224B2 JP5133224B2 (ja) | 2013-01-30 |
Family
ID=42327726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008301737A Active JP5133224B2 (ja) | 2008-11-25 | 2008-11-26 | 真空ポンプユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5133224B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5823808B2 (ja) * | 2011-10-11 | 2015-11-25 | 株式会社荏原製作所 | 真空ポンプ及び真空ポンプユニット |
| JP6240229B2 (ja) * | 2015-02-25 | 2017-11-29 | 株式会社荏原製作所 | 真空ポンプ |
-
2008
- 2008-11-26 JP JP2008301737A patent/JP5133224B2/ja active Active
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