JP2010123598A - Device, method and tool for supporting plate-like member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device, a method and a tool for unfailingly supporting a plate-like member by clamping the member while employing a simple configuration. <P>SOLUTION: The supporting device 10 includes a table 11 for supporting a plate-like member such as a semiconductor wafer W, and a supporting tool 12 disposed on the table 11. The table includes suction holes 15 opened on the supporting surface 11A of the table 11, and the supporting tool 12 is disposed on the supporting surface 11A while forming a space S1 closed on the upper part of the suction holes 15. The supporting tool 12 made of a member having elasticity includes a body 20 and a flange portion 21 provided continuing thereto, wherein when the space S1 is depressurized, the body 20 and the flange portion 21 displace at a relative angle so that the outer circumference of the plate-like member is sandwiched by the body 20 and the flange portion 21. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a plate-shaped member support device, a support method, and a support, and more particularly to a support device and a support method that support a plate-shaped member such as a semiconductor wafer and can also be applied to transport of the plate-shaped member. It relates to a support.

Recent semiconductor wafers (hereinafter simply referred to as “wafers”) are required to be back-ground to a thickness of several tens of μm while being increased in diameter in order to improve device formation efficiency. Larger diameter and ultrathin wafers have a higher risk of causing damage such as cracks during various processes due to the increased vulnerability.
Therefore, Patent Document 1 discloses a configuration in which back surface grinding is performed in a state where a ring-shaped convex portion is left on the outer peripheral side of a wafer where no device is formed, and the convex portion is used as a wafer reinforcement.
When performing such backside grinding of a wafer, a protective adhesive sheet is attached to the device forming surface side, and the adhesive sheet side is placed on a table of a grinding apparatus. The adhesive sheet needs to be peeled off at the stage after the back surface grinding, and a sheet peeling apparatus including a support device for performing the peeling has been proposed (for example, see Patent Document 2).
JP 2007-19379 A Japanese Patent Laid-Open No. 5-116837

The sheet peeling device described in Patent Document 2 is a device for sticking a peeling tape to an adhesive sheet affixed to a wafer, and peeling the adhesive sheet by pulling the peeling tape. The porous member is arranged on the upper surface side of the table to adsorb the wafer.
However, in such a configuration, when there are irregularities on the front end surface of the convex portion, a fine gap is formed between the upper surface of the table, and air leakage occurs from the gap to cause the suction force to be increased. This results in inconvenience that the adhesive sheet is poorly peeled as a result.
In addition, when a wafer having a convex portion on the outer periphery is attracted so that the front end surface of the convex portion is in contact with the table upper surface, a gap is formed between the wafer and the table upper surface, and the gap is reduced. This causes the inconvenience of breaking the wafer.

[Object of invention]
The present invention has been devised by paying attention to such inconveniences, and an object of the present invention is to provide a support device, a support method, and a support tool that can sandwich and support a plate-like member with a simple configuration. Is to provide.

  In order to achieve the above object, the present invention includes a support means having a suction hole that opens to a support surface side that supports a plate-like member, and a support device disposed on the support surface, A main body that surrounds the outer peripheral side of the plate-like member; and a hook-shaped portion that is provided on the inner side of the main body and that can form a closed space that communicates with the suction hole. And at least the main body portion is constituted by an elastic member, and when the space is decompressed, the main body portion and the bowl-shaped portion are displaced relative to each other with elastic deformation, thereby the main body portion. The outer peripheral side of the plate-shaped member is sandwiched between the ridge and the hook-shaped portion.

  In the present invention, the support may be constituted by a self-viscous member.

  Furthermore, the said main-body part can take the structure of providing the positioning part of the said plate-shaped member, and the chuck | zipper part which clamps a plate-shaped member.

  Moreover, it is preferable that the said main-body part takes the structure of providing the displacement promotion part which accelerates | stimulates the said relative angular displacement.

  Further, the support means is formed with an air passage that communicates the gap formed by the support surface, the support tool, and the plate-like member to the outside in a state where the plate-like member is supported by the bowl-like portion. The composition is taken.

  Moreover, the structure that gas can be supplied to at least one of the space and the gap can be employed.

  Furthermore, the present invention is a support method for supporting the plate member using a support means provided with a suction hole that opens to a support surface side that supports the plate member. A support device including a main body portion that surrounds the outer peripheral side of the member and a hook-shaped portion that is connected to the inner side of the main body portion and can form a closed space between the suction holes is disposed in the support means. And a step of placing a plate-like member on the bowl-shaped part, and a plate of the body part and the bowl-like part by depressurizing the space and displacing the body part and the bowl-like part relative to each other. And a step of sandwiching the outer peripheral side of the shaped member.

  Further, the present invention is a support tool for supporting a plate-like member, and a main body portion surrounding the outer peripheral side of the plate-like member, and a bowl-like shape that is connected to the inside of the main body portion and supports the plate-like member. And at least the main body portion of the main body portion and the hook-shaped portion is configured by an elastic member, and the main body portion and the hook-shaped portion are displaced relative to each other with elastic deformation, thereby A configuration is adopted in which the outer peripheral side of the plate-like member is provided so as to be sandwiched between the main body part and the bowl-like part.

According to the present invention, by reducing the pressure of the closed space in a state where the plate-like member is supported via the support, the main body portion and the bowl-like portion are displaced relative to each other so that the plate-like member is sandwiched securely. Can be supported.
Further, when the support tool is composed of a self-viscous member, it is possible to more reliably support the plate-like member by causing the adhesive force of the support tool and the clamping force between the main body portion and the bowl-shaped portion to interact with each other. it can.
Furthermore, with the configuration in which the main body portion of the support is provided with the positioning portion and the chuck portion, it is possible to perform clamping by the chuck portion while keeping the position of the plate-like member constant.
Further, when the main body portion includes a displacement promoting portion, the main body portion and the hook-shaped portion are restricted from being displaced at unintended positions when the relative angular displacement is performed. Can be prevented.
Furthermore, the gap formed by the support surface of the support means, the support tool, and the plate-like member is configured to communicate with the outside, and this gap is decompressed or pressurized to apply stress to the plate-like member. Inconveniences such as damage can be avoided.
Further, by supplying a gas to the space or the gap, it is possible to assist the restoration of the main body portion or the bowl-shaped portion, or assist the separation of the support and the wafer.
Furthermore, according to the support tool of the present invention, a support tool that can support the plate-like member with a simple configuration can be provided.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is an exploded perspective view of the support device according to the present embodiment, and FIG. 2 is a cross-sectional view of the support device. In these drawings, a support device 10 includes a table 11 as a support means and a support tool 12 disposed on the table 11, and a wafer W as a plate-like member passes through the support tool 12. Supported by Here, the wafer W has a protective adhesive sheet S attached to the device forming surface side, which is the upper surface side in the figure, and the back surface is ground with a closed loop-shaped convex portion W1 remaining on the outer periphery. It is said that.

  In the present embodiment, the table 11 is provided in a shape that is substantially square in plan view. As shown in FIG. 2, the table 11 is formed of a hollow body having a chamber C therein, and is formed in a state in which a suction hole 15 opened to the support surface 11 </ b> A on the upper surface side communicates with the chamber C. Has been. Further, a communication hole 16 is formed between the chamber C and the lower surface of the table 11, and the communication hole 16 is connected to a decompression pump and a pressurization pump via a valve (not shown). As shown in FIG. 1, the suction holes 15 are formed on the virtual circumference at a predetermined interval. Further, the table 11 is provided with an air passage 18 having one end opened to the support surface 11A of the table 11 and the other end opened to one side surface 11B of the table 11. The air passage 18 is connected to the support surface 11A. The gap C1 (see FIG. 2) formed by the support 12 and the wafer W is kept from being depressurized or not pressurized, and also acts as a passage for supplying gas by being connected to a pressure pump (not shown). It has become.

  The support 12 includes a closed-loop main body 20 that surrounds the outer peripheral side of the wafer W, and a hook-shaped portion 21 that is connected to the inside of the main body 20, and is disposed on the support surface 11A. The The main body portion 20 is formed of an elastic member having a short cylindrical shape and having self-viscosity, and one end side is fixed to the support surface 11A, and as shown in FIG. A notch portion 24 is formed as a displacement promoting portion. The main body 20 can be displaced with the thinnest V-shaped valley 24A (see FIG. 3) of the notch 24 as a boundary. Here, the inner peripheral surface of the main body 20 and the upper portion of the intersection with the bowl-shaped portion 21 is configured as the positioning portion 30 of the wafer W, and the other end side region of the main body 20 sandwiches the wafer W from the positioning portion 30. It is comprised as the chuck | zipper part 31 to do.

The hook-shaped portion 21 is formed of an elastic member having self-viscosity, and is provided so as to be inclined toward the cutout portion 24 side. The inner peripheral lower portion 21A is fixed to the support surface 11A. The bowl-shaped portion 21 can be displaced with the inner peripheral side lower portion 21A (see FIG. 3) as a base point. As a result, a closed space S1 (see FIG. 3) communicating with the suction hole 15 can be formed by the main body portion 20, the hook-shaped portion 21, and the support surface 11A.
The term “self-viscosity” means that the wafer W can be adhered by its wettability without using an adhesive or the like. For example, silicone-based, urethane-based, acrylic-based, fluorine-based, rubber-based, polyolefin-based It is preferable to form the elastomer as a material.

  Next, a wafer support method in the present embodiment will be described.

  First, a wafer W on which an adhesive sheet S is attached is placed on a table 11 having a support 12 fixed on a support surface 11A in a posture with a convex portion W1 facing downward via a transfer arm (not shown). . At this time, the wafer W is positioned when the outer peripheral portion of the convex portion W1 coincides with the positioning portion 30 of the support tool 12.

When the wafer W is placed on the support 12, the chamber C is communicated with a decompression pump through a valve (not shown), and the space S <b> 1 is decompressed through the suction hole 15. As shown in FIGS. 4 and 5 due to the reduced pressure, the bowl-shaped portion 21 is displaced to the space S side with the inner peripheral side lower portion 21A (see FIG. 3) as a base point. Along with the displacement of the bowl-shaped portion 21, the main body portion 20 has a V-shaped valley portion 24A as a boundary, and one end side (lower end side) of the V-shaped valley portion 24A is opposite to the wafer W with the one end side as a starting point. The other end side (upper end side) of the V-shaped valley portion 24A is displaced toward the wafer W with the V-shaped valley portion 24A as a base point. The displacement between the main body 20 and the bowl-shaped portion 21 is referred to as a relative angular displacement. Due to this relative angular displacement, the outer peripheral side of the wafer W is sandwiched between the main body portion 20 and the bowl-shaped portion 21, whereby the wafer W is reliably supported on the table 11 via the support tool 12. .
Since the gap C1 communicates with the outside through the ventilation path 18, even when an air leak may occur on the gap C1 side for some reason when the space S1 is decompressed, the gap C1 is in a decompressed state. Even if there is a decrease in the volume of the gap C1 due to the relative angular displacement, there is no inconvenience of being in a pressurized state. Therefore, the wafer W is not damaged when the gap C1 is depressurized or pressurized.

  In the above state, using a sheet peeling device (not shown), for example, by attaching a peeling tape to the upper surface of the adhesive sheet S and pulling the peeling tape along the surface of the wafer W, the adhesive sheet S is moved in the radial direction. It can peel from one end toward the other end. At this time, since the wafer W is securely supported by the table 11 via the support tool 12, there arises a disadvantage that the support is released due to the pulling of the peeling tape and a defective peeling occurs or the wafer is damaged. Absent.

  The wafer W from which the adhesive sheet S has been peeled is conveyed to a subsequent process via a transfer arm or the like (not shown). At this time, by supplying gas into the gap C1 through the air passage 18 of the table 11, or by opening a valve (not shown) to connect the suction port 15 to the pressurizing pump and supplying gas into the space S1, Separation of the wafer W and the support 12 can be promoted, or the support 12 that has been displaced by a relative angle can be restored.

  Therefore, according to such an embodiment, when the wafer W is to be supported via the support 12, the effect that the wafer W can be fixedly supported is obtained.

The best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
That is, the invention has been illustrated and described with particular reference to particular embodiments, but it should be understood that the above-described embodiments are not deviated from the technical idea and scope of the invention. On the other hand, various modifications can be made by those skilled in the art in shape, quantity, and other detailed configurations.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

  For example, in the above-described embodiment, the wafer W constituting the plate-like member has been illustrated and described with respect to the case where the outer periphery has the convex portion W1, but a flat wafer that does not have the convex portion W1 can also be targeted. Further, the plate-like member is not limited to the semiconductor wafer W, and other plate-like members such as a glass plate, a steel plate, or a resin plate can also be targeted. The semiconductor wafer can be a silicon wafer or a compound wafer. It may be.

  Further, the displacement promoting portion of the support 12 is not limited to the notch portion 24, and a cut or the like may be provided from the inner surface side to the outer surface side of the main body portion 21. However, if the cutout portion 24 is formed, the relative angular displacement between the main body portion 20 and the bowl-shaped portion 21 can be smoothly performed.

  Further, as shown in FIGS. 6 and 7, the present invention supports the table 11 via an appropriate robot arm or the like, and the wafer placed on the wafer support 40 in a state where the table 11 is inverted. It is also possible to carry W.

  The support 12 is fixed to the support surface 11A with a fixing tool such as an adhesive, a bolt, or a screw. If the support 12 has self-viscosity, the support 12 is fixed to the support surface 11A with its adhesive force. Even if it is a case where it has self-viscosity, you may fix to 11 A of support surfaces with a fixing tool.

  Further, one or more suction ports 15 and air passages 18 may be provided.

  In the above embodiment, the closed-loop support 12 is illustrated and described. However, the support 12 may be provided intermittently (a plurality) on the outer peripheral side of the plate-like member.

  Further, the chuck portion 31 may be provided intermittently on the main body portion 20.

  Further, the shape of the main body 20 can be appropriately changed according to the outer peripheral shape of the plate-like member. For example, when the orientation flat indicating the crystal orientation is provided on the wafer W, the main body 20 according to the shape. Can be formed in a substantially D-shape.

  Furthermore, the hook-shaped portion 21 does not need to be formed of an elastic member as long as relative angular displacement is possible.

The disassembled perspective view of the support apparatus which concerns on embodiment. The schematic sectional drawing which shows the state which mounted the wafer in the support tool on a table. FIG. 3 is a cross-sectional view of main parts of FIG. 2. The schematic sectional drawing which shows the state which the support tool displaced and clamped the wafer. The principal part sectional drawing of FIG. The schematic sectional drawing at the time of utilizing the support apparatus which concerns on this invention for a conveying apparatus. FIG. 7 is a schematic cross-sectional view illustrating a state in which a wafer is sandwiched by the transfer apparatus of FIG.

Explanation of symbols

10 support device 11 table (support means)
11A Supporting surface 12 Supporting tool 15 Suction hole 18 Ventilation path 20 Main body part 21 Gutter-like part 24 Notch part (displacement promoting part)
30 Positioning portion 31 Chuck portion C1 Clearance S1 Space W Semiconductor wafer (plate-like member)

Claims (8)

A support means having a suction hole that opens to the support surface side that supports the plate-like member, and a support tool disposed on the support surface,
The support includes a main body portion that surrounds the outer peripheral side of the plate-like member, and a hook-shaped portion that is continuously provided on the inner side of the main body portion and can form a closed space that communicates with the suction hole.
At least the main body portion of the main body portion and the hook-shaped portion is formed of an elastic member, and when the space is decompressed, the main body portion and the hook-shaped portion are displaced relative to each other with elastic deformation. By this, the outer peripheral side of a plate-shaped member is clamped with the said main-body part and a bowl-shaped part, The support apparatus characterized by the above-mentioned.   The support device according to claim 1, wherein the support is made of a self-viscous member.   The support device according to claim 1, wherein the main body portion includes a positioning portion for the plate-like member and a chuck portion for sandwiching the plate-like member.   The support device according to claim 1, wherein the main body portion includes a displacement promoting portion that promotes the relative angular displacement.   In the state in which the plate-like member is supported by the hook-like portion, a ventilation path that communicates the gap formed by the support surface, the support tool, and the plate-like member to the outside is formed in the support means. The support device according to any one of claims 1 to 4.   The support device according to claim 1, wherein a gas can be supplied to at least one of the space and the gap. In the support method of supporting the plate member using a support means provided with a suction hole opened on the support surface side that supports the plate member,
A main body part that is configured by an elastic member and surrounds the outer peripheral side of the plate-like member; and a hook-like part that is connected to the inner side of the main body part to form a closed space between the suction hole and the main body part. Disposing a support device comprising: the support means;
Placing a plate-like member on the bowl-shaped portion;
A step of holding the outer peripheral side of the plate-like member between the main body part and the hook-like part by depressurizing the space and displacing the main body part and the hook-like part at a relative angle. . A support for supporting the plate-shaped member,
A main body that surrounds the outer peripheral side of the plate-shaped member, and a hook-shaped portion that is connected to the inside of the main body to support the plate-shaped member,
At least the main body portion of the main body portion and the bowl-shaped portion is made of an elastic member, and the main body portion and the hook-shaped portion are displaced relative to each other with elastic deformation, whereby the main body portion and the bowl-shaped portion are The support is characterized by being provided so that the outer peripheral side of the plate-like member can be clamped by the portion.

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