JP2010123239A5 - - Google Patents

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Publication number
JP2010123239A5
JP2010123239A5 JP2009264096A JP2009264096A JP2010123239A5 JP 2010123239 A5 JP2010123239 A5 JP 2010123239A5 JP 2009264096 A JP2009264096 A JP 2009264096A JP 2009264096 A JP2009264096 A JP 2009264096A JP 2010123239 A5 JP2010123239 A5 JP 2010123239A5
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JP
Japan
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period
brush layer
self
alignment structure
spherical
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JP2009264096A
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English (en)
Japanese (ja)
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JP2010123239A (ja
JP5612297B2 (ja
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Priority claimed from US12/273,791 external-priority patent/US8993060B2/en
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Publication of JP2010123239A5 publication Critical patent/JP2010123239A5/ja
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Publication of JP5612297B2 publication Critical patent/JP5612297B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009264096A 2008-11-19 2009-11-19 直接アドレス指定可能アレイへの自己集合化材料を用いた化学的ピニング Expired - Fee Related JP5612297B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/273,791 2008-11-19
US12/273,791 US8993060B2 (en) 2008-11-19 2008-11-19 Chemical pinning to direct addressable array using self-assembling materials

Publications (3)

Publication Number Publication Date
JP2010123239A JP2010123239A (ja) 2010-06-03
JP2010123239A5 true JP2010123239A5 (enExample) 2013-01-10
JP5612297B2 JP5612297B2 (ja) 2014-10-22

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JP2009264096A Expired - Fee Related JP5612297B2 (ja) 2008-11-19 2009-11-19 直接アドレス指定可能アレイへの自己集合化材料を用いた化学的ピニング

Country Status (3)

Country Link
US (2) US8993060B2 (enExample)
JP (1) JP5612297B2 (enExample)
CN (1) CN101913554B (enExample)

Families Citing this family (21)

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Publication number Priority date Publication date Assignee Title
WO2009079241A2 (en) * 2007-12-07 2009-06-25 Wisconsin Alumni Research Foundation Density multiplication and improved lithography by directed block copolymer assembly
US8993060B2 (en) * 2008-11-19 2015-03-31 Seagate Technology Llc Chemical pinning to direct addressable array using self-assembling materials
US8673541B2 (en) * 2010-10-29 2014-03-18 Seagate Technology Llc Block copolymer assembly methods and patterns formed thereby
US20120135159A1 (en) * 2010-11-30 2012-05-31 Seagate Technology Llc System and method for imprint-guided block copolymer nano-patterning
US9469525B2 (en) 2011-01-31 2016-10-18 Seagate Technology Llc Modified surface for block copolymer self-assembly
US20120196094A1 (en) 2011-01-31 2012-08-02 Seagate Technology Llc Hybrid-guided block copolymer assembly
US20120273999A1 (en) 2011-04-29 2012-11-01 Seagate Technology, Llc Method for patterning a stack
JP5558444B2 (ja) * 2011-09-16 2014-07-23 株式会社東芝 モールドの製造方法
JP5575170B2 (ja) 2012-03-22 2014-08-20 株式会社東芝 スタンパおよび磁気ディスク
US8911846B2 (en) * 2012-10-05 2014-12-16 Seagate Technology Llc Block copolymer assembly
US8926851B2 (en) 2012-11-18 2015-01-06 HGST Netherlands B.V. Method for making a film of uniformly arranged core-shell nanoparticles on a substrate
US9638995B2 (en) * 2013-03-12 2017-05-02 Seagate Technology Llc Method of sheared guiding patterns
JP5904981B2 (ja) * 2013-09-09 2016-04-20 株式会社東芝 パターン形成方法、磁気記録媒体の製造方法、及び磁気記録媒体
US9275676B2 (en) 2014-02-28 2016-03-01 Seagate Technology Llc Skew compensation in a patterned medium
US9489974B2 (en) 2014-04-11 2016-11-08 Seagate Technology Llc Method of fabricating a BPM template using hierarchical BCP density patterns
JP2016051487A (ja) * 2014-08-29 2016-04-11 株式会社東芝 磁気記録媒体、磁気記録媒体の製造方法、磁気記録再生装置
JP6267143B2 (ja) * 2015-03-05 2018-01-24 東京エレクトロン株式会社 基板処理方法、プログラム、コンピュータ記憶媒体及び基板処理システム
US9269384B1 (en) 2015-05-29 2016-02-23 Seagate Technology Llc Template misalignment and eccentricity error compensation for a patterned medium
US10529366B2 (en) 2017-04-11 2020-01-07 Seagate Technology Llc Sidewall guided directed self assembly data storage medium
US11008481B1 (en) * 2017-05-31 2021-05-18 Seagate Technology Llc Polymer brush reflow for directed self-assembly of block copolymer thin films
CN113753849A (zh) * 2020-06-03 2021-12-07 芯恩（青岛）集成电路有限公司 嵌段共聚物定向自组装刻蚀方法

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US20020041981A1 (en) * 1997-11-21 2002-04-11 Akira Ishikawa Magnetic tape
US7153597B2 (en) * 2001-03-15 2006-12-26 Seagate Technology Llc Magnetic recording media having chemically modified patterned substrate to assemble self organized magnetic arrays
US7041394B2 (en) * 2001-03-15 2006-05-09 Seagate Technology Llc Magnetic recording media having self organized magnetic arrays
US6746825B2 (en) * 2001-10-05 2004-06-08 Wisconsin Alumni Research Foundation Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
SG102013A1 (en) * 2001-11-09 2004-02-27 Inst Data Storage Manufacturing method for high-density magnetic data storage media
US6822833B2 (en) * 2002-06-21 2004-11-23 Seagate Technology Llc Disc drive magnetic component with self assembled features
JP2004259306A (ja) * 2003-02-24 2004-09-16 Hitachi Ltd 磁気記録媒体および磁気記録媒体の製造方法
US7029773B2 (en) * 2003-10-10 2006-04-18 Seagate Technology Llc Method and system for magnetic recording using self-organized magnetic nanoparticles
KR100640595B1 (ko) * 2004-11-09 2006-11-01 삼성전자주식회사 높은 파티클 밀도를 가지는 균일한 나노파티클 모노레이어필름의 형성방법 및 그 나노파티클 모노레이어 필름을구비하는 소자
US8133534B2 (en) * 2004-11-22 2012-03-13 Wisconsin Alumni Research Foundation Methods and compositions for forming patterns with isolated or discrete features using block copolymer materials
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US7347953B2 (en) * 2006-02-02 2008-03-25 International Business Machines Corporation Methods for forming improved self-assembled patterns of block copolymers
JP4641321B2 (ja) * 2006-03-27 2011-03-02 パイオニア株式会社 パターン転写用モールド
US7416991B2 (en) * 2006-05-11 2008-08-26 Hitachi Global Storage Technologies Netherlands B. V. High resolution patterning of surface energy utilizing high resolution monomolecular resist for fabrication of patterned media masters
JP5414011B2 (ja) 2006-05-23 2014-02-12 国立大学法人京都大学 微細構造体、パターン媒体、及びそれらの製造方法
JP4163729B2 (ja) 2006-10-03 2008-10-08 株式会社東芝 磁気記録媒体、その製造方法、および磁気記録装置
WO2009079241A2 (en) * 2007-12-07 2009-06-25 Wisconsin Alumni Research Foundation Density multiplication and improved lithography by directed block copolymer assembly
US8119017B2 (en) * 2008-06-17 2012-02-21 Hitachi Global Storage Technologies Netherlands B.V. Method using block copolymers for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks
JP4654280B2 (ja) 2008-08-28 2011-03-16 株式会社日立製作所 微細構造体の製造方法
US8993060B2 (en) * 2008-11-19 2015-03-31 Seagate Technology Llc Chemical pinning to direct addressable array using self-assembling materials
US8673541B2 (en) * 2010-10-29 2014-03-18 Seagate Technology Llc Block copolymer assembly methods and patterns formed thereby

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