JP2010080761A - 太陽電池 - Google Patents
太陽電池 Download PDFInfo
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- JP2010080761A JP2010080761A JP2008248757A JP2008248757A JP2010080761A JP 2010080761 A JP2010080761 A JP 2010080761A JP 2008248757 A JP2008248757 A JP 2008248757A JP 2008248757 A JP2008248757 A JP 2008248757A JP 2010080761 A JP2010080761 A JP 2010080761A
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- 239000004065 semiconductor Substances 0.000 claims abstract description 52
- 150000001875 compounds Chemical class 0.000 claims abstract description 25
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical group [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000013078 crystal Substances 0.000 claims abstract description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 41
- 229910052760 oxygen Inorganic materials 0.000 claims description 41
- 239000001301 oxygen Substances 0.000 claims description 41
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 15
- 229910052717 sulfur Inorganic materials 0.000 claims description 15
- 229910052709 silver Inorganic materials 0.000 claims description 13
- 229910052711 selenium Inorganic materials 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 11
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 claims description 10
- 229910052980 cadmium sulfide Inorganic materials 0.000 claims description 10
- 239000005083 Zinc sulfide Substances 0.000 claims description 9
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 9
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 claims description 8
- 229910052733 gallium Inorganic materials 0.000 claims description 8
- 229910052738 indium Inorganic materials 0.000 claims description 8
- 239000011787 zinc oxide Substances 0.000 claims description 6
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 6
- 229910003437 indium oxide Inorganic materials 0.000 claims description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000005304 joining Methods 0.000 claims description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 3
- 229910001887 tin oxide Inorganic materials 0.000 claims description 3
- GKCNVZWZCYIBPR-UHFFFAOYSA-N sulfanylideneindium Chemical compound [In]=S GKCNVZWZCYIBPR-UHFFFAOYSA-N 0.000 claims description 2
- 229910006404 SnO 2 Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 22
- 238000006243 chemical reaction Methods 0.000 abstract description 20
- 239000012535 impurity Substances 0.000 abstract description 5
- 238000006467 substitution reaction Methods 0.000 description 35
- 238000004364 calculation method Methods 0.000 description 14
- 239000010409 thin film Substances 0.000 description 14
- 239000010949 copper Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 239000011669 selenium Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 230000031700 light absorption Effects 0.000 description 11
- 238000004544 sputter deposition Methods 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 8
- 229910052951 chalcopyrite Inorganic materials 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 238000000605 extraction Methods 0.000 description 8
- 125000004429 atom Chemical group 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- -1 chalcopyrite compound Chemical class 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000011593 sulfur Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 229910021476 group 6 element Inorganic materials 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000005361 soda-lime glass Substances 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- 238000004774 atomic orbital Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 230000005428 wave function Effects 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 101000801645 Homo sapiens ATP-binding cassette sub-family A member 2 Proteins 0.000 description 1
- 102100024540 Nonsense-mediated mRNA decay factor SMG8 Human genes 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910000611 Zinc aluminium Inorganic materials 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical group 0.000 description 1
- 238000000329 molecular dynamics simulation Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000005987 sulfurization reaction Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0321—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 characterised by the doping material
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
- H01L31/0323—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2 characterised by the doping material
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- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/073—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising only AIIBVI compound semiconductors, e.g. CdS/CdTe solar cells
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- Y02E10/541—CuInSe2 material PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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Abstract
【解決手段】 本発明の太陽電池は、p型及びn型の半導体を接合してなる太陽電池において、p型半導体は、バンドギャップ幅において1.5eV以上のワイドバンドを有し、ギャップ中に不純物準位とは異なる中間準位を形成したカルコパイライト構造を持つワイドバンド化合物であることを特徴とするものである。前記ワイドバンド化合物において、電気陰性度が1.9以上の元素を含み、結晶格子中の該陰性元素の一部を異なる電気陰性度を有する他の陰性元素で置換し、該置換により中間準位を形成することができる。
【選択図】 図5
Description
Prog. Photov. Res. Appl. 13 (2005) 209. Phys. Rev. Lett.78,, 5014 (1997). J. Appl. Phys.32, 510 (1961). Progress in Photovoltaics:Research and Applications Volume 9, Issue 2, Pages 73-86. Phys. Rev. B 4, 2463 (1971).
図2(b)は、酸素置換による格子緩和の状態を示す図であり、a.b軸面内には約4%広がり、c軸方向には約2%縮む。このことから、置換後のp型半導体層に対して積層による格子不緩和の影響は小さいと考えられる。
また、今回のような置換の場合、ある程度の置換位置に並進対称性を有していると、バンド分散が生じ、中間準位に励起されたキャリアはバンド伝導を有することが期待される。さらに、CISを構成しているI族に含まれるd電子のような局在した電子軌道が重要であり、例えばsやp軌道のような広がった軌道では、中間準位の形成は見込めないと考えられる。以上の事を纏めると、本件における課題解決においては以下の条件下で材料の候補を絞ることができる。
(1)CISの基本構造であり、各原子は四面体構造(ダイヤモンド構造)の結合を有する
(2)CISのVI族を電気陰性度の異なる物質で置換する
(3)中間準位の形成にはCISのI族にはd電子が含まれること重要である
図3〜12は、CuAlS2-zOx AgAlSe2-zOx(x=0.125:酸素の置換量は硫黄に対して6.25%となる)など他の候補物質に対する酸素置換後の状態密度の計算例である(横軸エネルギー(eV)で原点をフェルミ準位に設定)。物質によっては、中間準位が半ば伝導帯と一体化しているもの、また逆に顕著に現れているものとに区別される。
図3〜12から分かることは、表1、表2、および表3に挙げた物質のうち、陰性原子置換による中間準位の形成がはっきりと現れるものと、中間準位の形成らしきものが見られるが、伝導帯と重なり顕著に現れていないものがあることが分かる。そこで表1、表2、および表3に中間準位が伝導帯とはっきり区別できるものと伝導帯と一体化しているもので、それぞれ置換の効果の高いものA、低いものBとして評価をつけた。
この中間準位の形成の結果と、過去の理論計算(非特許文献2,3,4)から見積もると、通常の単セルの太陽電池の変換効率を大幅に上回ることが期待される。すなわち、本発明によれば、以下の実施の態様が提供される。
製造方法は表1、表2、および表3の製造方法1に順ずる。
基板1は、支持体としての機能を有するため、基板にはソーダライムガラスなどが用いられる。基板に関しては、ガラスのように光を透過するものでも、また一方で光を透過しないものでも良い。基板の厚さは支持体としての機能から10mm以下が望ましい。
取り出しの電極2については、電気伝導度の高い金属である銀、金、銅、アルミニウムなどを使用し、真空蒸着もしくはスパッタ法によって形成する。
下部金属電極3については、電極としての機能と第1の半導体層との密着性を有する物質である。すなわち、モリブデン、タングステン、金、またはニッケル、白金からなる。このガラスと光吸収層である化合物半導体薄膜の間にはスパッタ法により薄膜金属電極が設けられる。
形成方法としては、多元同時蒸着法が用いられる。多元同時蒸着法では、構成元素からなる物質を加熱することによって蒸発させ、基板に堆積させて薄膜が得られる。光吸収層に酸素を導入する方法としては、イオンビームによって酸素原子を挿入する方法が用いられる。
取り出し電極7については取り出し電極2と同様に、集電電極の機能を有することが目的であるため、電気伝導度の高い金属である銀、金、銅、アルミニウムなどを使用し、真空蒸着もしくはスパッタ法によって形成する。
製造方法は表1、表2、および表3の製造方法2に順ずる。
基板1は、支持体としての機能を有するため、基板にはソーダライムガラスなどが用いられる。基板に関しては、ガラスのように光を透過するものでも、また一方で光を透過しないものでも良い。基板の厚さは支持体としての機能から10mm以下が望ましい。
取り出しの電極2については、電気伝導度の高い金属である銀、金、銅、アルミニウムなどを使用し、真空蒸着もしくはスパッタ法によって形成する。
下部金属電極3については、電極としての機能と第1の半導体層との密着性を有する物質である。すなわち、モリブデン、タングステン、金、またはニッケル、白金からなる。このガラスと光吸収層である化合物半導体薄膜の間にはスパッタ法により薄膜金属電極が設けられる。
取り出し電極7については取り出し電極2と同様に、集電電極の機能を有することが目的であるため、電気伝導度の高い金属である銀、金、銅、アルミニウムなどを使用し、真空蒸着もしくはスパッタ法によって形成する。
Claims (4)
- p型及びn型の半導体を接合して出来る太陽電池において、
p型半導体は、バンドギャップ幅において1.5eV以上のワイドギャップを有し、該ギャップ中に0.05eV以上の半値幅を有する中間準位を形成したカルコパイライト構造を持つ半導体化合物であることを特徴とする太陽電池。 - 前記請求項1記載のワイドギャップ化合物において、
ポーリングによって決められた電気陰性度が1.9以上の元素を含み、結晶格子中の該陰性元素の一部を異なる電気陰性度を有する他の同族陰性元素で置換し、該置換により中間準位を形成することを特徴とする請求項1に記載の太陽電池。 - 前記請求項1記載の太陽電池において、
p型半導体はABC2の化学式を有し、AとしてCuあるいは Agのいずれかから選択された元素、BとしてGa, In. Alのいずれかから選択された元素、CとしてSあるいはSeのいずれかから選択された元素であって、そのCに対応する元素の一部を酸素元素で置換したことを特徴とする請求項1または請求項2に記載の太陽電池。 - 前記請求項1記載の太陽電池において、
n型半導体層は硫化カドミウム(CdS)、セレン化亜鉛(ZnSe)、酸化亜鉛(ZnO)、硫化インジウム(InS)もしくは、硫化亜鉛(ZnS)よりなり、表面に酸化亜鉛、酸化錫(SnO2)、酸化インジウム(In2O3、ITO)の少なくとも一種を含む層よりなる透明電極が被着することを特徴とする請求項1ないし請求項4のいずれかに記載の太陽電池。
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