JP2010064904A - カーボンナノチューブを含有する組成物および膜 - Google Patents
カーボンナノチューブを含有する組成物および膜 Download PDFInfo
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- JP2010064904A JP2010064904A JP2008230254A JP2008230254A JP2010064904A JP 2010064904 A JP2010064904 A JP 2010064904A JP 2008230254 A JP2008230254 A JP 2008230254A JP 2008230254 A JP2008230254 A JP 2008230254A JP 2010064904 A JP2010064904 A JP 2010064904A
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- Prior art keywords
- ether
- film
- cnt
- polyethylene glycol
- polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 181
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 134
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 123
- 239000000203 mixture Substances 0.000 title claims abstract description 66
- 229920000642 polymer Polymers 0.000 claims abstract description 51
- 239000002904 solvent Substances 0.000 claims abstract description 24
- 229920000515 polycarbonate Polymers 0.000 claims abstract description 11
- 239000004417 polycarbonate Substances 0.000 claims abstract description 11
- 229920002732 Polyanhydride Polymers 0.000 claims abstract description 9
- 229920000620 organic polymer Polymers 0.000 claims abstract description 9
- 229920000728 polyester Polymers 0.000 claims abstract description 8
- 229920000570 polyether Polymers 0.000 claims abstract description 8
- 229920000193 polymethacrylate Polymers 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims description 19
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 17
- 239000004793 Polystyrene Substances 0.000 claims description 14
- 229920002223 polystyrene Polymers 0.000 claims description 14
- 239000013585 weight reducing agent Substances 0.000 claims description 13
- 229920000547 conjugated polymer Polymers 0.000 claims description 11
- 238000007416 differential thermogravimetric analysis Methods 0.000 claims description 8
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 7
- 239000003002 pH adjusting agent Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 12
- 239000004721 Polyphenylene oxide Substances 0.000 abstract description 5
- 230000000717 retained effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 135
- -1 polytrimethylene Polymers 0.000 description 122
- 229920001223 polyethylene glycol Polymers 0.000 description 83
- 239000002202 Polyethylene glycol Substances 0.000 description 82
- 238000000034 method Methods 0.000 description 44
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 43
- 239000000523 sample Substances 0.000 description 26
- 239000006185 dispersion Substances 0.000 description 22
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 21
- 229920001577 copolymer Polymers 0.000 description 18
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 18
- 239000000243 solution Substances 0.000 description 15
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 14
- LDMRLRNXHLPZJN-UHFFFAOYSA-N 3-propoxypropan-1-ol Chemical compound CCCOCCCO LDMRLRNXHLPZJN-UHFFFAOYSA-N 0.000 description 11
- 150000002148 esters Chemical class 0.000 description 11
- 239000000178 monomer Substances 0.000 description 11
- 239000002109 single walled nanotube Substances 0.000 description 11
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 10
- 239000002253 acid Substances 0.000 description 10
- 125000000524 functional group Chemical group 0.000 description 10
- 239000000047 product Substances 0.000 description 10
- 239000004698 Polyethylene Substances 0.000 description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 150000008064 anhydrides Chemical class 0.000 description 9
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 9
- 229920000573 polyethylene Polymers 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 238000001035 drying Methods 0.000 description 8
- 229920001451 polypropylene glycol Polymers 0.000 description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 7
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 7
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 7
- 229940116333 ethyl lactate Drugs 0.000 description 7
- 239000000835 fiber Substances 0.000 description 7
- 238000004442 gravimetric analysis Methods 0.000 description 7
- 229920000058 polyacrylate Polymers 0.000 description 7
- 230000004580 weight loss Effects 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- 239000004743 Polypropylene Substances 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 6
- 230000007547 defect Effects 0.000 description 6
- POLCUAVZOMRGSN-UHFFFAOYSA-N dipropyl ether Chemical compound CCCOCCC POLCUAVZOMRGSN-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 5
- 229920001155 polypropylene Polymers 0.000 description 5
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 5
- QYBKVVRRGQSGDC-UHFFFAOYSA-N triethyl methyl silicate Chemical compound CCO[Si](OC)(OCC)OCC QYBKVVRRGQSGDC-UHFFFAOYSA-N 0.000 description 5
- XOAJIYVOSJHEQB-UHFFFAOYSA-N trimethyl trimethoxysilyl silicate Chemical compound CO[Si](OC)(OC)O[Si](OC)(OC)OC XOAJIYVOSJHEQB-UHFFFAOYSA-N 0.000 description 5
- QQZOPKMRPOGIEB-UHFFFAOYSA-N 2-Oxohexane Chemical compound CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 4
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 4
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 4
- 125000000217 alkyl group Chemical group 0.000 description 4
- 229940067597 azelate Drugs 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 125000004494 ethyl ester group Chemical group 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- BDJRBEYXGGNYIS-UHFFFAOYSA-N nonanedioic acid Chemical compound OC(=O)CCCCCCCC(O)=O BDJRBEYXGGNYIS-UHFFFAOYSA-N 0.000 description 4
- 125000000962 organic group Chemical group 0.000 description 4
- WLJVNTCWHIRURA-UHFFFAOYSA-N pimelic acid Chemical compound OC(=O)CCCCCC(O)=O WLJVNTCWHIRURA-UHFFFAOYSA-N 0.000 description 4
- 229920000301 poly(3-hexylthiophene-2,5-diyl) polymer Polymers 0.000 description 4
- 229920000123 polythiophene Polymers 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- PAPVOVTVLRZQTM-UHFFFAOYSA-N triethoxy-[3-(3-triethoxysilylpropoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCCC[Si](OCC)(OCC)OCC PAPVOVTVLRZQTM-UHFFFAOYSA-N 0.000 description 4
- GYTROFMCUJZKNA-UHFFFAOYSA-N triethyl triethoxysilyl silicate Chemical compound CCO[Si](OCC)(OCC)O[Si](OCC)(OCC)OCC GYTROFMCUJZKNA-UHFFFAOYSA-N 0.000 description 4
- XOBUQYHVNGUALV-UHFFFAOYSA-N trimethoxy-[3-(3-trimethoxysilylpropoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCCC[Si](OC)(OC)OC XOBUQYHVNGUALV-UHFFFAOYSA-N 0.000 description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 3
- QOSMNYMQXIVWKY-UHFFFAOYSA-N Propyl levulinate Chemical compound CCCOC(=O)CCC(C)=O QOSMNYMQXIVWKY-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000005456 alcohol based solvent Substances 0.000 description 3
- 125000001931 aliphatic group Chemical group 0.000 description 3
- 229920003232 aliphatic polyester Polymers 0.000 description 3
- 125000005907 alkyl ester group Chemical group 0.000 description 3
- 150000005215 alkyl ethers Chemical class 0.000 description 3
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 3
- 150000001408 amides Chemical class 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 229920001400 block copolymer Polymers 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 239000003759 ester based solvent Substances 0.000 description 3
- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Chemical compound CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 229910021389 graphene Inorganic materials 0.000 description 3
- 239000005453 ketone based solvent Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 3
- 150000004702 methyl esters Chemical class 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- PGMYKACGEOXYJE-UHFFFAOYSA-N pentyl acetate Chemical compound CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 3
- 229920001748 polybutylene Polymers 0.000 description 3
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 2
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 2
- 125000001140 1,4-phenylene group Chemical group [H]C1=C([H])C([*:2])=C([H])C([H])=C1[*:1] 0.000 description 2
- FEWLNYSYJNLUOO-UHFFFAOYSA-N 1-Piperidinecarboxaldehyde Chemical compound O=CN1CCCCC1 FEWLNYSYJNLUOO-UHFFFAOYSA-N 0.000 description 2
- KDISMIMTGUMORD-UHFFFAOYSA-N 1-acetylpiperidine Chemical compound CC(=O)N1CCCCC1 KDISMIMTGUMORD-UHFFFAOYSA-N 0.000 description 2
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 2
- PAMIQIKDUOTOBW-UHFFFAOYSA-N 1-methylpiperidine Chemical compound CN1CCCCC1 PAMIQIKDUOTOBW-UHFFFAOYSA-N 0.000 description 2
- OJVAMHKKJGICOG-UHFFFAOYSA-N 2,5-hexanedione Chemical compound CC(=O)CCC(C)=O OJVAMHKKJGICOG-UHFFFAOYSA-N 0.000 description 2
- ZUAURMBNZUCEAF-UHFFFAOYSA-N 2-(2-phenoxyethoxy)ethanol Chemical compound OCCOCCOC1=CC=CC=C1 ZUAURMBNZUCEAF-UHFFFAOYSA-N 0.000 description 2
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- SJIXRGNQPBQWMK-UHFFFAOYSA-N 2-(diethylamino)ethyl 2-methylprop-2-enoate Chemical compound CCN(CC)CCOC(=O)C(C)=C SJIXRGNQPBQWMK-UHFFFAOYSA-N 0.000 description 2
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- XFCMNSHQOZQILR-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOC(=O)C(C)=C XFCMNSHQOZQILR-UHFFFAOYSA-N 0.000 description 2
- YIWUKEYIRIRTPP-UHFFFAOYSA-N 2-ethylhexan-1-ol Chemical compound CCCCC(CC)CO YIWUKEYIRIRTPP-UHFFFAOYSA-N 0.000 description 2
- WDQMWEYDKDCEHT-UHFFFAOYSA-N 2-ethylhexyl 2-methylprop-2-enoate Chemical compound CCCCC(CC)COC(=O)C(C)=C WDQMWEYDKDCEHT-UHFFFAOYSA-N 0.000 description 2
- UPGSWASWQBLSKZ-UHFFFAOYSA-N 2-hexoxyethanol Chemical compound CCCCCCOCCO UPGSWASWQBLSKZ-UHFFFAOYSA-N 0.000 description 2
- QPRQEDXDYOZYLA-UHFFFAOYSA-N 2-methylbutan-1-ol Chemical compound CCC(C)CO QPRQEDXDYOZYLA-UHFFFAOYSA-N 0.000 description 2
- RUMACXVDVNRZJZ-UHFFFAOYSA-N 2-methylpropyl 2-methylprop-2-enoate Chemical compound CC(C)COC(=O)C(C)=C RUMACXVDVNRZJZ-UHFFFAOYSA-N 0.000 description 2
- CFVWNXQPGQOHRJ-UHFFFAOYSA-N 2-methylpropyl prop-2-enoate Chemical compound CC(C)COC(=O)C=C CFVWNXQPGQOHRJ-UHFFFAOYSA-N 0.000 description 2
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- DLFVBJFMPXGRIB-UHFFFAOYSA-N Acetamide Chemical compound CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OIFBSDVPJOWBCH-UHFFFAOYSA-N Diethyl carbonate Chemical compound CCOC(=O)OCC OIFBSDVPJOWBCH-UHFFFAOYSA-N 0.000 description 2
- NIQCNGHVCWTJSM-UHFFFAOYSA-N Dimethyl phthalate Chemical compound COC(=O)C1=CC=CC=C1C(=O)OC NIQCNGHVCWTJSM-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- ZHNUHDYFZUAESO-UHFFFAOYSA-N Formamide Chemical compound NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- ATHHXGZTWNVVOU-UHFFFAOYSA-N N-methylformamide Chemical compound CNC=O ATHHXGZTWNVVOU-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 2
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 2
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical group C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 2
- 229940022663 acetate Drugs 0.000 description 2
- 238000010306 acid treatment Methods 0.000 description 2
- 229920005576 aliphatic polyanhydride Polymers 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 125000003368 amide group Chemical group 0.000 description 2
- 239000000010 aprotic solvent Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- QUKGYYKBILRGFE-UHFFFAOYSA-N benzyl acetate Chemical compound CC(=O)OCC1=CC=CC=C1 QUKGYYKBILRGFE-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- FUSUHKVFWTUUBE-UHFFFAOYSA-N buten-2-one Chemical compound CC(=O)C=C FUSUHKVFWTUUBE-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N caprylic alcohol Natural products CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004581 coalescence Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
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Abstract
【解決手段】カーボンナノチューブを含有する組成物は、(A)カーボンナノチューブ、(B)ポリエーテル、ポリエステル、ポリカーボネート、ポリアンハイドライド、ポリスチレン系重合体およびポリ(メタ)アクリレートよりなる群から選択される1種以上の有機ポリマー、(C)溶媒を含有する組成物。
【選択図】なし
Description
本発明に係るCNTを含有する組成物は、前記(B)成分が窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が90%以上であることができる。
本発明に係るCNTを含有する組成物は、さらに(D)pH調整剤を含むことができる。
本発明に係るCNTを含有する組成物は、さらに(E)窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が80%以下である重合体を含むことができる。
本発明に係るCNTを含有する組成物は、前記(E)成分が共役系重合体であることができる。
本発明に係るCNTを含有する組成物は、前記(E)成分がシロキサン系重合体であることができる。
本発明に係るCNTを含有する組成物は、基板上に成膜することによって、CNTを含む膜を作成することができる。
本発明に係るCNTを含有する組成物は、基板上に成膜することによってCNTを含む膜を作成し、さらに250℃以上の温度で加熱してCNTを含む多孔質膜を作成することができる。
本発明に係る電子素子は、本願発明の組成物を基板上に成膜したCNTを含む膜、または成膜膜を250℃以上の温度で加熱した膜から形成することができる。
本発明に係るメモリーセルは、本願発明の組成物を基板上に成膜したCNTを含む膜、または成膜膜を250℃以上の温度で加熱した膜から形成することができる。
以下、CNTを含有する組成物について詳述する。
本願発明で使用することのできるCNTはアーク放電法、化学気相成長法(以下CVD法とする)、レーザー・アブレーション法等によって作製されるが、本発明に使用されるCNTはいずれの方法によって得られたものであってもよい。また、CNTには1枚の炭素膜(グラッフェン・シート)が円筒状に巻かれた単層CNT(以下SWCNTと言う)と、2枚のグラッフェン・シートが同心円状に巻かれた2層CNT(以下DWCNTと言う)と、複数のグラッフェン・シートが同心円状に巻かれた多層CNT(以下MWCNTと言う)とがあり、本発明においてSWCNT、DWCNT、MWCNTをそれぞれ単体で、もしくは複数を同時に使用できる。特に、SWCNTとDWCNTは導電性および半導体特性において優れた性質を持つので好ましく用いることができるが、中でもSWCNTが特に好ましく用いられる。
本発明の組成物に含まれるCNT含有量は必要に応じて定められるが、CNT分散液100質量部中、0.00001〜10部が好ましく、0.0001〜1部がさらに好ましく用いられる。
本発明で用いられる(B)成分は、ポリエーテル、ポリエステル、ポリカーボネート、ポリアンハイドライド、ポリスチレン系重合体、および(メタ)アクリル系重合体よりなる群から選択される1種以上の有機ポリマーである。さらに、モノマー組成、分子量等を適切に選択することにより窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が90%以上である有機ポリマーが好ましく使用することができる。また、本発明に使用することのできる有機ポリマーは分解後の残渣がCNTの性質に影響を及ぼさないものが好ましく、特に解重合による分解をする有機ポリマーが好ましい。また、(A)成分が100質量部に対して、(B)成分は0.01〜99質量部用いることが好ましく、0.1〜80質量部用いることがさらに好ましい。
本発明において、(メタ)アクリル系重合体のGPC法によるポリスチレン換算の重量平均分子量は、1,000〜200,000、好ましくは1,000〜50,000である。
本発明で用いられる(C)溶媒は、水、アルコール系溶媒、ケトン系溶媒、アミド系溶媒、エステル系溶媒および非プロトン系溶媒の群から選ばれた少なくとも1種が挙げられる。このような溶媒としては、沸点50〜300度が好ましく、80〜250度がより好ましい。このような溶媒を用いることによりスピンコートなどの成膜工程において適度な蒸気圧と蒸発速度、基板への濡れ性、また粘度を付与することができる。
本発明に係る組成物は、必要に応じて、さらに(D)pH調整剤を含有していてもよい。本願発明で使用することのできる(D)成分としては、塩酸、硝酸、硫酸等の無機酸;水酸化ナトリウム、水酸化カリウム、水酸化ルビジウム、水酸化セシウム等のアルカリ金属の水酸化物、テトラメチルアンモニウムヒドロキシド(TMAH)、アンモニア等の塩基性物質が挙げられる。特に好ましくは分解性、あるいは揮発性の塩基性物質であり、窒素雰囲気下において30〜250℃での示差熱熱重量分析による重量減少率が90%以上であることが好ましく、95%以上が好ましく、99%以上であることが最も好ましい。重量減少率が90%未満であると、CNTを含む膜を250℃以上の温度で加熱した場合に多量の分解物(残渣)がCNTを含む膜中に残留するので、良好な膜特性が得られない。なお、(D)成分の重量減少率は、窒素雰囲気下で30℃で1時間乾燥させた試料を、TG−DTA(示差熱熱重量同時測定)により、30℃から500℃まで10℃/分の条件で昇温させ、試料の重量変化を追跡し、((30℃の試料重量)−(250℃の試料重量))/(30℃の試料重量)×100で計算される値である。
上記(D)成分は、1種単独で、または2種以上を混合して使用することができる。これらの(D)成分のうち、水酸化カリウム、アンモニア、テトラメチルアンモニウムヒドロキシド(TMAH)が好ましく、テトラメチルアンモニウムヒドロキシド(TMAH)がより好ましい。
本発明に係る組成物は、必要に応じて、さらに(E)窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が80%以下である重合体を含有していてもよい。前記(E)成分は示差熱熱重量分析による重量減少率が1〜70%であることが好ましく、2〜50%であることが好ましい。なお、重量減少率は、窒素雰囲気下で80℃で1時間乾燥させた試料を、TG−DTA(示差熱熱重量同時測定)により、80℃から500℃まで10℃/分の条件で昇温させ、試料の重量変化を追跡し、((80℃の試料重量)−(250℃の試料重量))/(80℃の試料重量)×100で計算される値である。本願発明で使用することのできる(E)成分としては、共役系重合体、シロキサン系重合体が好ましく用いられる。このような(E)成分を併用してCNTを含む膜を作成することにより、機械的強度にすぐれたCNTを含む膜を作成することが可能となる。また、CNTを含む膜を250℃以上の温度で加熱した場合においても、(E)成分により膜が補強されるため機械的強度にすぐれたCNTを含む膜を作成することが可能となる。
RaSi(OR1)4−a・・・・・(1)
(式中、Rは水素原子、フッ素原子または1価の有機基、R1は1価の有機基、aは1〜2の整数を示す。)
Si(OR2)4・・・・・(2)
(式中、R2は1価の有機基を示す。)
R3 b(R4O)3−bSi−(R7)d−Si(OR5)3−cR6 c・・・(3)
〔式中、R3〜R6は同一または異なり、それぞれ1価の有機基、bおよびcは同一または異なり、0〜2の数を示し、R7は酸素原子、フェニレン基または−(CH2)n−で表される基(ここで、nは1〜6の整数である)、dは0または1を示す。〕
前記(A)CNT、前記(B)ポリエーテル、ポリエステル、ポリカーボネート、ポリアンハイドライド、ポリスチレン系重合体およびポリ(メタ)アクリレートの群から選ばれた少なくとも1種の有機ポリマー、(C)溶媒とを混合し、分散させることによって、本発明の組成物を得ることができる。分散させる方法は特に限定されず、均一に分散させることができればどのような方法でも問題ない。
前記の方法により製造されたCNT分散液を基板上に成膜することによって、基板上に導電性や半導体性の機能を付与することができる。成膜方法としては、キャスト法、スピンコート法、スプレーコート法、インクジェット法、ブレードコート法、ディップ法、バーコーター法、滴下法など一般的な方法が可能である。基板としてはガラスやシリコンウエハー、構造材などの無機物のみならず、フィルム、繊維、織物膜、板、紙などの基材上に成膜することができる。
本願発明の組成物より得られる膜の密度は、0.5〜3.0g/cm3、が好ましく、0.7〜2.0g/cm3であることが好ましい。このような膜密度の膜を作成するために、適時、膜の加熱などの処理を行う事ができる。
CNT(単層カーボンナノチューブ:サイエンスラボラトリーズ社製、純度95%)を6mgと、ポリアクリル酸(分子量;25000、窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が98%)を6mgと、プロピレングリコールモノプロピルエーテル30mL、水5mLを50mLのサンプル管に入れ、超音波破砕機(東京理化器械(株)製VCX−502、出力250W、直接照射)を用いて20分間超音波照射してCNTを含む組成物を作成した。
作成した組成物を、8inchシリコンウエハー上にスピンコートし、引き続きホットプレートで100℃/60sec.乾燥した後、さらに窒素雰囲気中で300℃で10min.加熱して成膜した。得られたCNTを含む膜は50倍の光学顕微鏡で観察したところ、欠陥のない平滑な膜であり、透過型電子顕微鏡観察(TEM)で膜表面および膜断面部を観察したところ均一な多孔質である、CNTを含む良好な膜が作成できることが判明した。
CNT(単層カーボンナノチューブ:Elicarb社製、純度90%、製品名SW/OPEN)を6mgと、ポリα−メチルスチレン(分子量;12000、窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が99%)を6mgと、プロピレングリコールモノプロピルエーテル30mL、乳酸エチル5mLを50mLのサンプル管に入れ、超音波破砕機(東京理化器械(株)製VCX−502、出力250W、直接照射)を用いて30分間超音波照射してCNTを含む組成物を作成した。
作成した組成物を、8inchシリコンウエハー上にスピンコートし、引き続きホットプレートで100℃/60sec.乾燥した後、さらに窒素雰囲気中で300℃で10min.加熱して成膜した。得られたCNTを含む膜は50倍の光学顕微鏡で観察したところ、欠陥のない平滑な膜であり、透過型電子顕微鏡観察(TEM)で膜表面および膜断面部を観察したところ均一な多孔質である、CNTを含む良好な膜が作成できることが判明した。
CNT(単層カーボンナノチューブ:Elicarb社製、純度90%、製品名SW/OPEN)を6mgと、ポリオキシエチレンラウリルエーテル(花王社製、商品名「エマルゲン104P」、窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が97%)を6mgと、プロピレングリコールモノプロピルエーテル30mL、乳酸エチル5mL、10質量%TMAH水溶液1mLを50mLのサンプル管に入れ、超音波破砕機(東京理化器械(株)製VCX−502、出力250W、直接照射)を用いて30分間超音波照射してCNTを含む組成物を作成した。
作成した組成物を、8inchシリコンウエハー上にスピンコートし、引き続きホットプレートで100℃/60sec.乾燥した後、さらに窒素雰囲気中で300℃で10min.加熱して成膜した。得られたCNTを含む膜は50倍の光学顕微鏡で観察したところ、欠陥のない平滑な膜であり、透過型電子顕微鏡観察(TEM)で膜表面および膜断面部を観察したところ均一な多孔質である、CNTを含む良好な膜が作成できることが判明した。
実施例4
CNT(単層カーボンナノチューブ:Elicarb社製、純度90%、製品名SW/OPEN)を6mgと、ポリα−メチルスチレン(分子量;12000、窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が99%)を6mgと、プロピレングリコールモノプロピルエーテル30mL、乳酸エチル5mL、ポリ−3−ヘキシルチオフェン(アルドリッチ社製、レジオレギュラー、分子量(Mn):13000、窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が5%)1mgを50mLのサンプル管に入れ、超音波破砕機(東京理化器械(株)製VCX−502、出力250W、直接照射)を用いて30分間超音波照射してCNTを含む組成物を作成した。
作成した組成物を、8inchシリコンウエハー上にスピンコートし、引き続きホットプレートで100℃/60sec.乾燥した後、さらに窒素雰囲気中で300℃で10min.加熱して成膜した。得られたCNTを含む膜は50倍の光学顕微鏡で観察したところ、欠陥のない平滑な膜であり、透過型電子顕微鏡観察(TEM)で膜表面および膜断面部を観察したところ均一な多孔質である、CNTを含む良好な膜が作成できることが判明した。
石英製セパラブルフラスコ中で、25%テトラメチルアンモニウムハイドロオキサイド水溶液196.88g、超純水825.42gおよびエタノール2,835.5gの混合溶液中に、メチルトリメトキシシラン136.23g(完全加水分解縮合物換算で66.
75g)、テトラエトキシシラン260.41g(完全加水分解縮合物換算で75.52g)およびオクタメチルシクロテトラシロキサン74.16gを加えて、60℃で4時間反応させた。その後室温まで冷却した後この溶液に60%硝酸水溶液88.62gを加え、室温で1時間撹拌した。次いで、この溶液にプロピレングリコールモノプロピルエーテル1,082.15gを加え、その後、減圧下で全溶液量が2164.3gとなるまで濃縮した後、10%プロピレングリコールモノプロピルエーテルの酢酸溶液108.22gを添加して、固形分含有量10%の反応液を得た。さらにこの反応液100gにポリエチレングリコールモノウンデカン酸エステル(オキシエチレン繰り返し数=10)4.5gを溶解させ、0.2ミクロン孔径のテフロン(登録商標)製フィルタでろ過を行い、シロキサン溶液(A)を得た。
CNT(単層カーボンナノチューブ:Elicarb社製、純度90%、製品名SW/OPEN)を6mgと、ポリオキシエチレンラウリルエーテル(花王社製、商品名「エマルゲン104P」、窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が97%)を6mgと、プロピレングリコールモノプロピルエーテル30mL、乳酸エチル5mL、シロキサン溶液(A)5mLを50mLのサンプル管に入れ、超音波破砕機(東京理化器械(株)製VCX−502、出力250W、直接照射)を用いて30分間超音波照射してCNTを含む組成物を作成した。
作成した組成物を、8inchシリコンウエハー上にスピンコートし、引き続きホットプレートで100℃/60sec.乾燥した後、さらに窒素雰囲気中で300℃で10min.加熱して成膜した。得られたCNTを含む膜は50倍の光学顕微鏡で観察したところ、欠陥のない平滑な膜であり、透過型電子顕微鏡観察(TEM)で膜表面および膜断面部を観察したところ均一な多孔質である、CNTを含む良好な膜が作成できることが判明した。
CNT(単層カーボンナノチューブ:サイエンスラボラトリーズ社製、純度95%)を6mgと、プロピレングリコールモノプロピルエーテル5mL、水30mLを50mLのサンプル管に入れ、超音波破砕機(東京理化器械(株)製VCX−502、出力250W、直接照射)を用いて20分間超音波照射してCNTを含む組成物を作成した。
作成した組成物を、8inchシリコンウエハー上にスピンコートし、引き続きホットプレートで100℃/60sec.乾燥した後、さらに窒素雰囲気中で300℃で10min.加熱して成膜した。得られたCNTを含む膜は50倍の光学顕微鏡で観察したところ、はじきが見られ、また平滑でない不良な膜であることが判明した。このような膜では素子用途に使用することはできない。
CNT(単層カーボンナノチューブ:Elicarb社製、純度90%、製品名SW/OPEN)を6mgと、プロピレングリコールモノプロピルエーテル30mL、乳酸エチル5mL、ポリ−3−ヘキシルチオフェン(アルドリッチ社製、レジオレギュラー、分子量(Mn):13000、窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が5%)1mgを50mLのサンプル管に入れ、超音波破砕機(東京理化器械(株)製VCX−502、出力250W、直接照射)を用いて30分間超音波照射してCNTを含む組成物を作成した。
作成した組成物を、8inchシリコンウエハー上にスピンコートし、引き続きホットプレートで100℃/60sec.乾燥した後、さらに窒素雰囲気中で300℃で10min.加熱して成膜した。得られたCNTを含む膜は50倍の光学顕微鏡で観察したところ、はじきが見られ、また平滑でない不良な膜であることが判明した。このような膜では素子用途に使用することはできない。
CNT(単層カーボンナノチューブ:Elicarb社製、純度90%、製品名SW/OPEN)を6mgと、プロピレングリコールモノプロピルエーテル30mL、乳酸エチル5mL、シロキサン溶液(A)5mLを50mLのサンプル管に入れ、超音波破砕機(東京理化器械(株)製VCX−502、出力250W、直接照射)を用いて30分間超音波照射してCNTを含む組成物を作成した。
作成した組成物を、8inchシリコンウエハー上にスピンコートし、引き続きホットプレートで100℃/60sec.乾燥した後、さらに窒素雰囲気中で300℃で10min.加熱して成膜した。得られたCNTを含む膜は50倍の光学顕微鏡で観察したところ、はじきが見られ、また平滑でない不良な膜であることが判明した。このような膜では素子用途に使用することはできない。
Claims (10)
- (A)カーボンナノチューブ、
(B)ポリエーテル、ポリエステル、ポリカーボネート、ポリアンハイドライド、ポリスチレン系重合体およびポリ(メタ)アクリレートよりなる群から選択される1種以上の有機ポリマー、
(C)溶媒
を含有する組成物。 - 前記(B)成分が窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が90%以上である、請求項1記載の組成物。
- さらに(D)pH調整剤を含む請求項1〜2の記載いずれか1項記載の組成物。
- さらに(E)窒素雰囲気下において80〜250℃での示差熱熱重量分析による重量減少率が80%以下である重合体を含む、請求項1〜3の記載いずれか1項記載の組成物。
- 前記(E)成分が共役系重合体である請求項4に記載の組成物。
- 前記(E)成分がシロキサン系重合体である請求項4に記載の組成物。
- 請求項1〜6の記載いずれか1項記載の組成物を基板上に成膜することによって得られるカーボンナノチューブを含む膜。
- 請求項7に記載のカーボンナノチューブを含む膜を250℃以上の温度で加熱して得られる膜から形成される電子素子。
- 請求項7〜8の記載いずれか1項に記載のカーボンナノチューブを含む膜から形成される電子素子。
- 請求項7〜8の記載いずれか1項に記載のカーボンナノチューブを含む膜から形成されるメモリーセル。
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JP2012148970A (ja) * | 2012-03-09 | 2012-08-09 | Asahi Kasei Chemicals Corp | 分散剤組成物 |
JP2012166969A (ja) * | 2011-02-10 | 2012-09-06 | Katsuyoshi Kondo | 被膜付き基材およびその製造方法 |
JP2013075795A (ja) * | 2011-09-30 | 2013-04-25 | Dainichiseika Color & Chem Mfg Co Ltd | ナノカーボン水系分散液及びナノカーボン分散樹脂組成物 |
JP2013253227A (ja) * | 2012-05-08 | 2013-12-19 | Shin-Etsu Chemical Co Ltd | 有機膜材料、これを用いた有機膜形成方法及びパターン形成方法、並びに熱分解性重合体 |
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JP2012166969A (ja) * | 2011-02-10 | 2012-09-06 | Katsuyoshi Kondo | 被膜付き基材およびその製造方法 |
JP2013075795A (ja) * | 2011-09-30 | 2013-04-25 | Dainichiseika Color & Chem Mfg Co Ltd | ナノカーボン水系分散液及びナノカーボン分散樹脂組成物 |
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JP2013253227A (ja) * | 2012-05-08 | 2013-12-19 | Shin-Etsu Chemical Co Ltd | 有機膜材料、これを用いた有機膜形成方法及びパターン形成方法、並びに熱分解性重合体 |
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JPWO2018225863A1 (ja) * | 2017-06-09 | 2020-05-21 | 国立研究開発法人産業技術総合研究所 | カーボンナノチューブ複合膜及びカーボンナノチューブ分散液 |
JP7018661B2 (ja) | 2017-06-09 | 2022-02-14 | 国立研究開発法人産業技術総合研究所 | カーボンナノチューブ分散液、カーボンナノチューブ分散液の製造方法及びカーボンナノチューブ複合膜の製造方法 |
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