JP2010056287A - 熱処理装置 - Google Patents
熱処理装置 Download PDFInfo
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- JP2010056287A JP2010056287A JP2008219608A JP2008219608A JP2010056287A JP 2010056287 A JP2010056287 A JP 2010056287A JP 2008219608 A JP2008219608 A JP 2008219608A JP 2008219608 A JP2008219608 A JP 2008219608A JP 2010056287 A JP2010056287 A JP 2010056287A
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- cylindrical
- heat
- heat treatment
- reaction chamber
- cooling
- Prior art date
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- 238000010438 heat treatment Methods 0.000 claims abstract description 28
- 238000006243 chemical reaction Methods 0.000 claims abstract description 22
- 238000001816 cooling Methods 0.000 claims abstract description 18
- 239000012212 insulator Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000002826 coolant Substances 0.000 abstract description 12
- 239000004065 semiconductor Substances 0.000 abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 12
- 239000011810 insulating material Substances 0.000 description 11
- 239000000112 cooling gas Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000003028 elevating effect Effects 0.000 description 5
- 239000010453 quartz Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000002791 soaking Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical group N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
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Abstract
【解決手段】 コイルヒータ14に通電して雰囲気温度を800℃付近まで昇温し、半導体ウェーハW表面に被膜を形成する。そして、加熱処理が終了したならば、直ちに冷却用空間としての筒状空間Sまたは貫通孔18に、水などの冷却媒体を供給して前記雰囲気温度を400℃付近まで低下させ、前記と逆の手順で処理後の半導体ウェーハWを払い出し、新たな未処理のウェーハを反応チャンバー2内に入れる。
【選択図】 図1
Description
Claims (3)
- 上下方向の軸を中心にして、被処理基板が内部に挿入される反応チャンバーと、熱を均一に分散させるために前記反応チャンバーの外側に配置されるアウターチューブと、このアウターチューブの外側で内側面にヒータを設けた筒状断熱体とが同軸状に配置された熱処理装置であって、前記筒状断熱体には上下方向に貫通する冷却用空間が形成されていることを特徴とする熱処理装置。
- 請求項1に記載の熱処理装置において、前記冷却用空間は前記筒状断熱体を内側筒と外側筒に分割することで内側筒と外側筒との間に形成される筒状空間であることをことを特徴とする熱処理装置。
- 請求項1に記載の熱処理装置において、前記冷却用空間は前記筒状断熱体の周方向に等間隔で形成される上下方向の貫通穴であることをことを特徴とする熱処理装置。
Priority Applications (1)
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JP2008219608A JP5364314B2 (ja) | 2008-08-28 | 2008-08-28 | 熱処理装置 |
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JP2008219608A JP5364314B2 (ja) | 2008-08-28 | 2008-08-28 | 熱処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010056287A true JP2010056287A (ja) | 2010-03-11 |
JP5364314B2 JP5364314B2 (ja) | 2013-12-11 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2008219608A Expired - Fee Related JP5364314B2 (ja) | 2008-08-28 | 2008-08-28 | 熱処理装置 |
Country Status (1)
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JP (1) | JP5364314B2 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0332020A (ja) * | 1989-06-29 | 1991-02-12 | Toshiba Ceramics Co Ltd | 縦型拡散炉 |
JPH11260744A (ja) * | 1998-03-09 | 1999-09-24 | Kokusai Electric Co Ltd | 熱処理炉 |
JP2002164298A (ja) * | 2000-11-29 | 2002-06-07 | Hitachi Kokusai Electric Inc | 熱処理装置 |
WO2007023855A1 (ja) * | 2005-08-24 | 2007-03-01 | Hitachi Kokusai Electric Inc. | 基板処理装置及びこれに用いられる加熱装置並びにこれらを利用した半導体の製造方法 |
WO2008099449A1 (ja) * | 2007-02-09 | 2008-08-21 | Hitachi Kokusai Electric Inc. | 断熱構造体、加熱装置、加熱システム、基板処理装置および半導体装置の製造方法 |
-
2008
- 2008-08-28 JP JP2008219608A patent/JP5364314B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0332020A (ja) * | 1989-06-29 | 1991-02-12 | Toshiba Ceramics Co Ltd | 縦型拡散炉 |
JPH11260744A (ja) * | 1998-03-09 | 1999-09-24 | Kokusai Electric Co Ltd | 熱処理炉 |
JP2002164298A (ja) * | 2000-11-29 | 2002-06-07 | Hitachi Kokusai Electric Inc | 熱処理装置 |
WO2007023855A1 (ja) * | 2005-08-24 | 2007-03-01 | Hitachi Kokusai Electric Inc. | 基板処理装置及びこれに用いられる加熱装置並びにこれらを利用した半導体の製造方法 |
WO2008099449A1 (ja) * | 2007-02-09 | 2008-08-21 | Hitachi Kokusai Electric Inc. | 断熱構造体、加熱装置、加熱システム、基板処理装置および半導体装置の製造方法 |
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JP5364314B2 (ja) | 2013-12-11 |
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