JP2010054262A - Window member for sensor, and package for sensor and sensor device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sensor device which has a high performance and is inexpensive. <P>SOLUTION: A window member 2 for a sensor includes a window plate 2a formed of a silicon single crystal or a germanium single crystal and a flange 6 joined to the outer peripheral part of the window plate 2a. The sensor device is made by sealing up a sensor element 3 in a package for the sensor to which the window member 2 for the sensor is joined. The minimum necessary window plate 2a can be used, and the sensor device avoiding reception of unnecessary infrared noise and being inexpensive can be provided. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a sensor window member, a sensor package using the same, and a sensor device.

  Conventionally, as one of sensor devices, there is an infrared detection device that detects infrared rays. For example, the thing of the structure shown by sectional drawing in FIG. 3 was used. That is, as shown in FIG. 3, the conventional infrared detection device includes a base body 21 and a window 22, and the outer shape is a rectangular parallelepiped shape.

The base 21 is composed of a laminated ceramic, a pattern, and a through hole for providing a path for electrically connecting the inside and the outside of the container, for example, an alumina (Al ₂ O ₃ ) -based sintered body or aluminum nitride (AlN). This is a ceramic package made of a sintered material.

  The base 21 has a side wall 21d, and an infrared detection element 23 for detecting infrared rays is disposed in an opening formed by the side wall 21d with the light receiving surface 23a facing upward. The infrared detection element 23 is bonded or soldered on the mounting portion 21a of the base 21.

  Further, a step is provided on the inner surface of the side wall 21d, and a bonding wire 25 that connects the wiring conductor 24 and the infrared detection element 23 at the step is provided.

The flat window 22 is formed of, for example, germanium (Ge) or silicon (Si) that transmits infrared rays, and is hermetically bonded to the side wall 21d of the base 21 using a window bonding material 27 such as solder. The opening of the base 21 formed by 21d is sealed. The window 22 is disposed at a position facing the light receiving surface 23a of the infrared detection element 23 (see, for example, Patent Document 1).
JP 2003-254820 A

  However, in the conventional infrared detection device, a large window 22 made of germanium or silicon is joined so as to cover all the openings of the base 21 and covers all the openings of the base 21, so that unnecessary noise such as near infrared rays is used. Has a problem that the infrared detection element 23 easily receives noise.

  In addition, there is a problem that a difference in thermal expansion between the base 21 and the window 22 made of germanium or silicon is large, and stress due to the difference in thermal expansion acts on the base 21 and the base 21 is likely to be damaged such as cracks. there were.

Further, since a large amount of germanium or silicon is used for the window 22, there is also a problem that it is expensive. The present invention has been devised in view of the above problems, and its purpose is high performance and low cost that is difficult to receive noise. Is to provide a simple sensor device.

  A sensor window member according to the present invention includes a window plate made of silicon single crystal or germanium single crystal, and a flange joined to an outer peripheral portion of the window plate.

  Moreover, it is preferable that the said window plate is joined to one main surface of the said flange.

  Further, it is preferable that a projecting portion protruding from the one main surface is provided at a joint portion of the flange with the window plate, and the window plate is joined to a tip of the projecting portion.

  The flange is preferably made of an iron-nickel-cobalt alloy.

  Moreover, it is preferable that a getter film is formed on the other main surface of the flange.

  The getter film is preferably arranged in a pattern divided into a plurality of parts.

  A sensor package according to the present invention comprises a base having a recess formed on the upper surface for accommodating a sensor element, and a sensor window member having the above-described configuration for closing the recess of the base. To do.

  The base is preferably made of ceramics.

  The sensor device according to the present invention includes the sensor package having the above-described configuration, and a sensor element that is placed and fixed in the concave portion and sealed by the sensor window member.

  The sensor element is preferably an infrared light receiving element.

  Since the sensor window member according to the present invention includes a window plate made of silicon single crystal or germanium single crystal and a flange joined to the outer peripheral portion of the window plate, signals should be input and output to the sensor element. Since the silicon single crystal or germanium single crystal window plate provided only at the location is covered with the flange, it is difficult for unwanted noise such as near infrared rays to enter. Further, the amount of single crystal silicon or single crystal germanium used for the window can be minimized to reduce the cost.

  Preferably, since the window plate is joined to one main surface of the flange, it is easy to join the flange and the window plate, and the airtight reliability is improved.

  Preferably, a protrusion protruding from the one main surface is provided at a joint between the flange and the window plate, and the window plate is bonded to the tip of the protrusion. Even if a stress due to a difference in thermal expansion occurs, the protruding portion is appropriately deformed to relieve the stress, so that damage to the flange or the window plate due to the difference in thermal expansion between the flange and the window plate can be suppressed.

  Preferably, since the flange is made of an iron-nickel-cobalt alloy, the thermal expansion between the flange and the ceramics can be approximated, and even if the flange is joined to the ceramic substrate, damage such as cracks occurs in the substrate. Can be suppressed.

  Preferably, since the getter film is formed on the other main surface of the flange, a dilute gas inside the package can be adsorbed by the getter film, and the vacuum state inside the package can be kept pure.

  Preferably, when the getter film is arranged in a plurality of divided patterns, the bonding material for bonding the sensor window member to the substrate can be made difficult to wet and spread over the entire getter film. , And the sensor package can be reduced in size.

  The sensor package according to the present invention includes a base body in which a concave portion for accommodating a sensor element is formed on the upper surface and a sensor window member for closing the concave portion of the base body. Noise using the window member is difficult to enter, and the base body is difficult to break, and an inexpensive sensor package can be obtained.

  Preferably, since the substrate is made of ceramics, a sensor package having a high degree of freedom in forming wiring on the substrate can be obtained.

  The sensor device according to the present invention includes a sensor package and a sensor element mounted and fixed in the recess and sealed by the sensor window member. Therefore, the operation reliability using the sensor package of the present invention is provided. The sensor device can be made inexpensive and inexpensive.

  Preferably, since the sensor element is an infrared light receiving element, the sensor device can normally detect infrared light received by the window plate.

  Hereinafter, the sensor window member of the present invention, a sensor package using the same (hereinafter also referred to as a package), and a sensor device will be described in detail.

  A sensor device according to the present invention is shown in FIG. FIG. 1A is a sectional view showing an example of an embodiment of the sensor device of the present invention, and FIG. 1B is a sectional view showing another example of the embodiment of the sensor device of the present invention.

  In the figure, 1 is a base, 1a is a recess, 2 is a sensor window member, 2a is a window plate, 6 is a flange, 6a is a through hole, 6b is a protrusion, 6c is a metal frame, 3 is a sensor element, 8 is Getter film.

  First, the sensor window member 2a according to the present invention will be described in detail.

  In FIG. 1, a sensor window member 2 according to the present invention includes a window plate 2a made of single crystal silicon (Si) or single crystal germanium (Ge), and a flange 6 joined to the outer periphery of the window plate 2a. It has.

  With this configuration, the window plate 2a formed of single crystal silicon or single crystal germanium is provided only at a location where signals should be input / output to / from the sensor element 3, and other portions are covered by the flange, which is unnecessary. Noise such as near infrared rays is difficult to enter inside the package. For this reason, the sensor element 3 is less affected by noise, and the performance of the sensor element 3 can be exhibited. Further, the area of the window plate 2a is reduced, and the stress generated in the window plate 2a or the flange 6 due to the difference in thermal expansion with the flange can be reduced. In addition, since the silicon single crystal or germanium single crystal window plate 2 a is joined via the flange 6, it is possible to reduce stress due to a thermal expansion difference from the window plate 2 a directly applied to the substrate 1. Further, the amount of single-crystal silicon or single-crystal germanium used as the window plate 2a can be minimized to reduce the cost and to be inexpensive.

  The window plate 2a is made of single crystal silicon or single crystal germanium. Since the light transmitted through the window plate 2a is a single crystal substrate, there is no crystal grain boundary, and light diffusion due to impurities contained in the crystal grain boundary does not occur. Accordingly, light can be transmitted through the window plate 2a with high accuracy from the outside of the package to the inside and from the inside of the package to the outside. Moreover, the light reflected on the surface of the window plate 2a can be reduced by previously applying a non-reflective coating to the main surface on which the light of the window plate 2a is incident.

  The window plate 2a is hermetically sealed with gold (Au) -tin (Sn) brazing, gold (Au) -germanium (Ge) brazing, silver (Ag) -copper (Cu) brazing, or the like on one main surface of the flange 6, for example. To be joined.

The flange 6 is made of metal such as iron (Fe) -nickel (Ni) -cobalt (Co) alloy or iron-nickel alloy, or alumina ceramics, aluminum nitride ceramics, mullite (3Al ₂ O ₃ .2SiO ₂ ) ceramics. Through holes 6a are provided at locations where optical signals are input and output as shown in FIGS. 1 (a) and 1 (b). 1A and 1B show an example in which a protruding portion 6b that protrudes toward the window plate 2a is provided around the through hole 6a. Although not shown, the window plate 2a may be formed in a flat plate shape without the protruding portion 6b.

  Preferably, the window plate 2a is bonded to one main surface of the flange 6 (the upper surface which is the outside of the package in FIG. 1). It becomes easy to join the window plate 2a and the flange 6, and it becomes easy to join in an airtight manner via a joining material.

  The flange 6 is for hermetically sealing the inside of the recess 1a of the base body 1 together with the window plate 2a. The sensor element 3 is placed and fixed on the bottom surface of the recess 1a of the base body 1 using a bonding material. After the electrodes are electrically connected to the wiring conductor 4 through the electrical connection means 5, as shown in FIG. 1A, gold-tin solder, gold-germanium solder, silver-tin solder, The flange 6 is joined using a sensor window member joining material 7 made of a resin adhesive or the like. Alternatively, as shown in FIG. 1B, a metal frame 6c is previously bonded to the upper surface of the base 1 using a metal frame bonding material 10 made of silver-copper braze or the like, and the metal frame 6c is iron- The flange 6 made of a metal such as nickel-cobalt alloy or iron-nickel alloy is joined by a welding method such as a seam welding method.

  The method of joining the flange 6 to the upper surface of the metal frame 6c by a welding method such as a seam welding method is preferable because the workability of joining the flange 6 can be improved. In addition, since the joining using the seam welding method is such that only the joint between the flange 6 and the metal frame 6c is locally heated, an element such as solder for joining the sensor element 3 to the recess 1a. It is possible to prevent the bonding material from being remelted.

  Further, when an iron-nickel-cobalt alloy is used for the flange 6, the thermal expansion between the flange 6 and the ceramic approximates, and the occurrence of breakage such as cracks is suppressed even when bonded to the substrate 1 made of ceramic. it can. As a result, when the base body 1 and the flange 6 are joined, the stress due to the difference in thermal expansion between the base body 1 and the flange 6 acting on the base body 1 can be relieved, and damage such as cracks can hardly occur in the base body 1. And the airtight reliability of the base | substrate 1 can be improved. Further, the flange 6 can be efficiently joined to the base body 1 by a seam welding method or the like.

  If a getter film 8 is formed on one main surface of the flange 6, a rare gas such as hydrogen inside the substrate 1 can be adsorbed by the getter film 8, and the inside of the substrate 1 is kept in a good vacuum state. be able to. Further, since the getter film 8 is not formed on the window plate 2a, the signal transparency of the window plate 2a is not lowered.

  The flange 6 includes a metal having excellent corrosion resistance and excellent wettability with a brazing material, specifically, a nickel layer having a thickness of 0.5 to 9 μm, and a gold (Au) layer having a thickness of 0.5 to 5 μm. Are preferably deposited sequentially by a plating method. The metal layer can be prevented from being oxidized and corroded, the bondability with the substrate 1 can be improved, and the adhesion of the getter film 8 can be further improved.

  The getter film 8 is made of, for example, a chemically active metal such as zirconium (Zr) or vanadium (V), and gas can be adsorbed by these active metals. When the getter film 8 is held at a high temperature of about 300 to 500 ° C. for several tens of minutes, for example, gas atoms adsorbed on the surface are taken into the inside, and the surface can be activated again.

  The getter film 8 is formed on the other main surface of the flange 6 (in FIG. 1, the lower surface of the flange which is the inside of the package) by, for example, vacuum deposition.

  As shown in the bottom view of the sensor window member in FIG. 2, the getter film 8 is preferably formed in a divided pattern on the other main surface of the flange. Even when the sensor window member bonding material 7 is brought into contact with the surface of the getter film 8 at the time of bonding to the substrate 1, the gap for the sensor is separated by the gap 8a separating the getter films 8 arranged for each sector. It is possible to prevent the window member bonding material 7 from spreading over the entire getter film 8. Therefore, the dimension between the sensor window member bonding material 7 and the getter film 8 can be shortened.

  Next, the sensor package according to the present invention will be described.

  In FIG. 1, a sensor package according to the present invention includes a base body 1 having a recess 1a for accommodating a sensor element 3 on the upper surface, and a sensor window member 2 having the above-described structure for closing the recess 1a of the base body 1. It comprises.

  With this configuration, it is possible to obtain an inexpensive sensor package that is not easily affected by unnecessary noise and that is difficult to damage the substrate 1 or the like.

The substrate 1 is made of alumina (Al ₂ O ₃ ) ceramics, aluminum nitride (AlN) ceramics, mullite (3Al ₂ O ₃ · 2SiO ₂ ) ceramics, or resin or glass.

  When the substrate 1 is made of ceramics, a sensor package with a high degree of freedom in forming the wiring conductor 4 on the substrate 1 can be obtained. That is, the wiring conductor 4 can be routed around the base 1 in accordance with the position of the electrode of the sensor element 3, the position of the connection portion for connecting the package to the external electric circuit board, and the like. Can be improved. Moreover, it is preferable that it consists of ceramics also from a viewpoint of the dimensional accuracy of a package.

  When the substrate 1 is made of alumina ceramics, for example, it is manufactured as follows.

First, alumina, silicon oxide (SiO _2), calcium oxide (CaO), a suitable organic binder and plasticizer material powder such as magnesium oxide (MgO), dispersing agent, a solvent, etc. are added and mixed forms with mud漿状. A plurality of ceramic green sheets are obtained by forming this into a sheet shape by a conventionally known doctor blade method or calendar roll method.

  Next, an appropriate punching process is performed on these ceramic green sheets to form punched portions that become the recesses 1a and the like. A conductive paste obtained by mixing an appropriate binder and solvent with metal powder such as tungsten (W), molybdenum (Mo), manganese (Mn), etc., which becomes the wiring conductor 4 on the inner surface of the recess 1a, is applied to the ceramic green sheet. A conductive paste layer to be the wiring conductor 4 is formed on the inner surface of the recess 1a by printing and applying a predetermined pattern at a position by a screen printing method or the like. The ceramic green sheets on which the punched portions and the conductor paste layer are formed are stacked and fired at a temperature of about 1600 ° C. in a reducing atmosphere to form a wiring conductor 4 made of a metallized metal layer. The substrate 1 is manufactured.

  Further, in the base 1 made of ceramic, a metallized metal layer made of tungsten, molybdenum, manganese, or the like, which is the same as the wiring conductor 4, is formed on the joint portion of the sensor window member 2 described later and the mounting portion of the sensor element 3. It is good to keep. With this configuration, the sensor window member 2 and the sensor element 3 are respectively made of the sensor window member bonding material 7 and the element bonding material made of gold-tin brazing, gold-germanium brazing, silver-tin brazing, resin adhesive, or the like. It can be firmly joined and fixed.

  In addition, preferably at the location where the flange 6 on the upper surface of the substrate 1 is joined, as shown in FIG. 1B, an iron (Fe) -nickel (Ni) -cobalt (Co) alloy, an iron-nickel alloy, or the like. It is preferable that a metal frame 6c made of the above metal is provided. When the base 1 is made of resin, the metal frame 6c is provided by embedding a part of the lower side by molding. The metal frame 6c is formed by a conventionally known metal processing method such as press processing, cutting processing, and etching processing.

  Note that the metal layer such as the wiring conductor 4 formed on the surface of the substrate 1, the metal layer for joining the sensor window member 2, and the metal layer for joining the sensor element 3 has excellent corrosion resistance and is wet with the brazing material. A metal having excellent properties, specifically, a nickel layer having a thickness of 0.5 to 9 μm and a gold (Au) layer having a thickness of 0.5 to 5 μm may be sequentially deposited by a plating method.

  Next, the sensor device according to the present invention will be described.

  1, in the sensor device according to the present invention, the sensor element 3 is placed and fixed on the bottom surface of the recess 1a, and the sensor window member 2 of the present invention is joined to the top surface of the substrate 1, and the sensor element 3 is connected to the recess 1a. Sealed. With this configuration, it is possible to provide an inexpensive sensor device that has high operational reliability using the sensor package of the present invention.

  The sensor element 3 is a semiconductor element of a diode type or a bolometer type, for example, and is placed and fixed on the upper main surface of the recess 1a via a bonding material. The element bonding material is made of gold-tin brazing, gold-germanium brazing, silver (Ag) -tin (Sn) brazing, resin adhesive, or the like.

  The sensor element 3 is mounted and fixed on the bottom surface of the recess 1a of the base 1 via a bonding material, and then the electrode of the sensor element 3 provided on the top surface of the sensor element 3 is provided in the recess 1a of the base 1 The conductor 4 is electrically connected via an electrical connection means 5 such as a bonding wire. Then, the window plate 2a attached to the sensor window member 2 is aligned so as to face the sensor element 3, and the sensor window member 2 is placed on the upper surface of the substrate 1 in an atmosphere of vacuum, nitrogen, or inert gas. Bonded and hermetically sealed in a state where the inside of the package is kept in an atmosphere of vacuum, nitrogen, or inert gas.

  Moreover, in the example of the package shown to Fig.1 (a), FIG.1 (b), the shelf part 1b in which the wiring conductor 4 was formed is provided in the inner surface of the recessed part 1a. The wiring conductor 4 functions as an electric signal input / output pad of the sensor element 3. The wiring conductor 4 is led out from the inside of the base body 1 and connected to an external electric circuit, so that an electric signal can be input / output between the sensor element 3 and the external electric circuit so as to function as a sensor device. Become.

  In the sensor device of the present invention, preferably, the sensor element 3 is an infrared light receiving element, and this configuration allows infrared light to pass through the window plate 2a made of single crystal silicon or single crystal germanium. It is possible to provide a sensor device that can normally detect infrared rays received by the window plate 2a.

  The present invention is not limited to the above-described embodiments and examples, and various modifications may be made without departing from the scope of the present invention.

(A) is sectional drawing which shows an example of embodiment of the sensor apparatus of this invention, (b) is sectional drawing which shows the other example of embodiment of the sensor apparatus of this invention. It is a bottom view which shows an example of embodiment of the window member for sensors of this invention. It is sectional drawing which shows an example of the conventional sensor apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1: Base | substrate 1a: Concave part 2: Window member for sensors 2a: Window board 3: Sensor element 6: Flange 6b: Protrusion part 6c: Metal frame 7: Window bonding material 8: Getter film 10: Metal frame bonding material

Claims (10)

A sensor window member comprising: a window plate made of silicon single crystal or germanium single crystal; and a flange joined to an outer peripheral portion of the window plate. The sensor window member according to claim 1, wherein the window plate is joined to one main surface of the flange. The protrusion part which protruded from the said 1 main surface is provided in the junction part with the said window plate of the said flange, The said window plate is joined to the front-end | tip of this protrusion part, It is characterized by the above-mentioned. The window member for sensors as described. The sensor window member according to any one of claims 1 to 3, wherein the flange is made of an iron-nickel-cobalt alloy. The sensor window member according to any one of claims 1 to 4, wherein a getter film is formed on the other main surface of the flange. 6. The sensor window member according to claim 5, wherein the getter film is arranged in a pattern divided into a plurality of parts. It comprises a base having a recess for accommodating a sensor element on the upper surface, and the sensor window member according to any one of claims 1 to 6 for closing the recess of the base. Sensor package. The sensor package according to claim 7, wherein the base is made of ceramics. 9. A sensor device comprising: the sensor package according to claim 7; and a sensor element mounted and fixed in the recess and sealed by the sensor window member. The sensor device according to claim 9, wherein the sensor element is an infrared light receiving element.

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