JP2010034532A - ホローカソードプラズマを利用した大面積基板処理方法 - Google Patents
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
【解決手段】ホローカソードプラズマを利用した大面積基板処理方法は、プラズマが生成される複数の下側凹部241が底面に形成されたホローカソード240と、複数の噴射口が形成されたバッフル250との間に流入したガスによってホローカソードプラズマを発生させて、基板支持部上に配置された基板Wを前記噴射口を通過した前記ホローカソードプラズマによって処理する。
【選択図】図5
Description
さらに、前記下側凹部のうちで、前記流入ホールが設けられた下側凹部は、前記流入ホールが設けられていない下側凹部の間に配置されていてもよい。
110、210、310、410、510 プロセスチャンバ
120、220、320、420、520 ガス供給部
130、230、330、430、530 基板支持部
140、240、340、440、540 ホローカソード
150、250、350、450 バッフル
260、360、460、560 下部電極
Claims (16)
- プラズマが生成される複数の下側凹部が底面に形成されたホローカソードと、複数の噴射口が形成されたバッフルとの間にガスを流入してホローカソードプラズマを発生させ、
基板支持部上に配置された基板を前記噴射口を通過した前記ホローカソードプラズマによって処理することを特徴とするホローカソードプラズマを利用した大面積基板処理方法。 - 前記ホローカソードには、前記下側凹部の上端から延びて該ホローカソードの上面まで貫通形成された流入ホールが設けられていることを特徴とする請求項1に記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記下側凹部のうち、一部のみに前記流入ホールが設けられていることを特徴とする請求項2に記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記下側凹部のうちで、前記流入ホールが設けられた下側凹部は、前記流入ホールが設けられていない下側凹部の間に配置されていることを特徴とする請求項3に記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記ホローカソードの上部から前記流入ホールを通じてガスが供給されることを特徴とする請求項2乃至請求項4のうち、何れか一つに記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記ホローカソードと前記バッフルの間の側方からガスがさらに供給されることを特徴とする請求項5に記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記基板の処理は、基板上のフォトレジストを除去するプロセスであることを特徴とする請求項1乃至請求項4のうち何れか一つに記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記フォトレジストは、高ドーズイオン注入されたフォトレジストであることを特徴とする請求項7に記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記フォトレジストは、低誘電率の誘電体膜上に設けられていることを特徴とする請求項7に記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記低誘電率の誘電体膜は、銅膜上に形成されていることを特徴とする請求項9に記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記基板支持部は、内部にヒータが設けられていることを特徴とする請求項1乃至請求項10のうち何れか一つに記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記基板支持部には、下部電極が設けられ、
前記バッフルを通過したプラズマの密度を、該バッフルと前記下部電極の間で増加させることを特徴とする請求項1乃至請求項4のうち何れか一つに記載のホローカソードプラズマを利用した大面積基板処理方法。 - 前記ホローカソード及び前記下部電極には、各々高周波電力が印加され、
前記バッフルは、接地されることを特徴とする請求項12に記載のホローカソードプラズマを利用した大面積基板処理方法。 - 前記ホローカソードに印加される電力は、100W〜10kWであって、周波数が100kHz〜27.12kHzであり、
前記電極に印加される電力は、100W〜2kWであって、周波数が2kHz〜4kHz、または13.56kHzであり、
圧力条件は、1mTorr〜10Torrであることを特徴とする請求項12に記載のホローカソードプラズマを利用した大面積基板処理方法。 - 前記ガスは、水素ガスを含むガスであることを特徴とする請求項12に記載のホローカソードプラズマを利用した大面積基板処理方法。
- 前記ガスは、水素ガス及び窒素ガスの混合ガスであることを特徴とする請求項15に記載のホローカソードプラズマを利用した大面積基板処理方法。
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KR1020080073822A KR101046335B1 (ko) | 2008-07-29 | 2008-07-29 | 할로우 캐소드 플라즈마 발생방법 및 할로우 캐소드플라즈마를 이용한 대면적 기판 처리방법 |
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Also Published As
Publication number | Publication date |
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KR101046335B1 (ko) | 2011-07-05 |
TW201012312A (en) | 2010-03-16 |
TWI418262B (zh) | 2013-12-01 |
US8574445B2 (en) | 2013-11-05 |
KR20100012436A (ko) | 2010-02-08 |
JP4978851B2 (ja) | 2012-07-18 |
US20100025371A1 (en) | 2010-02-04 |
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