JP2010034435A - Ring table device which can movably mount flat ring and grip ring - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve such problems that a working table is sometimes not fit for use because it differs depending on how a chip is supplied, that is, in a flat ring mounted state as in the conventional manner to facilitate transportation of a substrate divided into chips, or sometimes in a clip ring mounted state as in recent days. <P>SOLUTION: A change kit is attached to a mounting portion of the working table in both cases of the flat ring and the clip ring so that the table can be used with either ring. In addition, a ring jig plate is attached to the clip ring so as to set the same mounted state as in the case of the flat ring, and work can be carried out in both cases of the flat ring and the clip ring. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

The present invention inspects, transfers, and bonds a substrate that is bonded to a flexible pressure-sensitive adhesive sheet and disassembled into a plurality of chips such as a silicon wafer supplied in a state mounted on a flat ring or a grip ring. The present invention relates to a ring table device used in a device for (bonding).
The ring table device is a work range in which a substrate supplied by a flat ring or a grip ring is held and fixed on the upper part of the ring table and moved directly below the inspection camera or moved to the pickup unit of the transfer device. This is the part that moves under the control of the controller.

A glass substrate used for a CCD camera or the like, a semiconductor chip used for an integrated circuit, and the like are subjected to a thickness adjustment, mechanical grinding, chemical etching, and the like, and then a flexible adhesive sheet is attached. Further, a flat ring is attached to the outer peripheral portion of the pressure-sensitive adhesive sheet to facilitate conveyance.

With the adhesive sheet adhered, the glass substrate or silicon wafer is diced (cut into a dice and formed into a plurality of chips), and is decomposed into a plurality of chips. At the time of dicing, only the glass substrate or the silicon wafer is accurately cut and the adhesive sheet is not cut.
Therefore, the chips cut at the time of dicing are not scattered.

  However, when the divided chips are picked up or inspected, the cut surfaces of the divided chips are thin and may interfere with each other, so that the adhesive sheet is stretched to widen the interval between the chips.

  As a conventional method for stretching an adhesive sheet, a semiconductor wafer stretching apparatus such as that disclosed in JP-A-10-125630 has been proposed. This conventional example has a configuration as shown in FIG.

After fixing the flat ring 94 with the clamp 93, the piston 95 is raised by the elevating shaft 92, and the adhesive sheet 91 is pushed up and stretched by the flange 96.
As a result, the interval h between the chips 90 is widened, and pick-up and inspection are facilitated.

The sheet band 97 is fitted from the outside of the adhesive sheet 91 when the interval h is widened, and the adhesive sheet 91 is fastened so as not to shrink, and the adhesive sheet 91 is cut by the cutter 98, so that the flange 96 The adhesive sheet 91 stretched by being sandwiched between the seat bands 97 can be removed.

JP 10-125630 A

  Conventionally, a special machine for stretching the pressure-sensitive adhesive sheet is required, and when a chip is provided with a flat ring, such a special machine is used to stretch the pressure-sensitive adhesive sheet so that it does not shrink and pick up, etc. Had to work.

The tip is provided by sticking to a flat ring, and the tip is provided by stretching the adhesive sheet and fastening it with a grip ring.The method of attaching to the ring table is changed depending on the state of the tip provided. I had to use it.

There is a straight line portion on the outer periphery of the flat ring, and the flat ring is easily guided. Further, the outer periphery of the flat ring has two recesses for fitting with two positioning pins, so that positioning is easy.

However, the grip ring is difficult to position because it has only one recess for determining the direction. Conventionally, a general direction is determined by manual judgment by an operator, and accurate positioning cannot be performed.

Since the flat ring and grip ring have different shapes, they had to create and store their own magazines and set the magazines with different shapes on the work equipment.

Accordingly, a flat ring attached to the ring in a state where the substrate divided into a plurality of chips is attached to a flexible adhesive sheet attached to the ring and the adhesive sheet is not stretched, and the adhesive sheet A table device that moves a work position used in a work machine for inspection and transfer of the substrate divided into the plurality of chips, which is supplied with a grip ring attached to the ring in a stretched state. A ring clamp that inserts and holds the flat ring or the grip ring and descends, and a ring expand convex portion whose diameter is set so as to have a minute interval with the inner surface of the descending ring clamp,
A ring table that moves and rotates the ring clamp and the ring expanding convex portion to a working position; and a control unit that controls the ring clamp and the ring table, wherein the control unit stretches the adhesive sheet to the adhesive sheet stretching working position. When the ring ring is moved to the flat ring, the ring expanding convex part comes into contact with the adhesive sheet, and the ring clamp is lowered with respect to the ring expanding convex part at a minute interval while stretching the adhesive sheet. And when the control unit moves the grip ring to the holding and fixing position, the ring expanding convex part and the ring clamp hold and fix the ring of the grip ring so as to sandwich the ring up and down. A ring table moves the substrate to a predetermined working position. There is provided a ring table device being characterized in that so as to control at control unit.

The ring expand convex portion includes a ring expand stretch convex portion that stretches the adhesive sheet of the flat ring, and a ring expand pressing convex portion that holds and fixes the ring of the grip ring, and the ring expand stretch convex portion. The ring expander pressing convex portion is attached in a replaceable manner, and is a ring table device in which the inner peripheral surface of the grip ring is fitted to have the same outer shape as the flat ring. The present invention provides a ring table device characterized in that a common ring clamp can be used by making the outer shape of the grip ring and the flat ring the same by a plate.

The ring table apparatus further comprises a detecting means for automatically detecting whether the ring inserted and held in the ring clamp is the flat ring or the grip ring, and is inserted into the ring clamp. The ring table apparatus includes jig exchanging means configured to be exchangeable depending on whether the held ring is the flat ring or the grip ring, and a positioning pin attached to the ring jig plate and the grip A ring table device characterized in that the ring jig plate and the grip ring are mounted in a fixed direction by fitting a recess formed on the outer periphery of the ring,
By providing the ring jig plate on the grip ring, it is possible to provide the ring table device by using the accommodating portion that can also be used as the flat ring. Is.

  When the tip 41 is provided by the flat ring 40, the ring clamp 31 moves down while pressing the flat ring 40, so that the ring expanding convex portion 322 pushes up the adhesive sheet 42. This acts to widen the distance h between the chips 41 divided on the stretched adhesive sheet.

When the tip 41 is provided by the grip ring 45, the ring clamp 31 is moved down so that the outer grip ring 401 and the inner grip ring 402 are sandwiched by changing the ring clamp 31 and the ring expanding convex portion 322. It is configured to be fixed.
Alternatively, the ring jig plate 46 is fitted to the grip ring 45, and the grip ring 45 is fixed so as to be sandwiched between the ring expanding convex portion 322 and the ring clamp 31.

With the configuration as described above, the ring table 30 of the present invention can be held and fixed and moved to the working position regardless of whether the tip 41 is provided in the flat ring 40 or the grip ring 45. be able to.

In addition, the outer shape of the grip ring 45 and the flat ring 40 is determined by fitting the ring jig plate 46 formed with the ring jig plate convex portion 463 so as to be fitted to the inner peripheral surface of the inner grip ring 452 of the grip ring 45. By making it the same, the ring clamp guide 312 adapted to the flat ring 40 and the pins 313 and 314 adapted to the recesses 401 and 402 formed on the outer shape of the flat ring 40 can be used in common for positioning. .

Then, a recess 453 is provided on the outer periphery of the grip ring 45 (in the case of the present embodiment, it is provided for positioning when the adhesive sheet 42 is stretched and sandwiched between the outer grip ring 451 and the inner grip ring 452 instead of being purposely provided. Positioning so that the direction of the tip attached to the grip ring 45 can be made constant by configuring it to engage with the positioning pin 464 of the ring jig plate 46 (which uses the recess 453). I was able to do it.

As described above, the ring jig plate 46 is fitted into the grip ring 45, so that it can be accommodated in the same magazine 25 as the flat ring 40, which is economical.

When the chip 41 is provided, the adhesive sheet 42 is attached to either the flat ring 40 or the grip ring 45 and is attached to the adhesive sheet 42 for easy transportation.

When the chip 41 is given in the form of the flat ring 40, the adhesive sheet 42 should be stretched to widen the distance h between the chips 41 so that the chips 41 do not interfere with each other, so that pickup and image recognition can be performed easily. .

When the chip 41 is provided in the form of the grip ring 45, the adhesive sheet 42 is provided in a state of being stretched and sandwiched between the outer grip ring 451 and the inner grip ring 452, so there is no need to increase the distance between the chips 41.
If the pressure-sensitive adhesive sheet 42 is not uniformly stretched, the positions of the chips whose intervals h are widened will be uneven, so it is possible to perform the stretching work in a uniform state in advance and fix it with the clip ring 45. It is a method that was conceived and devised.

However, the clip ring 45 and the flat ring 40 are completely different in outer shape, and until now, dedicated machines were manufactured according to the formats provided, but in the present invention, the chip 41 is provided in either format. The ring table 30 that can also handle this is provided.
As a result, instead of manufacturing a new device, a change kit is manufactured on the ring table 30 so that it can be used universally.

Also, by attaching the ring jig plate 46 to the grip ring 45, the outer shape can be made the same as that of the flat ring 40, and positioning can be performed using the common magazine 25, the common ring clamp guide 312 and the common pins 313 and 314. This is economical because it can be used, and it can compensate for the shortcomings of the grip ring 45 that has not been able to determine the direction of the tip 41 arrangement until now.

In other words, the concave portion 453 is formed in the grip ring 45 for positioning during work such as dicing. By positioning the concave portion 453 to the positioning pin 46 of the ring jig plate 46, the grip ring 45 is positioned. However, it has become possible to align with much higher accuracy than the visual inspection performed by the operator.

Examples of the present invention will be described below. The substrate divided into a plurality of chips 41 is a disk-shaped plate obtained by thinly slicing an ingot in which a seed crystal of a semiconductor material such as silicon is grown in a cylindrical shape, such as a semiconductor wafer. It is the state of dicing.

  In order to prevent the divided chips 41 from being separated, a flexible adhesive sheet is attached to the back side surface of the substrate. In order to facilitate conveyance, the flat ring 40 is adhered to the outer peripheral portion of the adhesive sheet 42.

The flat ring 40 has a shape as shown in FIG. Since the chips 41 are in a diced state, the interval h between the chips 41 is narrow, and when the chips 41 are picked up by an adsorption device or the like, they may interfere with each other.
In addition, when the image of each chip 41 is recognized, if the interval h is narrow, recognition for each chip 41 cannot be performed and a malfunction may occur. Therefore, a device for uniformly stretching the adhesive sheet 42 as in the conventional example shown in FIG. 8 is required.

  Further, in the above-described adhesive sheet stretching operation, if the stretching of the adhesive sheet 42 is not uniform, the positions of the chips 41 with the wide interval h become uneven, which makes it difficult to pick up the chips 41 and recognize the image. is there.

Therefore, the clip ring 45 is provided with the tip 41 by being fastened by the outer clip ring 451 and the inner clip ring 452 in a state where the adhesive sheet 42 has already been uniformly stretched.
The clip ring 45 has a shape as shown in FIG. (1) is a diagram viewed from the front surface, and (2) is a diagram viewed from the back surface. A concave portion 453 is formed on the outer periphery of the outer clip ring 451. This is formed with a recess 453 used to make the direction of the substrate divided into a plurality of chips 41 constant when the adhesive sheet 42 is stretched and fixed. In the present invention, the recesses 453 are used to arrange the chips 42 in a certain direction.

The ring clamp inner peripheral surface 315 is formed on the inner side (smaller diameter) than the flat ring inner peripheral surface. The expanded convex part 322 is formed inside the ring clamp inner peripheral surface 315 (having a small diameter).
Therefore, when the flat ring 40 inserted along the ring clamp guide 312 is installed at a predetermined position, the expand screw portion 324 is rotated by driving the expand motor 323 and the ring clamp 31 is lowered. Then, the expanded convex portion 322 pushes up the pressure-sensitive adhesive sheet 42, the pressure-sensitive adhesive sheet 42 is stretched, and the interval between the chips 41 is increased. (Ring expand expansion convex part that stretches adhesive sheet 42 of flat ring 40)

  When the grip ring 45 with the ring jig plate 46 attached is inserted into the ring clamp 31, the inner peripheral surface 315 of the ring clamp is in contact with either the outer grip ring or the inner grip ring 452 (the diameter is (Same) molded. (Ring expansion presser convex part that holds and fixes the rings 451 and 452 of the grip ring 45)

  Further, the ring jig plate convex portion 463 is formed on the inner side (so that the diameter becomes smaller) than the ring expand convex portion 322. Therefore, when the grip ring 45 fitted with the ring jig plate 46 inserted along the ring clamp guide 312 is installed at a predetermined position and the ring clamp 31 descends, the ring jig plate 46 is held from below by the ring expanding convex portion 322. The ring ring inner peripheral surface 315 presses and holds the grip ring 45 from above. Accordingly, the grip ring 45 is configured to be held and fixed to the ring table 30.

When holding and fixing the grip ring 45 to which the ring jig plate 46 is not mounted, the interval between the ring clamp guides 312 is changed, and the ring clamp inner peripheral surface 315 is both the outer ring clamp 451 and the inner ring clamp 452. It is molded so as to come into contact with either one (to have the same diameter).
Even when the ring jig plate 46 is mounted, the ring expanding pressing convex portion may be changed in the same manner.

Further, the ring expanding convex portion 322 is formed so as to abut on either one of the outer ring clamp 451 and the inner ring clamp 452 (so that the diameters are the same).
After manufacturing the change kit as described above, when the grip ring 45 is attached to the link clamp guide 312 and the ring clamp 31 is lowered, the ring expand convex portion 322 and the ring clamp inner peripheral surface 315 are pressed so that the grip ring 45 is configured to hold and fix.

The operation of the ring table device 30 capable of movably installing the flat ring 40 and the grip ring 45 configured as described above will be described.
FIG. 1 shows a glass substrate inspection apparatus to which a ring table 30 according to an embodiment of the present invention is attached. The ring table 30 as well as such an embodiment can be used when the chip 41 is provided by using the flat ring 40 or the grip ring 45 in the transfer apparatus of the chip 41 or the bonding apparatus of the chip 41. .

  A flat ring 40 is stored in the magazine 25. It is configured to be gripped and pulled out by the ring chuck 23 and to move the flat ring 40 in the Y1 direction along the ring clamp guide 312 in a state as shown in the schematic diagram of FIG.

  The ring chuck 23 passes through the ring clamp recess 311 and moves in the Y1 direction. When the recesses 401 and 402 of the flat ring 40 are positioned in contact with the pins 313 and 314, the ring chuck 23 releases the flat ring 40 and the ring Retreat to a position where it does not interfere with the table 30.

The ring clamp 31 that positions the flat ring 40 is configured to drive the expand motor 323 and rotate the expand screw shaft 324 to descend.
Then, the ring expanding convex part 322 comes into contact with the sticking seal part 421 to which nothing is stuck on the flat ring 40. As the ring clamp 31 descends, the pressure-sensitive adhesive sheet portion 421 to which no ring expanding convex portion 322 is attached is pushed up.

With such a configuration, the adhesive sheet 42 is stretched, and the interval h between the chips 41 divided on the adhesive sheet 42 is increased.
Further, the entire flat ring 40 is sandwiched and held and fixed by the adhesive sheet 42 between the ring clamp 31 and the ring expanding convex portion 322.

The flat ring 40 held and fixed between the ring clamp 31 and the ring expand 32 is configured to move in the Y direction by driving the Y axis motor 302 and rotating the Y screw shaft 303.
Similarly, the X-axis motor 305 is driven and the X screw shaft 306 is rotated to move in the X direction.

  Further, by driving the θ-axis motor 308 and rotating the θ-axis gear 309, the ring expanding gear 321 is rotated, and the flat ring 40 held and fixed can be rotated in the θ direction.

  All the motors used in this device are servo motors, and a rotary encoder is built in the motor, and the motor 3 rotates in which direction and how many times the motor rotates with a pulse to the control unit 3. It is configured to send.

The control unit 3 is configured to calculate the pitch of the screw shaft connected to each motor together with the motor information, and determine to which position the bearing unit into which the screw shaft is inserted has moved.
With the above configuration, the operation of the ring table 30 is controlled by the control unit 3.

  As a result, the flat ring 40 delivered by the ring chuck 23 as shown in FIG. 1 is moved directly below the outer shape inspection camera 20 by the ring table 30, and the outer shape inspection work is performed.

  Next, the case where the tip 41 is provided by the grip ring 45 as shown in FIG. 3 will be described. As described above, the grip ring 45 is stretched and the adhesive sheet 422 is sandwiched between the outer grip ring 451 and the inner grip ring 452, and the tip 41 is fastened so as to come to the center of the ring, and is supplied in the state shown in FIG.

As shown in FIG. 4, the ring jig plate 46 is fitted behind the grip ring 45 so as to be an interference fit. At this time, the recesses 453 on the outer periphery of the clip ring 45 are fitted so that the positioning pins 464 coincide with each other.
As a result, the grip ring 45 and the ring jig plate 46 are integrated into the same outer shape as the flat ring 40. Therefore, the chip 41 can be accurately positioned by being housed in the magazine 25 of FIG. 1 and pulled out by the ring chuck 23 and inserted along the ring pipe guide 312 and the pins 313 and 314 are brought into contact with the recesses 461 and 462 as shown in FIG. it can.
It is also possible to attach detection means for determining that the gripping portion of the ring chuck 23 that chucks when pulling out the ring jig plate 46 from the magazine 25 detects the positioning pin 464 and the grip ring 45 attached to the ring jig plate 46. . The detected result is transmitted to the control unit 3 to control the position of the work machine according to the subsequent movement of the ring table 30 and the work content.

Thereafter, the expand motor 323 is driven to rotate the expand screw shaft 324 to lower the ring clamp 31. The ring expanding convex portion 322 abuts the back surface of the ring jig plate 46, and the ring clamp 31 holds and fixes the grip ring 45 by pressing either the outer grip ring 451 or the inner grip ring 452 in the Z direction. This is controlled by the control unit 3.
This state is shown in FIG. In FIG. 7, for easy understanding, the ring clamp 31 is illustrated as being transparent.

With the ring table apparatus as described above, either the flat ring 40 or the grip ring 45 can be attached to the ring table 30 by using the ring jig plate 46. Magazine 25 can also be shared.
In addition, a sensor is attached in the vicinity of the magazine 25 or the ring chuck 23, and whether the provided tip 41 is a flat ring 40, a grip ring 45, or a grip ring using a ring jig plate 46. Can be automated by providing a detecting means that automatically detects and holds and fixes the pressure applied to the expanding motor 323, etc. (However, the ring expanding convex portion 322 may need to be changed as necessary.)
In addition, the ring table 30 that can be moved to the working position by either the flat ring 40 or the grip ring 45 can also be provided by changing the ring clamp 31 in which the distance between the ring expanding convex part 322 and the ring clamp guide 312 is adjusted.
Furthermore, the magazine 25 can be shared with that of the flat ring 40 if the clip ring 45 uses the ring jig plate 46. However, since the grip ring 45 is thick, it is necessary to reduce the number of sheets that can be stored from the magazine 25 dedicated to the flat ring 40.

Although it is more complicated than the above-mentioned method, the clip ring 45 is inserted into the ring clamp 31 as it is and fixed by changing the distance between the ring clamp guide 312 of the ring clamp 31 and the diameter of the ring expanding convex portion 322. It is also possible to control by the control unit 3 to do so.
Also, the diameter of the ring-expanded convex part 322 is configured to be automatically changed by a method such as a restriction of a shirter or by the ring chuck 23, so that the adhesive sheet 42 is stretched and the grip ring 45 is pressed. The ring table 30 can be used as both the flat ring 40 and the grip ring 45 by changing the pressing convex portion.
However, at this time, the direction of the tip 41 of the clip ring 45 must be properly positioned, or it must be configured to be determined by imaging with a camera.

The invention of the present application is not limited to the clip ring 45 or the flat ring 40, but is a table that moves the chip interval to the working position by extending the adhesive sheet 42 to which the substrate divided into a plurality of chips is adhered. All can be applied.

In the perspective view of the glass substrate inspection apparatus using the ring table 30 of the present embodiment, the ring table 30 holds the flat ring 40 and moves directly below the outer shape inspection camera 20 to image the chip 41 of the glass substrate FIG. 4 is a perspective view of a flat ring 40 in which a chip 41 is attached to an adhesive sheet 42. FIG. (1) is a perspective view of the grip ring 45 in which the chip 41 is adhered to the adhesive sheet 42 as viewed from the surface. (2) is a perspective view of the grip ring 45 as viewed from the back side, in which the outer grip ring 451 and the inner grip ring 452 are clearly broken. A state in which the ring jig plate 46 and the grip ring 45 are engaged with each other is illustrated. The state where the ring table 30 holds the grip ring 45 is illustrated. The ring clamp 31 of the ring table 30 is shown as transparent, and the ring clamp guide 312 for guiding the flat ring 40 and the pins 313 and 314 for positioning the flat ring 40 are shown clearly. is there. As in FIG. 6, the ring clamp 31 of the ring table 30 is shown transparent, and the ring jig plate 46 fitted with the grip ring 45 is positioned in contact with the ring clamp guide 312 of the ring clamp 31 and the pins 313 and 314. Is shown. A state in which an adhesive sheet 91 of a conventional flat ring 94 is stretched by a flange 96 and fixed by a seat band 97 is shown.

Explanation of symbols

3 Control unit
20
Outline inspection camera
23 Ring chuck
twenty five
magazine
30
Ring table
301
Y axis base
302
Y axis motor
303
Y screw shaft
304
X-axis base
305
X-axis motor
306
X screw shaft
307
θ axis base
308
θ axis motor
309
θ-axis gear
31
Ring clamp
311 Ring clamp recess
312 Ring clamp guide
313 pin
314 pin
315 Ring clamp inner peripheral surface
32
Ring expand
321
Ring expanding gear
322
Ring expand convex
323
Expanding motor
324
Expanded screw shaft
40
Flat ring
401
Flat ring recess
402
Flat ring recess
405 Flat ring inner surface
41
Chip
42
Adhesive sheet
421 Adhesive sheet part with nothing attached
422 Stretched adhesive sheet
45 Grip ring
451 Outer grip ring
452 Inner grip ring
453 recess
46 Ring jig plate
461 recess
462 recess
463 Ring jig plate convex part
464 Locating pin
90 chips (conventional example)
91 Adhesive sheet (conventional example)
92 Lifting shaft (conventional example)
93 Clamp (conventional example)
94 Flat ring (conventional example)
95 Piston (conventional example)
96 buttock (conventional example)
97 Seat band (conventional example)
98 Cutter (conventional example)
h interval

Claims (7)

A flat ring attached to the ring in a state where the substrate divided into a plurality of chips is attached to a flexible adhesive sheet attached to the ring and the adhesive sheet is not stretched;
Supplied with a grip ring attached to the ring in a state where the adhesive sheet is stretched,
A table device for moving a work position used in a work machine for inspection transfer, etc., on a substrate divided into a plurality of chips,
A ring clamp that inserts, holds, and descends the flat ring or the grip ring; and
A ring-expanded convex portion having a diameter set so as to have a minute gap with the inner surface of the ring clamp that descends;
A ring table that moves and rotates the ring clamp and the ring expanding convex portion to a working position;
A control unit for controlling the ring clamp and the ring table;
When the control unit moves the flat ring to the adhesive sheet stretching work position,
The ring expand convex portion abuts on the adhesive sheet, and the ring clamp is held and fixed while stretching the pressure sensitive adhesive sheet by descending with respect to the ring expand convex portion at a minute interval,
When the control unit moves the grip ring to the holding and fixing position,
The ring expanding convex part and the ring clamp are held and fixed so as to sandwich the ring of the grip ring vertically,
A ring table apparatus, wherein the ring table is controlled by a control unit so as to move the substrate to a predetermined working position. The ring-expanded convex portion includes a ring-expanded-stretched convex portion that stretches the adhesive sheet of the flat ring, and a ring-expanded pressing convex portion that holds and fixes the ring of the grip ring, and the ring-expanded convex portion 2. The ring table device according to claim 1, wherein the ring expanding pressing convex portion is attached in a replaceable manner.   By fitting the inner peripheral surface of the grip ring and making the outer shape similar to that of the flat ring, the ring ring common to the grip ring and the flat ring can be obtained by making the outer shape of the grip ring and the flat ring the same. 2. The ring table device according to claim 1, wherein the ring table device can be used. 3. The ring table device according to claim 1, further comprising detection means for automatically detecting whether the ring inserted and held in the ring clamp is the flat ring or the grip ring, and holding and fixing the ring table device. 3. The ring table apparatus according to claim 1, further comprising jig exchanging means configured to be exchangeable depending on whether the ring inserted and held in the ring clamp is the flat ring or the grip ring.   The positioning pin attached to the ring jig plate and a recess formed on the outer periphery of the grip ring are fitted together so that the ring jig plate and the grip ring are mounted in a certain direction. Ring table device according to 1 or 2. By attaching the ring jig plate to the grip ring, it is possible to provide the substrate by using an accommodating portion that can also be used as the flat ring. 3. The ring table device according to 3.

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