JP2010026162A5 - - Google Patents

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Publication number
JP2010026162A5
JP2010026162A5 JP2008186189A JP2008186189A JP2010026162A5 JP 2010026162 A5 JP2010026162 A5 JP 2010026162A5 JP 2008186189 A JP2008186189 A JP 2008186189A JP 2008186189 A JP2008186189 A JP 2008186189A JP 2010026162 A5 JP2010026162 A5 JP 2010026162A5
Authority
JP
Japan
Prior art keywords
movable plate
movable
stopper portion
movable structure
structure according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008186189A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010026162A (ja
JP5053194B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2008186189A external-priority patent/JP5053194B2/ja
Priority to JP2008186189A priority Critical patent/JP5053194B2/ja
Priority to US13/001,197 priority patent/US20110188104A1/en
Priority to SG2013024815A priority patent/SG189738A1/en
Priority to KR1020107029073A priority patent/KR101183915B1/ko
Priority to CN2009801237280A priority patent/CN102067433A/zh
Priority to EP09770219.5A priority patent/EP2299584A4/en
Priority to SG2013024781A priority patent/SG189737A1/en
Priority to PCT/JP2009/061583 priority patent/WO2009157509A1/ja
Priority to DE09770219T priority patent/DE09770219T8/de
Publication of JP2010026162A publication Critical patent/JP2010026162A/ja
Publication of JP2010026162A5 publication Critical patent/JP2010026162A5/ja
Publication of JP5053194B2 publication Critical patent/JP5053194B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008186189A 2008-06-25 2008-07-17 可動構造体及びそれを用いた光走査ミラー Expired - Fee Related JP5053194B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2008186189A JP5053194B2 (ja) 2008-07-17 2008-07-17 可動構造体及びそれを用いた光走査ミラー
SG2013024781A SG189737A1 (en) 2008-06-25 2009-06-25 Moving structure and light scanning mirror using the same
DE09770219T DE09770219T8 (de) 2008-06-25 2009-06-25 Bewegliche struktur und lichtabtastspiegel damit
KR1020107029073A KR101183915B1 (ko) 2008-06-25 2009-06-25 가동 구조체 및 이것을 사용한 광주사 미러
CN2009801237280A CN102067433A (zh) 2008-06-25 2009-06-25 可动结构体及使用它的光扫描反射镜
EP09770219.5A EP2299584A4 (en) 2008-06-25 2009-06-25 MOVABLE STRUCTURE AND LIGHTING MIRRORS WITH IT
US13/001,197 US20110188104A1 (en) 2008-06-25 2009-06-25 Moving structure and light scanning mirror using the same
PCT/JP2009/061583 WO2009157509A1 (ja) 2008-06-25 2009-06-25 可動構造体及びそれを用いた光走査ミラー
SG2013024815A SG189738A1 (en) 2008-06-25 2009-06-25 Semiconductor mechanical structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008186189A JP5053194B2 (ja) 2008-07-17 2008-07-17 可動構造体及びそれを用いた光走査ミラー

Publications (3)

Publication Number Publication Date
JP2010026162A JP2010026162A (ja) 2010-02-04
JP2010026162A5 true JP2010026162A5 (enExample) 2012-06-07
JP5053194B2 JP5053194B2 (ja) 2012-10-17

Family

ID=41732069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008186189A Expired - Fee Related JP5053194B2 (ja) 2008-06-25 2008-07-17 可動構造体及びそれを用いた光走査ミラー

Country Status (1)

Country Link
JP (1) JP5053194B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009033191A1 (de) * 2009-07-07 2011-01-13 Technische Universität Dresden Reduzierung der dynamischen Deformation von Translationsspiegeln mit Hilfe von trägen Massen
WO2014010243A1 (ja) * 2012-07-13 2014-01-16 住友精密工業株式会社 半導体装置
CN106604887B (zh) * 2014-08-04 2019-04-02 费斯·巴-提斯 三自由度mems活塞管静电微致动器
JP6414516B2 (ja) * 2015-06-24 2018-10-31 京セラドキュメントソリューションズ株式会社 光偏向器及び該光偏向器を備えた画像形成装置
JP2021021676A (ja) 2019-07-30 2021-02-18 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
CN116997840A (zh) * 2021-03-17 2023-11-03 株式会社小糸制作所 光反射装置、传感器装置以及照明装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3666370B2 (ja) * 2000-07-06 2005-06-29 株式会社村田製作所 外力検知センサ
JP2005266074A (ja) * 2004-03-17 2005-09-29 Anritsu Corp 光スキャナ
CN1906119A (zh) * 2004-04-22 2007-01-31 松下电器产业株式会社 执行器
JP2007052256A (ja) * 2005-08-18 2007-03-01 Fujifilm Corp 回転変位型光変調素子及びこれを用いた光学装置

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