JP2009532899A5 - - Google Patents

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Publication number
JP2009532899A5
JP2009532899A5 JP2009504203A JP2009504203A JP2009532899A5 JP 2009532899 A5 JP2009532899 A5 JP 2009532899A5 JP 2009504203 A JP2009504203 A JP 2009504203A JP 2009504203 A JP2009504203 A JP 2009504203A JP 2009532899 A5 JP2009532899 A5 JP 2009532899A5
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JP
Japan
Prior art keywords
fluid
chamber
chambers
substrate
chuck system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009504203A
Other languages
English (en)
Japanese (ja)
Other versions
JP4667524B2 (ja
JP2009532899A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2007/007487 external-priority patent/WO2007126767A2/en
Publication of JP2009532899A publication Critical patent/JP2009532899A/ja
Publication of JP2009532899A5 publication Critical patent/JP2009532899A5/ja
Application granted granted Critical
Publication of JP4667524B2 publication Critical patent/JP4667524B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009504203A 2006-04-03 2007-03-26 流体チャンバのアレイを備えるチャック・システム Active JP4667524B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US78877706P 2006-04-03 2006-04-03
PCT/US2007/007487 WO2007126767A2 (en) 2006-04-03 2007-03-26 Chucking system comprising an array of fluid chambers

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010248309A Division JP2011077529A (ja) 2006-04-03 2010-11-05 流体チャンバのアレイを備えるチャック・システム

Publications (3)

Publication Number Publication Date
JP2009532899A JP2009532899A (ja) 2009-09-10
JP2009532899A5 true JP2009532899A5 (cg-RX-API-DMAC10.html) 2010-04-22
JP4667524B2 JP4667524B2 (ja) 2011-04-13

Family

ID=38656006

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2009504203A Active JP4667524B2 (ja) 2006-04-03 2007-03-26 流体チャンバのアレイを備えるチャック・システム
JP2010248309A Pending JP2011077529A (ja) 2006-04-03 2010-11-05 流体チャンバのアレイを備えるチャック・システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2010248309A Pending JP2011077529A (ja) 2006-04-03 2010-11-05 流体チャンバのアレイを備えるチャック・システム

Country Status (6)

Country Link
EP (1) EP2007566A4 (cg-RX-API-DMAC10.html)
JP (2) JP4667524B2 (cg-RX-API-DMAC10.html)
KR (1) KR20090004910A (cg-RX-API-DMAC10.html)
CN (1) CN101415535A (cg-RX-API-DMAC10.html)
TW (1) TWI352874B (cg-RX-API-DMAC10.html)
WO (1) WO2007126767A2 (cg-RX-API-DMAC10.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4854383B2 (ja) * 2006-05-15 2012-01-18 アピックヤマダ株式会社 インプリント方法およびナノ・インプリント装置
US8215946B2 (en) * 2006-05-18 2012-07-10 Molecular Imprints, Inc. Imprint lithography system and method
US8652393B2 (en) * 2008-10-24 2014-02-18 Molecular Imprints, Inc. Strain and kinetics control during separation phase of imprint process
US8309008B2 (en) * 2008-10-30 2012-11-13 Molecular Imprints, Inc. Separation in an imprint lithography process
US8913230B2 (en) * 2009-07-02 2014-12-16 Canon Nanotechnologies, Inc. Chucking system with recessed support feature
JP5875250B2 (ja) * 2011-04-28 2016-03-02 キヤノン株式会社 インプリント装置、インプリント方法及びデバイス製造方法
JP5893303B2 (ja) * 2011-09-07 2016-03-23 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法
CN105792998A (zh) * 2013-12-03 2016-07-20 哈莫技术股份有限公司 保持设备、保持系统、控制方法和传送设备
JP6333031B2 (ja) * 2014-04-09 2018-05-30 キヤノン株式会社 インプリント装置および物品の製造方法
US10620532B2 (en) 2014-11-11 2020-04-14 Canon Kabushiki Kaisha Imprint method, imprint apparatus, mold, and article manufacturing method
JP6647027B2 (ja) 2015-12-03 2020-02-14 キヤノン株式会社 インプリント装置および物品製造方法
JP6940944B2 (ja) * 2016-12-06 2021-09-29 キヤノン株式会社 インプリント装置、及び物品製造方法
JP7132739B2 (ja) 2018-04-06 2022-09-07 キヤノン株式会社 インプリント装置、インプリント方法および物品製造方法
JP7710350B2 (ja) 2021-09-28 2025-07-18 キヤノン株式会社 インプリント方法、インプリント装置、および物品の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06244269A (ja) * 1992-09-07 1994-09-02 Mitsubishi Electric Corp 半導体製造装置並びに半導体製造装置におけるウエハ真空チャック装置及びガスクリーニング方法及び窒化膜形成方法
JP2000195927A (ja) 1998-12-28 2000-07-14 Sony Corp 真空チャック装置
JP2001127145A (ja) * 1999-08-19 2001-05-11 Canon Inc 基板吸着保持方法、基板吸着保持装置および該基板吸着保持装置を用いた露光装置ならびにデバイス製造方法
EP1077393A2 (en) * 1999-08-19 2001-02-21 Canon Kabushiki Kaisha Substrate attracting and holding system for use in exposure apparatus
JP2001127144A (ja) * 1999-08-19 2001-05-11 Canon Inc 基板吸着保持方法、基板吸着保持装置および該基板吸着保持装置を用いた露光装置ならびにデバイス製造方法
AU2003291477A1 (en) * 2002-11-13 2004-06-03 Molecular Imprints, Inc. A chucking system and method for modulating shapes of substrates

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