JP2009532899A5

JP2009532899A5 -

Info

Publication number: JP2009532899A5
Application number: JP2009504203A
Authority: JP
Filing date: 2007-03-26
Publication date: 2010-04-22
Anticipated expiration: 2027-03-26

Claims

A chuck system for holding a first portion of a substrate and simultaneously curving the second portion of the substrate,
A chuck body having first and second opposing sides;
A pressure control system in fluid communication with the first and second fluid chambers;
With
The first side has an array of fluid chambers arranged in columns and rows, the array of fluid chambers overlying the first portion of the substrate and the second portion of the substrate. Said second fluid chambers overlapping each other, each fluid chamber being spaced apart first and second to define spaced apart first and second support areas The first support area surrounds the second support area and the first and second grooves, the second support area surrounds the second groove, The substrate is supported by the first and second support areas. With these configurations, the first groove and the portion of the substrate that overlaps the first groove define the first chamber, and the second groove and the second groove. A portion of the substrate determines a second chamber and each front A first chamber and each of the second chambers is in fluid communication with a different fluid source to control the flow of the array of fluid chambers, and the first chamber of the first fluid chamber is in a vacuum state. The system, wherein the second chamber of the first fluid chamber and the first and second chambers of the second fluid chamber are under different pressures.

The chuck system of claim 1, wherein each first chamber in the fluid chamber tandem is in fluid communication with a common fluid source.

The chuck system of claim 1, wherein each second chamber in a row of the fluid chambers is in fluid communication with a common fluid source.

Each first chamber in the column of fluid chambers is in fluid communication with a first common fluid source, and each second chamber in a row of the fluid chambers is with the first common fluid source. The chuck system of claim 1, wherein the chuck system is in fluid communication with different second common fluid sources.

The chuck system of claim 1, wherein a fluid chamber of the array of fluid chambers is sealed distinct from other fluid chambers of the plurality of fluid chambers.

A plurality of passages, wherein each column of the first chamber and each row of the second chamber are coupled to different passages, and the first and second chambers are arranged in fluid communication with the different fluid sources; A chuck system characterized by being made.

A chuck system for holding a first portion of a substrate and simultaneously bending the second portion of the substrate,
A chuck body having first and second opposing sides;
A pressure control system in fluid communication with the first and second fluid chambers;
With
The first side has an array of fluid chambers including the first fluid chamber and the second fluid chamber, each fluid chamber being spaced apart by first and second support areas. Spaced apart first and second grooves, the first support area surrounding the second support area and the first and second grooves, The second support area surrounds the second concave groove, and the substrate is supported by the first and second support areas, and by these configurations, the first concave groove and a portion of the substrate that overlaps the first concave groove. Determines the first chamber, the second groove and the portion of the substrate overlapping it determine the second chamber,
The pressure control system is in fluid communication with each of the first and second chambers of the first fluid chamber and the second fluid chamber, whereby the first and second of the first fluid chamber. Control the pressure in the first and second chambers such that the first and second chambers of the second fluid chamber have a negative pressure, and the first fluid chamber has a positive pressure, A ratio of the area between the first and second grooves is determined such that one fluid chamber exerts a negative force on a portion of the substrate overlapping the fluid chamber; The chuck system is characterized in that a positive pressure is applied in the first and second chambers and a negative pressure is applied in the first and second chambers of the second fluid chamber.

The chuck system of claim 7, further comprising a plurality of fluid chambers arranged in columns and rows.

8. The chuck system of claim 7, further comprising first and second passages for fluidly communicating each of the first and second chambers of the first fluid chamber with the pressure control system. .

The pressure control system includes a plurality of sources of fluid, and each column of the first chamber and each row of the second chamber are in fluid communication with a different source of the plurality of fluid sources of fluid. 9. The chuck system of claim 8, wherein the flow of fluid in the array is controlled.

The chuck system of claim 10, wherein each first chamber in the column of fluid chambers is in fluid communication with a common fluid source.

The chuck system of claim 10, wherein each second chamber in the row of fluid chambers is in fluid communication with a common fluid source.

Each first chamber in the column of fluid chambers is in fluid communication with a first common fluid source, and each second chamber in a row of the fluid chambers is a second common different from the first common fluid source. The chuck system of claim 10, wherein the chuck system is in fluid communication with a fluid source.

11. The chuck system of claim 10, wherein a fluid chamber of the array of fluid chambers is sealed off from other fluid chambers of the array of fluid chambers.

A plurality of passages, wherein each column of the first chamber and each row of the second chamber are connected to different passages, and the first and second chambers are arranged in fluid communication with the different fluid sources; The chuck system of claim 10, wherein:

A chuck system for holding a first portion of a substrate and simultaneously bending the second portion of the substrate,
A chuck body having first and second opposing sides;
A pressure control system having a plurality of fluid sources;
With
The first side is arranged in rows and columns and has an array of fluid chambers including a first fluid chamber and a second fluid chamber, each of the first and second fluid chambers being spaced apart Having first and second recessed grooves spaced apart to define first and second support areas disposed at a distance, wherein the first support area is the second support area. An area and the first and second grooves, the second support area surrounds the second groove, and the substrate is supported by the first and second support areas. The first groove and a portion of the substrate overlapping it determine a first chamber, the second groove and a portion of the substrate overlapping it determine a second chamber;
The pressure control system includes each of the first columns in fluid communication with a fluid source different from the plurality of fluid sources and a row of the second chambers, with these configurations, the first fluid chamber in the first fluid chamber. Controlling the pressure in the first and second chambers such that the first and second chambers have a positive pressure and the first and second chambers of the second fluid chamber have a negative pressure; An area ratio between the first and second grooves is determined such that the first fluid chamber applies a negative force to a portion of the substrate overlapping the fluid chamber, and the first fluid A chuck system wherein a positive pressure is provided in the first and second chambers of the chamber and a negative pressure is provided in the first and second chambers of the second fluid chamber. .

17. The chuck system of claim 16, wherein each first chamber in the fluid chamber tandem is in fluid communication with a common fluid source.

The chuck system of claim 16, wherein each second chamber in a row of the fluid chambers is in fluid communication with a common fluid source.

Each first chamber in the column of fluid chambers is in fluid communication with a first common fluid source, and each second chamber in a row of the fluid chambers is different from the first common fluid source. The chuck system of claim 16, wherein two common fluid sources are in fluid communication.

A plurality of passages, wherein each column of the first chambers and each row of the second chambers are connected to different passages, and the first and second chambers are arranged in fluid communication with the different fluid sources. The chuck system according to claim 10.