JP2009529847A5 - - Google Patents

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Publication number
JP2009529847A5
JP2009529847A5 JP2008541407A JP2008541407A JP2009529847A5 JP 2009529847 A5 JP2009529847 A5 JP 2009529847A5 JP 2008541407 A JP2008541407 A JP 2008541407A JP 2008541407 A JP2008541407 A JP 2008541407A JP 2009529847 A5 JP2009529847 A5 JP 2009529847A5
Authority
JP
Japan
Prior art keywords
pump
brushless
motor
piston
dispensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008541407A
Other languages
English (en)
Japanese (ja)
Other versions
JP5339915B2 (ja
JP2009529847A (ja
Filing date
Publication date
Priority claimed from PCT/US2005/042127 external-priority patent/WO2006057957A2/fr
Application filed filed Critical
Priority claimed from PCT/US2006/044907 external-priority patent/WO2007061957A2/fr
Publication of JP2009529847A publication Critical patent/JP2009529847A/ja
Publication of JP2009529847A5 publication Critical patent/JP2009529847A5/ja
Application granted granted Critical
Publication of JP5339915B2 publication Critical patent/JP5339915B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008541407A 2005-11-21 2006-11-20 ポンプの機械式ピストンのピストン制御システムおよび方法 Active JP5339915B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
USPCT/US2005/042127 2005-11-21
PCT/US2005/042127 WO2006057957A2 (fr) 2004-11-23 2005-11-21 Systeme et procede pour systeme de distribution a position initiale variable
US74166005P 2005-12-02 2005-12-02
US60/741,660 2005-12-02
US84172506P 2006-09-01 2006-09-01
US60/841,725 2006-09-01
PCT/US2006/044907 WO2007061957A2 (fr) 2005-11-21 2006-11-20 Systeme et procede permettant de commander la position d'un piston mecanique dans une pompe

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013086392A Division JP5674853B2 (ja) 2005-11-21 2013-04-17 ポンプの機械式ピストンのピストン制御システムおよび方法

Publications (3)

Publication Number Publication Date
JP2009529847A JP2009529847A (ja) 2009-08-20
JP2009529847A5 true JP2009529847A5 (fr) 2010-02-12
JP5339915B2 JP5339915B2 (ja) 2013-11-13

Family

ID=39592976

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008541407A Active JP5339915B2 (ja) 2005-11-21 2006-11-20 ポンプの機械式ピストンのピストン制御システムおよび方法
JP2013086392A Active JP5674853B2 (ja) 2005-11-21 2013-04-17 ポンプの機械式ピストンのピストン制御システムおよび方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2013086392A Active JP5674853B2 (ja) 2005-11-21 2013-04-17 ポンプの機械式ピストンのピストン制御システムおよび方法

Country Status (6)

Country Link
EP (1) EP1954946B1 (fr)
JP (2) JP5339915B2 (fr)
KR (2) KR101283259B1 (fr)
CN (1) CN103016324B (fr)
TW (2) TWI405905B (fr)
WO (1) WO2007061957A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9753443B2 (en) 2014-04-21 2017-09-05 Synerject Llc Solenoid systems and methods for detecting length of travel
DE102015201884B4 (de) * 2015-02-04 2023-07-27 Schaeffler Technologies AG & Co. KG Fluidische Betätigungsanordnung
FR3050513B1 (fr) * 2016-04-26 2018-11-16 Erca Dispositif de distribution de produit liquide ou pateux
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
JP6920923B2 (ja) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス ポンプ装置および基板処理装置
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5018A (en) * 1847-03-13 Improvement in machinery for combing wool
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
US5312233A (en) 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US5336884A (en) * 1992-07-01 1994-08-09 Rockwell International Corporation High resolution optical hybrid absolute incremental position encoder
US5947702A (en) * 1996-12-20 1999-09-07 Beco Manufacturing High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm
JPH11356081A (ja) * 1998-06-09 1999-12-24 Matsushita Electric Ind Co Ltd インバータ装置
US6390780B1 (en) * 1998-09-24 2002-05-21 Rule Industries, Inc. Pump and controller system and method
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
EP1133639B1 (fr) * 1998-11-23 2004-06-09 Mykrolis Corporation Controleur de pompe pour appareil de pompage de precision
US6203288B1 (en) 1999-01-05 2001-03-20 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver
US6575264B2 (en) * 1999-01-29 2003-06-10 Dana Corporation Precision electro-hydraulic actuator positioning system
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
WO2001018395A1 (fr) * 1999-09-03 2001-03-15 Baxter International Inc. Procede et dispositif de regulation de pompes
US6348124B1 (en) 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system
JP2001342989A (ja) * 2000-05-30 2001-12-14 Matsushita Electric Ind Co Ltd Ｄｃポンプの駆動制御方法
JP2002106467A (ja) * 2000-09-28 2002-04-10 Techno Excel Co Ltd トラバース機構駆動式流体ポンプ
US6520520B2 (en) * 2000-10-31 2003-02-18 Durrell U. Howard Steering stabilizer with trimming accumulator
JP4576739B2 (ja) * 2001-04-02 2010-11-10 パナソニック電工株式会社 ポンプ用モータ駆動制御装置
JP4684478B2 (ja) * 2001-07-04 2011-05-18 株式会社荏原製作所 給水装置の制御方法
GB0130602D0 (en) * 2001-12-21 2002-02-06 Johnson Electric Sa Brushless D.C. motor
US6914543B2 (en) * 2002-06-03 2005-07-05 Visteon Global Technologies, Inc. Method for initializing position with an encoder
JP4191437B2 (ja) * 2002-06-26 2008-12-03 並木精密宝石株式会社 基板一体型ブラシレスモータ
JP2004225672A (ja) * 2003-01-27 2004-08-12 Ebara Densan Ltd 回転機械の運転制御装置
US20050173463A1 (en) * 2004-02-09 2005-08-11 Wesner John A. Dispensing pump having linear and rotary actuators
DE602004007247T2 (de) * 2004-06-04 2008-02-28 Société Industrielle de Sonceboz S.A., Sonceboz Pumpenantrieb

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