JP2009525899A5 - - Google Patents

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Publication number
JP2009525899A5
JP2009525899A5 JP2008554279A JP2008554279A JP2009525899A5 JP 2009525899 A5 JP2009525899 A5 JP 2009525899A5 JP 2008554279 A JP2008554279 A JP 2008554279A JP 2008554279 A JP2008554279 A JP 2008554279A JP 2009525899 A5 JP2009525899 A5 JP 2009525899A5
Authority
JP
Japan
Prior art keywords
material layer
polymer substrate
additional
manufacturing
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008554279A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009525899A (ja
Filing date
Publication date
Priority claimed from US11/350,158 external-priority patent/US7607227B2/en
Application filed filed Critical
Publication of JP2009525899A publication Critical patent/JP2009525899A/ja
Publication of JP2009525899A5 publication Critical patent/JP2009525899A5/ja
Pending legal-status Critical Current

Links

JP2008554279A 2006-02-08 2007-01-31 プリントヘッド製造方法 Pending JP2009525899A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/350,158 US7607227B2 (en) 2006-02-08 2006-02-08 Method of forming a printhead
PCT/US2007/002804 WO2007092266A1 (en) 2006-02-08 2007-01-31 A method of forming a printhead

Publications (2)

Publication Number Publication Date
JP2009525899A JP2009525899A (ja) 2009-07-16
JP2009525899A5 true JP2009525899A5 (enExample) 2010-03-11

Family

ID=38006818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008554279A Pending JP2009525899A (ja) 2006-02-08 2007-01-31 プリントヘッド製造方法

Country Status (4)

Country Link
US (2) US7607227B2 (enExample)
EP (1) EP1981714A1 (enExample)
JP (1) JP2009525899A (enExample)
WO (1) WO2007092266A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6184291B2 (ja) * 2013-10-22 2017-08-23 キヤノン株式会社 シリコン基板の加工方法
JP2015133424A (ja) * 2014-01-14 2015-07-23 住友電工デバイス・イノベーション株式会社 電子部品の製造方法
GB2566309B (en) * 2017-09-08 2021-06-16 Xaar Technology Ltd A method for the manufacture of a MEMS device

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4944836A (en) * 1985-10-28 1990-07-31 International Business Machines Corporation Chem-mech polishing method for producing coplanar metal/insulator films on a substrate
US4775444A (en) * 1987-08-26 1988-10-04 Macdermid, Incorporated Process for fabricating multilayer circuit boards
JP2551632B2 (ja) * 1988-07-11 1996-11-06 株式会社日立製作所 パターン形成方法および半導体装置製造方法
US4889584A (en) * 1989-03-31 1989-12-26 Meiko Electronics Co., Ltd. Method of producing conductor circuit boards
US5469199A (en) 1990-08-16 1995-11-21 Hewlett-Packard Company Wide inkjet printhead
US5291226A (en) 1990-08-16 1994-03-01 Hewlett-Packard Company Nozzle member including ink flow channels
US5229785A (en) 1990-11-08 1993-07-20 Hewlett-Packard Company Method of manufacture of a thermal inkjet thin film printhead having a plastic orifice plate
JPH0529211A (ja) * 1991-07-18 1993-02-05 Sharp Corp 多層レジスト法
US5470693A (en) * 1992-02-18 1995-11-28 International Business Machines Corporation Method of forming patterned polyimide films
US5378137A (en) 1993-05-10 1995-01-03 Hewlett-Packard Company Mask design for forming tapered inkjet nozzles
JP3368094B2 (ja) * 1995-04-21 2003-01-20 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3096234B2 (ja) * 1995-10-30 2000-10-10 日東電工株式会社 プローブ構造の製造方法
US6209203B1 (en) 1998-01-08 2001-04-03 Lexmark International, Inc. Method for making nozzle array for printhead
US6959982B2 (en) * 1998-06-09 2005-11-01 Silverbrook Research Pty Ltd Flexible wall driven inkjet printhead nozzle
JP2000022337A (ja) * 1998-06-30 2000-01-21 Matsushita Electric Works Ltd 多層配線板及びその製造方法
JP3554782B2 (ja) 1999-02-01 2004-08-18 カシオ計算機株式会社 インクジェットプリンタヘッドの製造方法
KR20020025588A (ko) * 2000-09-29 2002-04-04 윤종용 잉크젯 프린터 헤드
US6663221B2 (en) 2000-12-06 2003-12-16 Eastman Kodak Company Page wide ink jet printing
US6412928B1 (en) 2000-12-29 2002-07-02 Eastman Kodak Company Incorporation of supplementary heaters in the ink channels of CMOS/MEMS integrated ink jet print head and method of forming same
US6450619B1 (en) 2001-02-22 2002-09-17 Eastman Kodak Company CMOS/MEMS integrated ink jet print head with heater elements formed during CMOS processing and method of forming same
US6491376B2 (en) 2001-02-22 2002-12-10 Eastman Kodak Company Continuous ink jet printhead with thin membrane nozzle plate
FR2816525A1 (fr) 2001-02-26 2002-05-17 Commissariat Energie Atomique Dispositif dispensateur de fluide et procede de realisation d'un tel dispositif
WO2003022584A1 (en) 2001-09-06 2003-03-20 Ricoh Company, Ltd. Liquid drop discharge head and manufacture method thereof, micro device, ink-jet head, ink cartridge, and ink-jet printing device
US20030052947A1 (en) 2001-09-14 2003-03-20 Lin Chen-Hua Structure of an inkjet printhead chip and method for making the same

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