JP2009521315A5 - - Google Patents

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Publication number
JP2009521315A5
JP2009521315A5 JP2008547458A JP2008547458A JP2009521315A5 JP 2009521315 A5 JP2009521315 A5 JP 2009521315A5 JP 2008547458 A JP2008547458 A JP 2008547458A JP 2008547458 A JP2008547458 A JP 2008547458A JP 2009521315 A5 JP2009521315 A5 JP 2009521315A5
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JP
Japan
Prior art keywords
light beam
region
optical system
substrate
layer
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JP2008547458A
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English (en)
Japanese (ja)
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JP4880701B2 (ja
JP2009521315A (ja
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Priority claimed from PCT/US2006/048498 external-priority patent/WO2007073482A2/en
Publication of JP2009521315A publication Critical patent/JP2009521315A/ja
Publication of JP2009521315A5 publication Critical patent/JP2009521315A5/ja
Application granted granted Critical
Publication of JP4880701B2 publication Critical patent/JP4880701B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008547458A 2005-12-21 2006-12-20 多光子硬化反応性組成物を処理するための方法及び装置 Expired - Fee Related JP4880701B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US75252905P 2005-12-21 2005-12-21
US60/752,529 2005-12-21
PCT/US2006/048498 WO2007073482A2 (en) 2005-12-21 2006-12-20 Method and apparatus for processing multiphoton curable photoreactive compositions

Publications (3)

Publication Number Publication Date
JP2009521315A JP2009521315A (ja) 2009-06-04
JP2009521315A5 true JP2009521315A5 (https=) 2010-02-04
JP4880701B2 JP4880701B2 (ja) 2012-02-22

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JP2008547458A Expired - Fee Related JP4880701B2 (ja) 2005-12-21 2006-12-20 多光子硬化反応性組成物を処理するための方法及び装置

Country Status (5)

Country Link
US (1) US7893410B2 (https=)
JP (1) JP4880701B2 (https=)
CN (1) CN101341578B (https=)
DE (1) DE112006003494T5 (https=)
WO (1) WO2007073482A2 (https=)

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