JP2009509172A - 水素センサ - Google Patents
水素センサ Download PDFInfo
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- JP2009509172A JP2009509172A JP2008532367A JP2008532367A JP2009509172A JP 2009509172 A JP2009509172 A JP 2009509172A JP 2008532367 A JP2008532367 A JP 2008532367A JP 2008532367 A JP2008532367 A JP 2008532367A JP 2009509172 A JP2009509172 A JP 2009509172A
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- 239000001257 hydrogen Substances 0.000 title claims abstract description 39
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 39
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000007789 gas Substances 0.000 claims description 43
- 230000010355 oscillation Effects 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 239000002041 carbon nanotube Substances 0.000 claims description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 abstract description 8
- 239000010453 quartz Substances 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 230000004044 response Effects 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 238000012986 modification Methods 0.000 abstract description 2
- 230000004048 modification Effects 0.000 abstract description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 15
- 239000002071 nanotube Substances 0.000 description 7
- 229910052763 palladium Inorganic materials 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000035559 beat frequency Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000005987 sulfurization reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/005—H2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2560/00—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics
- F01N2560/02—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics the means being an exhaust gas sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/021—Gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
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- Life Sciences & Earth Sciences (AREA)
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- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
通常、音叉共振器(resonator)における周波数の変化は小さく、したがって、差周波数検出法が周波数の小さな変動の検出に使用される可能性がある。
周波数と同様に、発振エネルギーがガス環境中に放散されるので、線質係数(quality factor)Q及び音叉共振器の電気インピーダンスは変化する。
f1=f10+kCH2
f2=f10+f12
Δf=f1−f2=f10+kCH2−f10+f12=kCH2+f12
ここで、f10は水素がない状態の発振器OSC1 303の周波数であり、f12は水素がない状態のOSC1 303とOSC2 304との周波数の差異であり、kは比例係数であり、CH2は水素濃度である。最後の数式は、次式に換算される。
CH2=(Δf−f12)/k
T=1/Δf=1/(f1−f2)=1/(kCH2+f12)
となる。
OCXO安定発振器がf0の周波数を有していれば、このとき、パスルカウンタ501の出力Nにおけるパルス数は、
N=f0T=f0/Δf=f0/(kCH2+f12)
となる。
音叉のような機械システムは機械抵抗RMを有していれば、共振周波数f0のときの線質係数Qは、
Q〜f0/RM
となる。
機械抵抗RMは、ガス粘度Vの関数であり、したがって、RMは次の一連の数式で記述される。
RM=RM0(1+c1V+c2V2+・・・)
ここで、c1、c2、・・・は比例係数である。ガスのような低粘度の媒体の場合、
RM=RM0(1+c1V)
と書き換えてもよい。
ここで、RM0は真空時の機械抵抗であって、ガスの粘度に依存しない。
RM=RM0(a−bCH2)
であり、ここで、a及びbは水素及び調整ガス(空気など)の粘度の関数であり、CH2は混合ガスにおける水素の相対濃度である。つまり、濃度は、
CH2〜(a−f0/QRM0)/b
と定義される。
ここで、Qは実験的に計測されうる。線質係数は、クオーツ音叉が電気回路の一部である場合、定義
Q=f0/Δf
によって容易に見出される。
Δfの計測は、電子工学を使用した従来法によって実施される(f0周辺の周波数掃引、発振パルスの振幅減衰又は減衰率の計測など)。電気インピーダンスもまた線質係数の関数であるので、
|Z(ω)|2〜(1/Q2−1)+(ω/ω0)2+(ω0/ω)2
となり、水素濃度の測定と同様に使用することができる。
温度、湿度、気圧、クオーツ劣化、及びその他の操作条件に対するセンサ応答を安定させるための改良が施されうる。
101 第1発振器
102 基準発振器
103 頂部
104 頂部
105 Dフリップフロップトリガ
106 フリップフロップ出力
110 発振器出力
Claims (11)
- 第1周波数出力部を備えた第1発振器と、
第2周波数出力部を備えた第2発振器と、
前記第1及び第2周波数の出力部間の差異である周波数信号の生成によって、前記ガスが前記第1発振器によって検知されるか否かを計測する回路と、
を具備し、前記第1発振器は検出されるガスを含む環境にさらされるとともに、前記第2発振器は検出される前記ガスを含まない環境にさらされていることを特徴とするガスセンサ。 - 前記計測回路は、前記第1周波数出力に接続されるD入力部と、前記第2周波数出力に接続されるクロック入力部とを有するDフリップフロップであり、その結果、DフリップフロップのQ出力が前記差異を生成することを特徴とする請求項1に記載のガスセンサ。
- 前記ガスは水素であることを特徴とする請求項1に記載のガスセンサ。
- 前記第1発振器によって検出される水素の存在が、前記第1発振器を高周波数で振動させることになることを特徴とする請求項3に記載のガスセンサ。
- 前記第1及び第2発振器の両方を動作する手段をさらに具備することを特徴とする請求項1に記載のガスセンサ。
- 検出される前記ガスを透過し、かつ、検出されないその他のガスを透過しない膜をさらに具備することを特徴とする請求項1に記載のガスセンサ。
- 前記ガスの検出を表すパルス数を出力するために、前記差周波数信号を受信する1つの入力部と、基準周波数信号を受信するその他の入力部とを有するパルスカウンタをさらに具備することを特徴とする請求項1に記載のガスセンサ。
- 発振ロッドに機械振動を付与する手段と、
前記発振ロッドの発振周波数の変化を計測する手段と、
検出信号を出力する手段と、
を具備し、前記計測手段が前記発振周波数の前記変化を検出すると、前記検出信号は特定のガスが前記発振ロッドによって検出されたことを示すことを特徴とするガスセンサ。 - 前記発振ロッドはカーボンナノチューブであることを特徴とする請求項8に記載のガスセンサ。
- 前記発振ロッドは同調発振器であることを特徴とする請求項8に記載のガスセンサ。
- 前記計測手段はフリップフロップ回路であることを特徴とする請求項10に記載のガスセンサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US71954805P | 2005-09-22 | 2005-09-22 | |
US60/719,548 | 2005-09-22 | ||
PCT/US2006/036763 WO2007038180A2 (en) | 2005-09-22 | 2006-09-21 | Hydrogen sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009509172A true JP2009509172A (ja) | 2009-03-05 |
JP5155168B2 JP5155168B2 (ja) | 2013-02-27 |
Family
ID=37900277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008532367A Expired - Fee Related JP5155168B2 (ja) | 2005-09-22 | 2006-09-21 | 水素センサ |
Country Status (8)
Country | Link |
---|---|
US (1) | US7647813B2 (ja) |
EP (1) | EP1946070B1 (ja) |
JP (1) | JP5155168B2 (ja) |
KR (1) | KR101280416B1 (ja) |
CN (1) | CN101273259B (ja) |
CA (1) | CA2622383A1 (ja) |
TW (1) | TWI436057B (ja) |
WO (1) | WO2007038180A2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012189537A (ja) * | 2011-03-14 | 2012-10-04 | Murata Mfg Co Ltd | ガスセンサ |
JP2012230071A (ja) * | 2011-04-27 | 2012-11-22 | Murata Mfg Co Ltd | 水素ガスセンサ |
WO2019163966A1 (ja) * | 2018-02-26 | 2019-08-29 | 日本電気株式会社 | ニオイ検出装置、ニオイ検出方法、及びコンピュータ読み取り可能な記録媒体 |
JPWO2020246276A1 (ja) * | 2019-06-03 | 2020-12-10 |
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Also Published As
Publication number | Publication date |
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TWI436057B (zh) | 2014-05-01 |
KR101280416B1 (ko) | 2013-07-01 |
CN101273259A (zh) | 2008-09-24 |
WO2007038180A3 (en) | 2007-07-12 |
JP5155168B2 (ja) | 2013-02-27 |
CA2622383A1 (en) | 2007-04-05 |
TW200732660A (en) | 2007-09-01 |
KR20080053502A (ko) | 2008-06-13 |
EP1946070A4 (en) | 2014-01-22 |
US20070068493A1 (en) | 2007-03-29 |
US7647813B2 (en) | 2010-01-19 |
CN101273259B (zh) | 2011-12-14 |
WO2007038180A2 (en) | 2007-04-05 |
EP1946070A2 (en) | 2008-07-23 |
EP1946070B1 (en) | 2015-05-20 |
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