JP2009245939A5 - - Google Patents

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Publication number
JP2009245939A5
JP2009245939A5 JP2009057885A JP2009057885A JP2009245939A5 JP 2009245939 A5 JP2009245939 A5 JP 2009245939A5 JP 2009057885 A JP2009057885 A JP 2009057885A JP 2009057885 A JP2009057885 A JP 2009057885A JP 2009245939 A5 JP2009245939 A5 JP 2009245939A5
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JP
Japan
Prior art keywords
electrode
detector
potential
sample
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009057885A
Other languages
English (en)
Japanese (ja)
Other versions
JP5774269B2 (ja
JP2009245939A (ja
Filing date
Publication date
Priority claimed from US12/059,850 external-priority patent/US7791020B2/en
Application filed filed Critical
Publication of JP2009245939A publication Critical patent/JP2009245939A/ja
Publication of JP2009245939A5 publication Critical patent/JP2009245939A5/ja
Application granted granted Critical
Publication of JP5774269B2 publication Critical patent/JP5774269B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009057885A 2008-03-31 2009-03-11 マルチステージ・ガス・カスケード増幅器 Expired - Fee Related JP5774269B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/059,850 US7791020B2 (en) 2008-03-31 2008-03-31 Multistage gas cascade amplifier
US12/059,850 2008-03-31

Publications (3)

Publication Number Publication Date
JP2009245939A JP2009245939A (ja) 2009-10-22
JP2009245939A5 true JP2009245939A5 (https=) 2012-04-19
JP5774269B2 JP5774269B2 (ja) 2015-09-09

Family

ID=40673265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009057885A Expired - Fee Related JP5774269B2 (ja) 2008-03-31 2009-03-11 マルチステージ・ガス・カスケード増幅器

Country Status (3)

Country Link
US (1) US7791020B2 (https=)
EP (1) EP2107591A1 (https=)
JP (1) JP5774269B2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
US9679741B2 (en) * 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system
EP2631929A1 (en) 2012-02-27 2013-08-28 FEI Company A holder assembly for cooperating with an environmental cell and an electron microscope
WO2014022429A1 (en) 2012-07-30 2014-02-06 Fei Company Environmental sem gas injection system
US9633816B2 (en) * 2015-05-18 2017-04-25 Fei Company Electron beam microscope with improved imaging gas and method of use
EP3176808B1 (en) * 2015-12-03 2019-10-16 Carl Zeiss Microscopy Ltd. Method for detecting charged particles and particle beam device for carrying out the method
EP3792952B1 (en) * 2019-09-16 2025-02-19 FEI Company Light guide assembly for an electron microscope

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US4880976A (en) 1987-05-21 1989-11-14 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
US4823006A (en) 1987-05-21 1989-04-18 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope
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