JPS6417367A - Energy analyzer - Google Patents

Energy analyzer

Info

Publication number
JPS6417367A
JPS6417367A JP62172329A JP17232987A JPS6417367A JP S6417367 A JPS6417367 A JP S6417367A JP 62172329 A JP62172329 A JP 62172329A JP 17232987 A JP17232987 A JP 17232987A JP S6417367 A JPS6417367 A JP S6417367A
Authority
JP
Japan
Prior art keywords
suppressor electrode
secondary electron
grid
sample
analytic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62172329A
Other languages
Japanese (ja)
Inventor
Toshihiro Ishizuka
Akio Ito
Kazuyuki Ozaki
Kazuo Okubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62172329A priority Critical patent/JPS6417367A/en
Publication of JPS6417367A publication Critical patent/JPS6417367A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To check a secondary electron being emitted out of a suppressor electrode as well as to make the surface potential of a sample accurately measurable by covering a surface of the suppressor electrode with such a material that is small in secondary electron emission efficiency. CONSTITUTION:In this analyzer, there are provided with a drawer grid 4 coming nearer to a sample 2, an analytic grid 6 coming closer to a lens barrel 1 than the grid 4 and a suppressor electrode 21 coming closer to this lens barrel 1 than this analytic grid 6. And, also there is provided with the secondary electron detector set up sideways between the analytic grid 6 and the suppressor electrode 21, and at least a surface of the suppressor electrode 21 is covered by such a material that is small in secondary electron emission efficiency. With this constitution, even if a reflected electron collides with the suppressor electrode 21, a secondary electron to be generated can be made into almost zero, thus the surface potential of the sample 2 is accurately measurable.
JP62172329A 1987-07-10 1987-07-10 Energy analyzer Pending JPS6417367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62172329A JPS6417367A (en) 1987-07-10 1987-07-10 Energy analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62172329A JPS6417367A (en) 1987-07-10 1987-07-10 Energy analyzer

Publications (1)

Publication Number Publication Date
JPS6417367A true JPS6417367A (en) 1989-01-20

Family

ID=15939886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62172329A Pending JPS6417367A (en) 1987-07-10 1987-07-10 Energy analyzer

Country Status (1)

Country Link
JP (1) JPS6417367A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009245939A (en) * 2008-03-31 2009-10-22 Fei Co Multistage gas cascade amplifier

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009245939A (en) * 2008-03-31 2009-10-22 Fei Co Multistage gas cascade amplifier

Similar Documents

Publication Publication Date Title
DE3682127D1 (en) FLIGHT TIME MASS SPECTROMETER WITH AN ION REFLECTOR.
EP0866332A3 (en) Shaping neutron energies to achieve sensitivity and uniformity of bulk material analysis
JPS6417367A (en) Energy analyzer
JPS6471051A (en) Photomultiplier device
GB895363A (en) Improvements in and relating to information storage devices
JPS5413249A (en) Cathode ray tube
JPS6433840A (en) Surface analyzer
JPS566146A (en) Detector for defective pellet
JPS5258355A (en) X-ray detecting unit for electronic microscope
JPS6413171A (en) Toner density detector
JPS543593A (en) Solid surface analyzer
JPS529487A (en) Sample analyzer
JPS5648050A (en) Reflected electron detector
JPS5522813A (en) Semiconductor photo decector
JPS6419665A (en) Ion beam device
WOO et al. Analysis and computations of microwave-atmospheric interactions[Final Report, 1 Sep. 1982- 31 Aug. 1983]
JPS53135667A (en) Position detecting method of emitter
JPS56168327A (en) Hollow cathode for secondary ion mass spectroscope
JPS54145592A (en) X-ray analyzer
JPS53113480A (en) Reflecting electron beam detector
JPS52127390A (en) Energy analyzer for secondary electron
JPS543594A (en) Solid surface element analyzer
JPS571957A (en) Device for limiting charge on surface of solid
ES332837A1 (en) Particle detectors of use for detecting positive ions
JPS556737A (en) Scan electron microscope