JPS6419665A - Ion beam device - Google Patents
Ion beam deviceInfo
- Publication number
- JPS6419665A JPS6419665A JP17563587A JP17563587A JPS6419665A JP S6419665 A JPS6419665 A JP S6419665A JP 17563587 A JP17563587 A JP 17563587A JP 17563587 A JP17563587 A JP 17563587A JP S6419665 A JPS6419665 A JP S6419665A
- Authority
- JP
- Japan
- Prior art keywords
- target
- plate
- generated
- potential
- secondary ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To enable secondary ions to be detected efficiently without deteriorating a detector by detecting secondary ions generated from a conversion plane after injecting the secondary ions generated from a target into the secondary electron conversion plane kept equal in potential to the objective lens side. CONSTITUTION:Secondary electrons generated with the irradiation of ion beams to a target 10 are drawn back to the target 10 since the potential of the target 10 is higher than the potential on the objective lens side. However, the secondary ion generated from the target is accelerated with 27kV and enters an electric field softening electrode 16 and a plate 14 in the earth potential. Secondary electrons are generated from the plate with the injection of the secondary ions to the plate 14. This secondary electrons are invited to a microchannel plate 17 by the potential difference between the plate 14 and the microchannel plate 17 and detected there. Hereby, the secondary ions from the target can be defected without causing deterioration in the detector.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17563587A JPS6419665A (en) | 1987-07-14 | 1987-07-14 | Ion beam device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17563587A JPS6419665A (en) | 1987-07-14 | 1987-07-14 | Ion beam device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6419665A true JPS6419665A (en) | 1989-01-23 |
Family
ID=15999532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17563587A Pending JPS6419665A (en) | 1987-07-14 | 1987-07-14 | Ion beam device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6419665A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5240688A (en) * | 1990-08-01 | 1993-08-31 | Fuel Tech Gmbh | Process for the in-line hydrolysis of urea |
JP2017135048A (en) * | 2016-01-29 | 2017-08-03 | 株式会社ホロン | Electron detecting device and electron detecting method |
-
1987
- 1987-07-14 JP JP17563587A patent/JPS6419665A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5240688A (en) * | 1990-08-01 | 1993-08-31 | Fuel Tech Gmbh | Process for the in-line hydrolysis of urea |
JP2017135048A (en) * | 2016-01-29 | 2017-08-03 | 株式会社ホロン | Electron detecting device and electron detecting method |
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