JP2011524986A5 - - Google Patents

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Publication number
JP2011524986A5
JP2011524986A5 JP2011514669A JP2011514669A JP2011524986A5 JP 2011524986 A5 JP2011524986 A5 JP 2011524986A5 JP 2011514669 A JP2011514669 A JP 2011514669A JP 2011514669 A JP2011514669 A JP 2011514669A JP 2011524986 A5 JP2011524986 A5 JP 2011524986A5
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Japan
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JP2011514669A
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English (en)
Japanese (ja)
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JP5586593B2 (ja
JP2011524986A (ja
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Priority claimed from PCT/US2009/045131 external-priority patent/WO2009154953A2/en
Publication of JP2011524986A publication Critical patent/JP2011524986A/ja
Publication of JP2011524986A5 publication Critical patent/JP2011524986A5/ja
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Publication of JP5586593B2 publication Critical patent/JP5586593B2/ja
Expired - Fee Related legal-status Critical Current
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JP2011514669A 2008-06-20 2009-05-26 試料検査方法、システム及び構成要素 Expired - Fee Related JP5586593B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US7438708P 2008-06-20 2008-06-20
US61/074,387 2008-06-20
PCT/US2009/045131 WO2009154953A2 (en) 2008-06-20 2009-05-26 Sample inspection methods, systems and components

Publications (3)

Publication Number Publication Date
JP2011524986A JP2011524986A (ja) 2011-09-08
JP2011524986A5 true JP2011524986A5 (https=) 2012-07-12
JP5586593B2 JP5586593B2 (ja) 2014-09-10

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ID=41066714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011514669A Expired - Fee Related JP5586593B2 (ja) 2008-06-20 2009-05-26 試料検査方法、システム及び構成要素

Country Status (4)

Country Link
US (1) US8669525B2 (https=)
EP (1) EP2288904A2 (https=)
JP (1) JP5586593B2 (https=)
WO (1) WO2009154953A2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5676617B2 (ja) * 2010-08-18 2015-02-25 株式会社日立ハイテクノロジーズ 電子線装置
WO2015118605A1 (ja) * 2014-02-04 2015-08-13 富士通株式会社 材料評価装置及び方法
US20250102451A1 (en) * 2023-09-27 2025-03-27 Fei Company Secondary electron detector for ion beam systems

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3066944B2 (ja) 1993-12-27 2000-07-17 キヤノン株式会社 光電変換装置、その駆動方法及びそれを有するシステム
JPH09298226A (ja) 1996-05-07 1997-11-18 Mitsubishi Electric Corp 半導体用検査装置
US6940084B2 (en) * 2001-07-04 2005-09-06 Fuji Photo Film Co., Ltd. Solid state radiation detector
JP4004842B2 (ja) 2001-08-14 2007-11-07 富士フイルム株式会社 放射線固体検出器
US7511279B2 (en) * 2003-10-16 2009-03-31 Alis Corporation Ion sources, systems and methods
US7601953B2 (en) 2006-03-20 2009-10-13 Alis Corporation Systems and methods for a gas field ion microscope
WO2007067296A2 (en) 2005-12-02 2007-06-14 Alis Corporation Ion sources, systems and methods
WO2009077450A2 (en) * 2007-12-17 2009-06-25 Carl Zeiss Nts Gmbh Scanning charged particle beams

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