JP2009245939A5 - - Google Patents

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Publication number
JP2009245939A5
JP2009245939A5 JP2009057885A JP2009057885A JP2009245939A5 JP 2009245939 A5 JP2009245939 A5 JP 2009245939A5 JP 2009057885 A JP2009057885 A JP 2009057885A JP 2009057885 A JP2009057885 A JP 2009057885A JP 2009245939 A5 JP2009245939 A5 JP 2009245939A5
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JP
Japan
Prior art keywords
electrode
detector
potential
sample
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009057885A
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English (en)
Japanese (ja)
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JP2009245939A (ja
JP5774269B2 (ja
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Publication date
Priority claimed from US12/059,850 external-priority patent/US7791020B2/en
Application filed filed Critical
Publication of JP2009245939A publication Critical patent/JP2009245939A/ja
Publication of JP2009245939A5 publication Critical patent/JP2009245939A5/ja
Application granted granted Critical
Publication of JP5774269B2 publication Critical patent/JP5774269B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009057885A 2008-03-31 2009-03-11 マルチステージ・ガス・カスケード増幅器 Active JP5774269B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/059,850 2008-03-31
US12/059,850 US7791020B2 (en) 2008-03-31 2008-03-31 Multistage gas cascade amplifier

Publications (3)

Publication Number Publication Date
JP2009245939A JP2009245939A (ja) 2009-10-22
JP2009245939A5 true JP2009245939A5 (enExample) 2012-04-19
JP5774269B2 JP5774269B2 (ja) 2015-09-09

Family

ID=40673265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009057885A Active JP5774269B2 (ja) 2008-03-31 2009-03-11 マルチステージ・ガス・カスケード増幅器

Country Status (3)

Country Link
US (1) US7791020B2 (enExample)
EP (1) EP2107591A1 (enExample)
JP (1) JP5774269B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
US9679741B2 (en) * 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system
EP2631929A1 (en) 2012-02-27 2013-08-28 FEI Company A holder assembly for cooperating with an environmental cell and an electron microscope
WO2014022429A1 (en) 2012-07-30 2014-02-06 Fei Company Environmental sem gas injection system
US9633816B2 (en) 2015-05-18 2017-04-25 Fei Company Electron beam microscope with improved imaging gas and method of use
EP3176808B1 (en) * 2015-12-03 2019-10-16 Carl Zeiss Microscopy Ltd. Method for detecting charged particles and particle beam device for carrying out the method
EP3792952B1 (en) * 2019-09-16 2025-02-19 FEI Company Light guide assembly for an electron microscope

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US4823006A (en) * 1987-05-21 1989-04-18 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope
US4785182A (en) * 1987-05-21 1988-11-15 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
US5250808A (en) * 1987-05-21 1993-10-05 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal system for an environmental scanning electron microscope
US4880976A (en) * 1987-05-21 1989-11-14 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
JPS6417367A (en) * 1987-07-10 1989-01-20 Fujitsu Ltd Energy analyzer
JPH02132745A (ja) * 1988-11-11 1990-05-22 Jeol Ltd 荷電粒子線装置
JPH05174768A (ja) 1991-02-26 1993-07-13 Nikon Corp 環境制御型走査電子顕微鏡
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JPH06338282A (ja) * 1993-05-28 1994-12-06 Nikon Corp 走査型電子顕微鏡
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EP0958590B1 (en) * 1997-12-08 2003-06-11 Fei Company Environmental sem with multipole fields for improved secondary electron detection
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WO1999046797A1 (de) * 1998-03-10 1999-09-16 Erik Essers Rasterelektronenmikroskop
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US7009187B2 (en) * 2002-08-08 2006-03-07 Fei Company Particle detector suitable for detecting ions and electrons
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WO2007117397A2 (en) * 2006-03-31 2007-10-18 Fei Company Improved detector for charged particle beam instrument
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JP5075375B2 (ja) * 2006-08-11 2012-11-21 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP5758577B2 (ja) 2007-02-06 2015-08-05 エフ・イ−・アイ・カンパニー 高圧荷電粒子ビーム・システム
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification

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