JP5774269B2 - マルチステージ・ガス・カスケード増幅器 - Google Patents

マルチステージ・ガス・カスケード増幅器 Download PDF

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Publication number
JP5774269B2
JP5774269B2 JP2009057885A JP2009057885A JP5774269B2 JP 5774269 B2 JP5774269 B2 JP 5774269B2 JP 2009057885 A JP2009057885 A JP 2009057885A JP 2009057885 A JP2009057885 A JP 2009057885A JP 5774269 B2 JP5774269 B2 JP 5774269B2
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Prior art keywords
electrode
gas
stage
sample
anode
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Japanese (ja)
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JP2009245939A5 (enExample
JP2009245939A (ja
Inventor
マレク・ウンチョフスキー
ミロス・トス
ウィリアム・ラルフ・ノウレス
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エフ・イ−・アイ・カンパニー
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/06—Proportional counter tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2444—Electron Multiplier
    • H01J2237/24445—Electron Multiplier using avalanche in a gas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Measurement Of Radiation (AREA)
JP2009057885A 2008-03-31 2009-03-11 マルチステージ・ガス・カスケード増幅器 Active JP5774269B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/059,850 2008-03-31
US12/059,850 US7791020B2 (en) 2008-03-31 2008-03-31 Multistage gas cascade amplifier

Publications (3)

Publication Number Publication Date
JP2009245939A JP2009245939A (ja) 2009-10-22
JP2009245939A5 JP2009245939A5 (enExample) 2012-04-19
JP5774269B2 true JP5774269B2 (ja) 2015-09-09

Family

ID=40673265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009057885A Active JP5774269B2 (ja) 2008-03-31 2009-03-11 マルチステージ・ガス・カスケード増幅器

Country Status (3)

Country Link
US (1) US7791020B2 (enExample)
EP (1) EP2107591A1 (enExample)
JP (1) JP5774269B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
US9679741B2 (en) * 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system
EP2631929A1 (en) 2012-02-27 2013-08-28 FEI Company A holder assembly for cooperating with an environmental cell and an electron microscope
WO2014022429A1 (en) 2012-07-30 2014-02-06 Fei Company Environmental sem gas injection system
US9633816B2 (en) 2015-05-18 2017-04-25 Fei Company Electron beam microscope with improved imaging gas and method of use
EP3176808B1 (en) * 2015-12-03 2019-10-16 Carl Zeiss Microscopy Ltd. Method for detecting charged particles and particle beam device for carrying out the method
EP3792952B1 (en) * 2019-09-16 2025-02-19 FEI Company Light guide assembly for an electron microscope

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US4823006A (en) * 1987-05-21 1989-04-18 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope
US4785182A (en) * 1987-05-21 1988-11-15 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
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US4880976A (en) * 1987-05-21 1989-11-14 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
JPS6417367A (en) * 1987-07-10 1989-01-20 Fujitsu Ltd Energy analyzer
JPH02132745A (ja) * 1988-11-11 1990-05-22 Jeol Ltd 荷電粒子線装置
JPH05174768A (ja) 1991-02-26 1993-07-13 Nikon Corp 環境制御型走査電子顕微鏡
US5396067A (en) * 1992-06-11 1995-03-07 Nikon Corporation Scan type electron microscope
JPH06338282A (ja) * 1993-05-28 1994-12-06 Nikon Corp 走査型電子顕微鏡
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5828064A (en) * 1995-08-11 1998-10-27 Philips Electronics North America Corporation Field emission environmental scanning electron microscope
EP0958590B1 (en) * 1997-12-08 2003-06-11 Fei Company Environmental sem with multipole fields for improved secondary electron detection
WO1999030345A1 (en) * 1997-12-08 1999-06-17 Philips Electron Optics B.V. Environmental sem with a magnetic field for improved secondary electron detection
US5945672A (en) * 1998-01-29 1999-08-31 Fei Company Gaseous backscattered electron detector for an environmental scanning electron microscope
WO1999046797A1 (de) * 1998-03-10 1999-09-16 Erik Essers Rasterelektronenmikroskop
WO2001041180A1 (de) * 1999-11-29 2001-06-07 Leo Elektronenmikroskopie Gmbh Detektor für ein rasterelektronenmikroskop mit variablem druck und rasterelektronenmikroskop mit einem solchen detektor
DE50113837D1 (de) * 2000-07-07 2008-05-21 Zeiss Carl Nts Gmbh Detektor für variierende druckbereiche und elektronenmikroskop mit einem entsprechenden detektor
GB2367686B (en) * 2000-08-10 2002-12-11 Leo Electron Microscopy Ltd Improvements in or relating to particle detectors
JP2003346697A (ja) 2002-05-24 2003-12-05 Technex Lab Co Ltd 永久磁石レンズを使用した走査電子顕微鏡
CZ20022105A3 (cs) 2002-06-17 2004-02-18 Tescan, S. R. O. Detektor sekundárních elektronů, zejména v rastrovacím elektronovém mikroskopu
US7009187B2 (en) * 2002-08-08 2006-03-07 Fei Company Particle detector suitable for detecting ions and electrons
KR101015116B1 (ko) * 2002-09-18 2011-02-16 에프이아이 컴파니 하전(荷電) 입자 빔 시스템
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WO2007117397A2 (en) * 2006-03-31 2007-10-18 Fei Company Improved detector for charged particle beam instrument
CN101461026B (zh) 2006-06-07 2012-01-18 Fei公司 与包含真空室的装置一起使用的滑动轴承
JP5075375B2 (ja) * 2006-08-11 2012-11-21 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP5758577B2 (ja) 2007-02-06 2015-08-05 エフ・イ−・アイ・カンパニー 高圧荷電粒子ビーム・システム
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification

Also Published As

Publication number Publication date
JP2009245939A (ja) 2009-10-22
US7791020B2 (en) 2010-09-07
US20090242758A1 (en) 2009-10-01
EP2107591A1 (en) 2009-10-07

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