JP2009212153A5 - - Google Patents

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Publication number
JP2009212153A5
JP2009212153A5 JP2008051114A JP2008051114A JP2009212153A5 JP 2009212153 A5 JP2009212153 A5 JP 2009212153A5 JP 2008051114 A JP2008051114 A JP 2008051114A JP 2008051114 A JP2008051114 A JP 2008051114A JP 2009212153 A5 JP2009212153 A5 JP 2009212153A5
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substrate
mark
correction value
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marks
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JP2008051114A
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English (en)
Japanese (ja)
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JP2009212153A (ja
JP5096965B2 (ja
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Priority claimed from JP2008051114A external-priority patent/JP5096965B2/ja
Priority to JP2008051114A priority Critical patent/JP5096965B2/ja
Application filed filed Critical
Priority to US12/370,827 priority patent/US8390809B2/en
Priority to TW098105140A priority patent/TWI401730B/zh
Priority to KR1020090017252A priority patent/KR101093388B1/ko
Publication of JP2009212153A publication Critical patent/JP2009212153A/ja
Publication of JP2009212153A5 publication Critical patent/JP2009212153A5/ja
Publication of JP5096965B2 publication Critical patent/JP5096965B2/ja
Application granted granted Critical
Priority to US13/759,319 priority patent/US8885164B2/en
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JP2008051114A 2008-02-29 2008-02-29 位置合わせ方法、位置合わせ装置、露光方法及びデバイス製造方法 Active JP5096965B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008051114A JP5096965B2 (ja) 2008-02-29 2008-02-29 位置合わせ方法、位置合わせ装置、露光方法及びデバイス製造方法
US12/370,827 US8390809B2 (en) 2008-02-29 2009-02-13 Exposure method, exposure apparatus, and method of manufacturing device
TW098105140A TWI401730B (zh) 2008-02-29 2009-02-18 曝光方法、曝光設備及製造裝置之方法
KR1020090017252A KR101093388B1 (ko) 2008-02-29 2009-02-27 노광 방법, 노광 장치 및 디바이스 제조 방법
US13/759,319 US8885164B2 (en) 2008-02-29 2013-02-05 Exposure method, exposure apparatus, and method of manufacturing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008051114A JP5096965B2 (ja) 2008-02-29 2008-02-29 位置合わせ方法、位置合わせ装置、露光方法及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2009212153A JP2009212153A (ja) 2009-09-17
JP2009212153A5 true JP2009212153A5 (https=) 2011-04-14
JP5096965B2 JP5096965B2 (ja) 2012-12-12

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JP2008051114A Active JP5096965B2 (ja) 2008-02-29 2008-02-29 位置合わせ方法、位置合わせ装置、露光方法及びデバイス製造方法

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US (2) US8390809B2 (https=)
JP (1) JP5096965B2 (https=)
KR (1) KR101093388B1 (https=)
TW (1) TWI401730B (https=)

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JP6188382B2 (ja) * 2013-04-03 2017-08-30 キヤノン株式会社 インプリント装置および物品の製造方法
JP6465565B2 (ja) * 2014-05-19 2019-02-06 キヤノン株式会社 露光装置、位置合わせ方法およびデバイス製造方法
JP6426984B2 (ja) * 2014-11-18 2018-11-21 キヤノン株式会社 リソグラフィ装置および物品製造方法
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US10216188B2 (en) 2016-07-25 2019-02-26 Amazon Technologies, Inc. Autonomous ground vehicles based at delivery locations
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US10514690B1 (en) 2016-11-15 2019-12-24 Amazon Technologies, Inc. Cooperative autonomous aerial and ground vehicles for item delivery
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US10310500B1 (en) 2016-12-23 2019-06-04 Amazon Technologies, Inc. Automated access to secure facilities using autonomous vehicles
US10308430B1 (en) 2016-12-23 2019-06-04 Amazon Technologies, Inc. Distribution and retrieval of inventory and materials using autonomous vehicles
US10310499B1 (en) 2016-12-23 2019-06-04 Amazon Technologies, Inc. Distributed production of items from locally sourced materials using autonomous vehicles
US10573106B1 (en) 2017-03-22 2020-02-25 Amazon Technologies, Inc. Personal intermediary access device
US10147249B1 (en) 2017-03-22 2018-12-04 Amazon Technologies, Inc. Personal intermediary communication device
US11222299B1 (en) 2017-08-31 2022-01-11 Amazon Technologies, Inc. Indoor deliveries by autonomous vehicles
JP6688273B2 (ja) 2017-11-13 2020-04-28 キヤノン株式会社 リソグラフィ装置、リソグラフィ方法、決定方法及び物品の製造方法
US11392130B1 (en) 2018-12-12 2022-07-19 Amazon Technologies, Inc. Selecting delivery modes and delivery areas using autonomous ground vehicles
US11474530B1 (en) 2019-08-15 2022-10-18 Amazon Technologies, Inc. Semantic navigation of autonomous ground vehicles
WO2021061810A1 (en) 2019-09-26 2021-04-01 Amazon Technologies, Inc. Autonomous home security devices
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JP7523904B2 (ja) * 2019-12-27 2024-07-29 キヤノン株式会社 検査装置および半導体装置の製造方法
JP7834460B2 (ja) * 2021-12-06 2026-03-24 キヤノン株式会社 検出装置、基板処理装置、及び物品の製造方法
US12203773B1 (en) 2022-06-29 2025-01-21 Amazon Technologies, Inc. Visual localization for autonomous ground vehicles
US12280889B1 (en) 2022-06-30 2025-04-22 Amazon Technologies, Inc. Indoor navigation and obstacle avoidance for unmanned aerial vehicles
US12461228B1 (en) 2022-08-29 2025-11-04 Amazon Technologies, Inc. Radar-inertial odometry for autonomous ground vehicles
US12205072B1 (en) 2022-09-13 2025-01-21 Amazon Technologies, Inc. Fulfilling orders for multiple items from multiple sources via multimodal channels
US12346128B1 (en) 2022-09-30 2025-07-01 Amazon Technologies, Inc. Indoor altitude determination for aerial vehicles
US12572153B1 (en) 2022-12-15 2026-03-10 Amazon Technologies, Inc. Route planning for aerial vehicles in indoor spaces
US12202634B1 (en) 2023-03-30 2025-01-21 Amazon Technologies, Inc. Indoor aerial vehicles with advanced safety features
US12479606B1 (en) 2023-03-30 2025-11-25 Amazon Technologies, Inc. Indoor aerial vehicles with advanced safety features
US12205483B1 (en) * 2023-06-26 2025-01-21 Amazon Technologies, Inc. Selecting paths for indoor obstacle avoidance by unmanned aerial vehicles
US12227318B1 (en) 2023-09-28 2025-02-18 Amazon Technologies, Inc. Aerial vehicles with proximity sensors for safety
US12528608B1 (en) * 2024-03-18 2026-01-20 Amazon Technologies, Inc. Docking stations for safely charging aerial vehicles
JP2025169629A (ja) * 2024-05-01 2025-11-14 キヤノン株式会社 基板処理方法、基板処理装置、および物品製造方法
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