JP2009202594A - 寸法変化率が安定的な軟性金属積層板及びその製造方法 - Google Patents
寸法変化率が安定的な軟性金属積層板及びその製造方法 Download PDFInfo
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- JP2009202594A JP2009202594A JP2009040977A JP2009040977A JP2009202594A JP 2009202594 A JP2009202594 A JP 2009202594A JP 2009040977 A JP2009040977 A JP 2009040977A JP 2009040977 A JP2009040977 A JP 2009040977A JP 2009202594 A JP2009202594 A JP 2009202594A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/08—PCBs, i.e. printed circuit boards
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Abstract
【解決手段】高分子フィルム100、タイコート層(tie coat layer)110、金属シード層120、及び金属伝導層130を含む軟性金属積層板において、前記金属伝導層内に含まれた不純物(C及びS)の総含量が0.03%以下であり、前記金属伝導層の集合組織の主方位成分の体積分率が50%以上であり、前記金属伝導層のマクロ結晶粒の割合が10%以下であり、前記高分子フィルムのモジュラスが5.0〜10.5GPaであり、熱膨脹係数(CTE)が11〜18um/m°Cであり、含湿膨張係数(CHE)が5.5〜9.5ppmである。
【選択図】図2
Description
110 タイコート層
120 金属シード層
130 金属伝導層
Claims (7)
- 高分子フィルム、タイコート層、金属シード層、及び金属伝導層を含む軟性金属積層板において、
前記金属伝導層内に含まれた不純物の総含量が0.03%以下であり、前記金属伝導層の集合組織の主方位成分の体積分率が50%以上であり、前記金属伝導層のマクロ結晶粒の割合が10%以下であり、
前記高分子フィルムのモジュラスが5.0〜10.5GPaであり、熱膨脹係数(CTE)が11〜18um/m°Cであり、含湿膨張係数(CHE)が5.5〜9.5ppmであることを特徴とする軟性金属積層板。 - 前記タイコート層は、ニッケル(Ni)、クロム(Cr)、またはこれらの合金からなることを特徴とする請求項1に記載の軟性金属積層板。
- 前記金属シード層及び金属伝導層は銅または銅合金からなることを特徴とする請求項1に記載の軟性金属積層板。
- 前記高分子フィルムはポリイミドからなることを特徴とする請求項1に記載の軟性金属積層板。
- 前記軟性金属積層板はパターン形成後の寸法変化率が0.05%以下であることを特徴とする請求項1に記載の軟性金属積層板。
- 前記軟性金属積層板はパターン形成後の寸法変化率の偏差が0.02%ポイント以下であることを特徴とする請求項1に記載の軟性金属積層板。
- 軟性回路基板に使われる軟性金属積層板の製造方法であって、
(a)モジュラスが5.0〜10.5GPaであり、熱膨脹係数(CTE)が11〜18um/m°Cであり、含湿膨張係数(CHE)が5.5〜9.5ppmである特性を持つ高分子フィルムを用意するステップと、
(b)用意した高分子フィルムの上部にタイコート層を形成するステップと、
(c)タイコート層が形成された高分子フィルムの上部に金属シード層を形成するステップと、
(d)前記金属シード層の上部に、電気メッキ方式で不純物の総含量が0.03%以下であり、集合組織の主方位成分の体積分率が50%以上であり、マクロ結晶粒の割合が10%以下である金属伝導層を形成するステップと、を含む軟性金属積層板の製造方法。
Applications Claiming Priority (2)
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KR10-2008-0018482 | 2008-02-28 | ||
KR1020080018482A KR20090093133A (ko) | 2008-02-28 | 2008-02-28 | 치수변화율이 안정적인 연성금속 적층판 및 그 제조방법 |
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KR20140072409A (ko) * | 2012-12-04 | 2014-06-13 | 도레이첨단소재 주식회사 | 세미 애디티브 연성 구리 박막 적층 필름 및 그 제조 방법 |
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JPH06109753A (ja) * | 1992-09-25 | 1994-04-22 | Fuji Electric Co Ltd | 相回転方向チェッカ |
JPH07197239A (ja) * | 1994-01-07 | 1995-08-01 | Hitachi Chem Co Ltd | 金属張りポリイミドフィルムの製造方法 |
JP2001270040A (ja) * | 2000-03-21 | 2001-10-02 | Ga-Tek Inc Dba Gould Electronics Inc | 接着性が改善されたカッパ・オン・ポリマー構成要素 |
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JP4801750B2 (ja) | 2011-10-26 |
TWI394494B (zh) | 2013-04-21 |
TW200948222A (en) | 2009-11-16 |
KR20090093133A (ko) | 2009-09-02 |
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