JP2009185255A5 - - Google Patents

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Publication number
JP2009185255A5
JP2009185255A5 JP2008029221A JP2008029221A JP2009185255A5 JP 2009185255 A5 JP2009185255 A5 JP 2009185255A5 JP 2008029221 A JP2008029221 A JP 2008029221A JP 2008029221 A JP2008029221 A JP 2008029221A JP 2009185255 A5 JP2009185255 A5 JP 2009185255A5
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JP
Japan
Prior art keywords
mass
halogen atom
parts
relief pattern
polycondensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008029221A
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English (en)
Japanese (ja)
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JP2009185255A (ja
JP5129598B2 (ja
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Publication date
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Priority to JP2008029221A priority Critical patent/JP5129598B2/ja
Priority claimed from JP2008029221A external-priority patent/JP5129598B2/ja
Publication of JP2009185255A publication Critical patent/JP2009185255A/ja
Publication of JP2009185255A5 publication Critical patent/JP2009185255A5/ja
Application granted granted Critical
Publication of JP5129598B2 publication Critical patent/JP5129598B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008029221A 2008-02-08 2008-02-08 重縮合化合物及びポジ型感光性樹脂組成物 Expired - Fee Related JP5129598B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008029221A JP5129598B2 (ja) 2008-02-08 2008-02-08 重縮合化合物及びポジ型感光性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008029221A JP5129598B2 (ja) 2008-02-08 2008-02-08 重縮合化合物及びポジ型感光性樹脂組成物

Publications (3)

Publication Number Publication Date
JP2009185255A JP2009185255A (ja) 2009-08-20
JP2009185255A5 true JP2009185255A5 (xx) 2011-03-17
JP5129598B2 JP5129598B2 (ja) 2013-01-30

Family

ID=41068810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008029221A Expired - Fee Related JP5129598B2 (ja) 2008-02-08 2008-02-08 重縮合化合物及びポジ型感光性樹脂組成物

Country Status (1)

Country Link
JP (1) JP5129598B2 (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7127635B2 (ja) 2017-02-21 2022-08-30 日本ゼオン株式会社 感光性樹脂組成物

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI402296B (zh) * 2009-12-31 2013-07-21 Daxin Materials Corp 聚醯胺酸樹脂與聚亞醯胺樹脂的純化方法
JP2011256219A (ja) * 2010-06-04 2011-12-22 Nippon Kayaku Co Ltd ポリベンゾオキサゾール樹脂及びその前駆体樹脂
JP5953796B2 (ja) * 2012-02-15 2016-07-20 日立化成デュポンマイクロシステムズ株式会社 感光性樹脂組成物、パターン硬化膜の製造方法及び電子部品

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3440832B2 (ja) * 1997-07-14 2003-08-25 東レ株式会社 感光性ポリイミド前駆体組成物
JP2000075478A (ja) * 1998-08-31 2000-03-14 Toray Ind Inc ポジ型感光性樹脂前駆体組成物
JP3449250B2 (ja) * 1998-10-12 2003-09-22 東レ株式会社 感光性樹脂前駆体組成物

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7127635B2 (ja) 2017-02-21 2022-08-30 日本ゼオン株式会社 感光性樹脂組成物

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