JP2009173444A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2009173444A5 JP2009173444A5 JP2008297260A JP2008297260A JP2009173444A5 JP 2009173444 A5 JP2009173444 A5 JP 2009173444A5 JP 2008297260 A JP2008297260 A JP 2008297260A JP 2008297260 A JP2008297260 A JP 2008297260A JP 2009173444 A5 JP2009173444 A5 JP 2009173444A5
- Authority
- JP
- Japan
- Prior art keywords
- roller
- seal belt
- opening
- substrate transfer
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008297260A JP5245757B2 (ja) | 2007-12-27 | 2008-11-20 | 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置 |
KR1020080122220A KR101076481B1 (ko) | 2007-12-27 | 2008-12-04 | 방진 기구를 구비한 기판 반송 장치 및 시스템, 이들을 이용한 반도체 제조 장치 |
TW97148771A TW200944459A (en) | 2007-12-27 | 2008-12-15 | Substrate conveying system and semiconductor manufacturing apparatus using the same |
CN2008101765895A CN101471274B (zh) | 2007-12-27 | 2008-12-25 | 基板搬运系统及利用其的半导体制造装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007336296 | 2007-12-27 | ||
JP2007336296 | 2007-12-27 | ||
JP2008297260A JP5245757B2 (ja) | 2007-12-27 | 2008-11-20 | 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009173444A JP2009173444A (ja) | 2009-08-06 |
JP2009173444A5 true JP2009173444A5 (pl) | 2011-06-23 |
JP5245757B2 JP5245757B2 (ja) | 2013-07-24 |
Family
ID=40828586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008297260A Expired - Fee Related JP5245757B2 (ja) | 2007-12-27 | 2008-11-20 | 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5245757B2 (pl) |
CN (1) | CN101471274B (pl) |
TW (1) | TW200944459A (pl) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5304601B2 (ja) * | 2009-11-10 | 2013-10-02 | 株式会社安川電機 | アーム機構およびそれを備えた真空ロボット |
JP5480605B2 (ja) * | 2009-12-01 | 2014-04-23 | 東京エレクトロン株式会社 | 基板搬送装置および基板処理システム |
KR101477835B1 (ko) * | 2010-07-15 | 2014-12-30 | 현대중공업 주식회사 | 랙-피니언 구동형 로봇용 승강 조립체의 오염 정화 유닛 |
JP2013153108A (ja) * | 2012-01-26 | 2013-08-08 | Yaskawa Electric Corp | 基板位置決め装置 |
JP5663638B2 (ja) * | 2012-10-11 | 2015-02-04 | 株式会社ティーイーエス | 基板移送装置 |
JP6220197B2 (ja) * | 2013-09-09 | 2017-10-25 | 川崎重工業株式会社 | ロボット |
KR101773169B1 (ko) * | 2016-02-12 | 2017-08-31 | 현대로보틱스주식회사 | 기판 반송용 로봇 |
JP6839993B2 (ja) * | 2017-02-09 | 2021-03-10 | 日本電産サンキョー株式会社 | 搬送システム |
CN115818254B (zh) * | 2023-02-16 | 2023-05-02 | 秦皇岛市奥晶玻璃制品有限公司 | 一种电磁屏蔽玻璃加工上料装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04300194A (ja) * | 1991-03-28 | 1992-10-23 | Yamaha Corp | 直動機構の防塵装置 |
JP3113411B2 (ja) * | 1992-03-18 | 2000-11-27 | 東京エレクトロン株式会社 | 洗浄装置 |
JPH08279545A (ja) * | 1995-04-06 | 1996-10-22 | Dainippon Screen Mfg Co Ltd | 基板搬送装置 |
JP2007303523A (ja) * | 2006-05-10 | 2007-11-22 | Nsk Ltd | アクチュエータ |
-
2008
- 2008-11-20 JP JP2008297260A patent/JP5245757B2/ja not_active Expired - Fee Related
- 2008-12-15 TW TW97148771A patent/TW200944459A/zh not_active IP Right Cessation
- 2008-12-25 CN CN2008101765895A patent/CN101471274B/zh not_active Expired - Fee Related
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2009173444A5 (pl) | ||
US7618352B1 (en) | Driving mechanism for treadmill | |
JP2017052655A5 (pl) | ||
JP2008297085A5 (pl) | ||
ATE495990T1 (de) | Papierblatt-ausgabemechanismus | |
JP2015098399A5 (ja) | シート搬送装置及び画像形成装置 | |
JP2012193019A5 (pl) | ||
JP2011063443A5 (pl) | ||
JP6220197B2 (ja) | ロボット | |
JP2014026103A5 (pl) | ||
JP2012240813A5 (pl) | ||
JP2010260663A5 (pl) | ||
JP2011026127A5 (pl) | ||
JP2011184190A5 (pl) | ||
EP2199868A3 (en) | Belt member feeding device and image forming apparatus provided with the same | |
RU2014105468A (ru) | Устройство нагрева изображения | |
JP2009292542A5 (pl) | ||
JP2011148134A5 (pl) | ||
WO2011132139A3 (en) | Taping machine | |
JP2012503580A5 (pl) | ||
JP2008213998A5 (pl) | ||
JP2005298173A5 (pl) | ||
JP2009184808A5 (pl) | ||
JP2017523104A5 (pl) | ||
ITCO20130015A1 (it) | Motorizzazione singola per allineatore rotante di traino per film plastici in bolla ottenuti per estrusione |