JP2009173444A5 - - Google Patents

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Publication number
JP2009173444A5
JP2009173444A5 JP2008297260A JP2008297260A JP2009173444A5 JP 2009173444 A5 JP2009173444 A5 JP 2009173444A5 JP 2008297260 A JP2008297260 A JP 2008297260A JP 2008297260 A JP2008297260 A JP 2008297260A JP 2009173444 A5 JP2009173444 A5 JP 2009173444A5
Authority
JP
Japan
Prior art keywords
roller
seal belt
opening
substrate transfer
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008297260A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009173444A (ja
JP5245757B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008297260A priority Critical patent/JP5245757B2/ja
Priority claimed from JP2008297260A external-priority patent/JP5245757B2/ja
Priority to KR1020080122220A priority patent/KR101076481B1/ko
Priority to TW97148771A priority patent/TW200944459A/zh
Priority to CN2008101765895A priority patent/CN101471274B/zh
Publication of JP2009173444A publication Critical patent/JP2009173444A/ja
Publication of JP2009173444A5 publication Critical patent/JP2009173444A5/ja
Application granted granted Critical
Publication of JP5245757B2 publication Critical patent/JP5245757B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008297260A 2007-12-27 2008-11-20 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置 Expired - Fee Related JP5245757B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008297260A JP5245757B2 (ja) 2007-12-27 2008-11-20 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置
KR1020080122220A KR101076481B1 (ko) 2007-12-27 2008-12-04 방진 기구를 구비한 기판 반송 장치 및 시스템, 이들을 이용한 반도체 제조 장치
TW97148771A TW200944459A (en) 2007-12-27 2008-12-15 Substrate conveying system and semiconductor manufacturing apparatus using the same
CN2008101765895A CN101471274B (zh) 2007-12-27 2008-12-25 基板搬运系统及利用其的半导体制造装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007336296 2007-12-27
JP2007336296 2007-12-27
JP2008297260A JP5245757B2 (ja) 2007-12-27 2008-11-20 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置

Publications (3)

Publication Number Publication Date
JP2009173444A JP2009173444A (ja) 2009-08-06
JP2009173444A5 true JP2009173444A5 (pl) 2011-06-23
JP5245757B2 JP5245757B2 (ja) 2013-07-24

Family

ID=40828586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008297260A Expired - Fee Related JP5245757B2 (ja) 2007-12-27 2008-11-20 防塵機構を備えた基板搬送装置およびシステム、これらを用いた半導体製造装置

Country Status (3)

Country Link
JP (1) JP5245757B2 (pl)
CN (1) CN101471274B (pl)
TW (1) TW200944459A (pl)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5304601B2 (ja) * 2009-11-10 2013-10-02 株式会社安川電機 アーム機構およびそれを備えた真空ロボット
JP5480605B2 (ja) * 2009-12-01 2014-04-23 東京エレクトロン株式会社 基板搬送装置および基板処理システム
KR101477835B1 (ko) * 2010-07-15 2014-12-30 현대중공업 주식회사 랙-피니언 구동형 로봇용 승강 조립체의 오염 정화 유닛
JP2013153108A (ja) * 2012-01-26 2013-08-08 Yaskawa Electric Corp 基板位置決め装置
JP5663638B2 (ja) * 2012-10-11 2015-02-04 株式会社ティーイーエス 基板移送装置
JP6220197B2 (ja) * 2013-09-09 2017-10-25 川崎重工業株式会社 ロボット
KR101773169B1 (ko) * 2016-02-12 2017-08-31 현대로보틱스주식회사 기판 반송용 로봇
JP6839993B2 (ja) * 2017-02-09 2021-03-10 日本電産サンキョー株式会社 搬送システム
CN115818254B (zh) * 2023-02-16 2023-05-02 秦皇岛市奥晶玻璃制品有限公司 一种电磁屏蔽玻璃加工上料装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04300194A (ja) * 1991-03-28 1992-10-23 Yamaha Corp 直動機構の防塵装置
JP3113411B2 (ja) * 1992-03-18 2000-11-27 東京エレクトロン株式会社 洗浄装置
JPH08279545A (ja) * 1995-04-06 1996-10-22 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP2007303523A (ja) * 2006-05-10 2007-11-22 Nsk Ltd アクチュエータ

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