JP2009173444A5 - - Google Patents

Claims (9)

  The arm portion for mounting the substrate is supported and connected to a guide mechanism provided in the support column through a linear opening provided on the outer surface of the support column. And a seal belt that seals the opening and isolates the inside and outside of the column, and even if the support member moves by the guide mechanism, The inside is configured not to be exposed to the outside, and both ends of the seal belt are fixed to the inside of the support column and wound around a roller rotatably supported by the support member so as to seal the opening. A substrate transfer device, which is stretched on the substrate.   The roller includes a first roller disposed at a position where the seal belt is stretched together with one end of the seal belt with a substantially uniform gap with respect to the opening, and the first roller as viewed from the opening. A second roller disposed behind the roller and wound around the first roller so that the seal belt is folded back to one end of the seal belt; A third roller disposed at a certain angle in the longitudinal direction of the support with respect to the two rollers and arranged to fold a seal belt from the second roller toward the opening, and parallel to the third roller and the A fourth roller disposed so that the seal belt is folded back at a certain angle with respect to the longitudinal direction of the opening; and parallel to the fourth roller and opening the seal belt. A fifth roller arranged so as to be folded back to the back side of the section, parallel to the fifth roller and disposed behind the fifth roller, and folding the seal belt in the direction of one end a of the seal belt A sixth roller wound so as to have a fixed angle in the longitudinal direction of the support with respect to the sixth roller, and a seventh roller disposed so as to fold the seal belt from the sixth roller toward the opening. A position where the seal belt is wound around the roller and the seventh roller, and the seal belt is stretched together with the other end of the seal belt with a substantially uniform gap with respect to the opening. The substrate transfer apparatus according to claim 1, further comprising an eighth roller disposed on the substrate. In the first roller to the fourth roller and the fifth roller to the eighth roller, the seal belt is wound spirally so that only one surface of the seal belt is always transferred from the first roller to the eighth roller. The substrate transfer device according to claim 1 , wherein the substrate transfer device is in contact with the substrate. The clearance is a substrate conveying device according to any one of claims 1 to 3, wherein the support member also moves the seal belt and the opening is provided so as not to contact.   The opening includes three openings provided in parallel to each other on the outer surface of the column, and one of the three openings has an output shaft of a drive unit that rotationally drives the support member according to the guide mechanism. 5. The substrate transfer apparatus according to claim 1, wherein the support member connected to the guide mechanism passes through the remaining two openings. 6.   6. The substrate transfer apparatus according to claim 5, wherein the seal belt is provided in each of the three openings.   2. The substrate transfer apparatus according to claim 1, wherein a plurality of the support members are connected to the guide mechanism, and the seal belt is fixed at both ends inside the support column and can be rotated by the plurality of support members, respectively. A substrate transfer apparatus, wherein the substrate transfer apparatus is wound around a roller supported by a roller and stretched so as to seal the opening.   A substrate transfer system comprising: the substrate transfer apparatus according to claim 1; and a controller that controls the substrate transfer apparatus. A semiconductor manufacturing apparatus comprising the substrate transfer system according to claim 8.