JP2009168796A - 一体型3軸場センサおよびその製造方法 - Google Patents
一体型3軸場センサおよびその製造方法 Download PDFInfo
- Publication number
- JP2009168796A JP2009168796A JP2008271064A JP2008271064A JP2009168796A JP 2009168796 A JP2009168796 A JP 2009168796A JP 2008271064 A JP2008271064 A JP 2008271064A JP 2008271064 A JP2008271064 A JP 2008271064A JP 2009168796 A JP2009168796 A JP 2009168796A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- axis
- die
- field
- sensing element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title abstract description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 239000010410 layer Substances 0.000 description 27
- 238000001465 metallisation Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 230000005355 Hall effect Effects 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 229910007637 SnAg Inorganic materials 0.000 description 1
- 229910007116 SnPb Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/0206—Three-component magnetometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0005—Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73257—Bump and wire connectors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Abstract
【解決手段】一体型3軸場センサの例として3軸磁気サンサの例を示す。3軸磁気センサ20はダイ30の一方の平面内(X軸、Y軸)に、1つまたは2つの磁気感知素子32を備え、ダイ30の反対側の平面外(Z軸)に磁気感知素子34を備る。ダイ30は相互接続バンプ38により回路板60に接続し、磁気感知素子32と回路板60はボンディングワイヤ40より接続する。
【選択図】図1
Description
図1は、1つの実施形態に従って形成された3軸磁気センサ20の例を示す図である。センサ20は、ダイ30を含み、ダイ30は、ダイ30の一方の面に平面内(x、y軸)の1つまたは2つの磁気感知素子を備え、また、ダイ30の反対側に、平面外(z軸)の磁気感知素子を備える。これについては素子32および34を参照されたい。平面内の感知素子および平面外の感知素子の例は、米国特許7,126,330号明細書に述べられている。これは参照によりここに統合される。
Claims (3)
- 実質的に平行な第1の面および第2の面を備える基板上の、一体型の多軸の場の感知装置であって、
1つまたはそれ以上の軸に沿った場を感知するための、前記第1の面上に形成された、1つまたはそれ以上の場のセンサ(34)と、
1つまたはそれ以上の軸に沿った場を感知するための、前記第2の面上に形成された、1つまたはそれ以上の場のセンサ(32)と、
前記第1の面を回路板(60)に機械的に結合し、前記第1の面上に形成された対応する1つまたはそれ以上の前記センサを、前記回路板上の部品に電気的に結合するように構成された1つまたはそれ以上の結合装置と、
前記第2の面上の対応する1つまたはそれ以上の前記センサ(32)を、前記回路板上の部品に電気的に結合するように構成された1つまたはそれ以上の装置と、
を有する場の感知装置。 - 請求項1に記載の場の感知装置であって、前記第1の面上に形成された1つまたはそれ以上の前記センサ(34)は、前記第1の面の平面外の場を測定するように構成されたセンサ、または、前記第1の面の平面内の2つの直交する軸の少なくとも一方に沿って場を測定するように構成されたセンサのうちの1つを有する、場の感知装置。
- 請求項1に記載の場の感知装置であって、1つまたはそれ以上の前記結合装置は、伝導性バンプ(38)を有する、場の感知装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/877,537 US7564237B2 (en) | 2007-10-23 | 2007-10-23 | Integrated 3-axis field sensor and fabrication methods |
US11/877,537 | 2007-10-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009168796A true JP2009168796A (ja) | 2009-07-30 |
JP5465861B2 JP5465861B2 (ja) | 2014-04-09 |
Family
ID=40266038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008271064A Active JP5465861B2 (ja) | 2007-10-23 | 2008-10-21 | 一体型3軸場センサおよびその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7564237B2 (ja) |
EP (1) | EP2053415B1 (ja) |
JP (1) | JP5465861B2 (ja) |
KR (1) | KR101501929B1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016100598A (ja) * | 2014-11-24 | 2016-05-30 | マグナチップセミコンダクター有限会社Magnachip Semiconductor Ltd | マグネティックセンサーを有する半導体素子の製造方法 |
WO2018199068A1 (ja) * | 2017-04-25 | 2018-11-01 | コニカミノルタ株式会社 | 磁気センサー |
JP2020101531A (ja) * | 2018-12-24 | 2020-07-02 | クロッカス・テクノロジー・ソシエテ・アノニム | 磁気ストライプを読み取る磁気読み取りセンサ装置及び磁気読み取りセンサを製造する方法 |
JP2021532361A (ja) * | 2018-07-27 | 2021-11-25 | アレグロ・マイクロシステムズ・エルエルシー | Gmr素子の上または下に配置されたtmr素子を有する磁気抵抗アセンブリ |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8390283B2 (en) | 2009-09-25 | 2013-03-05 | Everspin Technologies, Inc. | Three axis magnetic field sensor |
US20110234218A1 (en) * | 2010-03-24 | 2011-09-29 | Matthieu Lagouge | Integrated multi-axis hybrid magnetic field sensor |
US8518734B2 (en) | 2010-03-31 | 2013-08-27 | Everspin Technologies, Inc. | Process integration of a single chip three axis magnetic field sensor |
RU2470410C2 (ru) * | 2010-12-28 | 2012-12-20 | Федеральное Государственное Учреждение "Научно-Производственный Комплекс "Технологический Центр" Московского Государственного Института Электронной Техники" | Способ изготовления микросистемы контроля трех компонент вектора магнитной индукции |
CN102426344B (zh) * | 2011-08-30 | 2013-08-21 | 江苏多维科技有限公司 | 三轴磁场传感器 |
US20130257423A1 (en) * | 2012-04-03 | 2013-10-03 | Isentek Inc. | Hybrid magnetic sensor |
CN104755948B (zh) * | 2012-10-12 | 2018-04-10 | 美新公司 | 单晶三轴磁场传感器 |
RU175590U1 (ru) * | 2017-04-25 | 2017-12-11 | Российская Федерация, от имени которой выступает Федеральное государственное казенное учреждение "Войсковая часть 68240" | Трехосевая микросистема анализа слабых магнитных полей |
CN114114102B (zh) * | 2021-11-18 | 2024-01-23 | 中国人民解放军国防科技大学 | 一体式平面化三轴磁传感器及其应用方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57105977U (ja) * | 1980-12-22 | 1982-06-30 | ||
JPS63150384U (ja) * | 1987-03-24 | 1988-10-04 | ||
JPH01250875A (ja) * | 1988-03-31 | 1989-10-05 | Toshiba Corp | 磁気センサー |
JPH08167747A (ja) * | 1994-12-12 | 1996-06-25 | Hitachi Cable Ltd | ホールセンサ |
JP2000514920A (ja) * | 1996-07-05 | 2000-11-07 | トムソン―セーエスエフ | 薄層磁界センサー |
JP2003161770A (ja) * | 2001-11-27 | 2003-06-06 | Fuji Electric Co Ltd | 磁気検出素子 |
JP2004006752A (ja) * | 2002-03-27 | 2004-01-08 | Yamaha Corp | 磁気センサおよびその製造方法 |
JP2006275764A (ja) * | 2005-03-29 | 2006-10-12 | Yamaha Corp | 3軸磁気センサ |
US20070170533A1 (en) * | 2006-01-20 | 2007-07-26 | Allegro Microsystems, Inc. | Arrangements for an intergrated sensor |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5569544A (en) | 1992-11-16 | 1996-10-29 | Nonvolatile Electronics, Incorporated | Magnetoresistive structure comprising ferromagnetic thin films and intermediate layers of less than 30 angstroms formed of alloys having immiscible components |
US5982178A (en) | 1997-12-18 | 1999-11-09 | Honewell Inc. | Method and apparatus for sensing a desired component of an incident magnetic field using magneto resistive elements biased in different directions |
EP1381875A1 (en) * | 2001-04-09 | 2004-01-21 | Koninklijke Philips Electronics N.V. | Integrated circuit with power supply test interface |
US7095226B2 (en) * | 2003-12-04 | 2006-08-22 | Honeywell International, Inc. | Vertical die chip-on-board |
US7271586B2 (en) * | 2003-12-04 | 2007-09-18 | Honeywell International Inc. | Single package design for 3-axis magnetic sensor |
US7126330B2 (en) * | 2004-06-03 | 2006-10-24 | Honeywell International, Inc. | Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device |
JP4453536B2 (ja) * | 2004-12-10 | 2010-04-21 | トヨタ自動車株式会社 | 駆動装置およびこれを搭載する自動車並びに駆動装置の制御方法 |
-
2007
- 2007-10-23 US US11/877,537 patent/US7564237B2/en active Active
-
2008
- 2008-10-16 EP EP08166849A patent/EP2053415B1/en not_active Expired - Fee Related
- 2008-10-21 JP JP2008271064A patent/JP5465861B2/ja active Active
- 2008-10-22 KR KR1020080103858A patent/KR101501929B1/ko active IP Right Grant
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57105977U (ja) * | 1980-12-22 | 1982-06-30 | ||
JPS63150384U (ja) * | 1987-03-24 | 1988-10-04 | ||
JPH01250875A (ja) * | 1988-03-31 | 1989-10-05 | Toshiba Corp | 磁気センサー |
JPH08167747A (ja) * | 1994-12-12 | 1996-06-25 | Hitachi Cable Ltd | ホールセンサ |
JP2000514920A (ja) * | 1996-07-05 | 2000-11-07 | トムソン―セーエスエフ | 薄層磁界センサー |
JP2003161770A (ja) * | 2001-11-27 | 2003-06-06 | Fuji Electric Co Ltd | 磁気検出素子 |
JP2004006752A (ja) * | 2002-03-27 | 2004-01-08 | Yamaha Corp | 磁気センサおよびその製造方法 |
JP2006275764A (ja) * | 2005-03-29 | 2006-10-12 | Yamaha Corp | 3軸磁気センサ |
US20070170533A1 (en) * | 2006-01-20 | 2007-07-26 | Allegro Microsystems, Inc. | Arrangements for an intergrated sensor |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016100598A (ja) * | 2014-11-24 | 2016-05-30 | マグナチップセミコンダクター有限会社Magnachip Semiconductor Ltd | マグネティックセンサーを有する半導体素子の製造方法 |
WO2018199068A1 (ja) * | 2017-04-25 | 2018-11-01 | コニカミノルタ株式会社 | 磁気センサー |
JPWO2018199068A1 (ja) * | 2017-04-25 | 2020-03-12 | コニカミノルタ株式会社 | 磁気センサー |
US11237227B2 (en) | 2017-04-25 | 2022-02-01 | Konica Minolta, Inc. | Magnetic sensor |
JP7064662B2 (ja) | 2017-04-25 | 2022-05-11 | コニカミノルタ株式会社 | 磁気センサー |
JP2021532361A (ja) * | 2018-07-27 | 2021-11-25 | アレグロ・マイクロシステムズ・エルエルシー | Gmr素子の上または下に配置されたtmr素子を有する磁気抵抗アセンブリ |
JP7366118B2 (ja) | 2018-07-27 | 2023-10-20 | アレグロ・マイクロシステムズ・エルエルシー | Gmr素子の上または下に配置されたtmr素子を有する磁気抵抗アセンブリ |
JP2020101531A (ja) * | 2018-12-24 | 2020-07-02 | クロッカス・テクノロジー・ソシエテ・アノニム | 磁気ストライプを読み取る磁気読み取りセンサ装置及び磁気読み取りセンサを製造する方法 |
JP7498385B2 (ja) | 2018-12-24 | 2024-06-12 | アレグロ・マイクロシステムズ・リミテッド・ライアビリティ・カンパニー | 磁気ストライプを読み取る磁気読み取りセンサ装置及び磁気読み取りセンサを製造する方法 |
Also Published As
Publication number | Publication date |
---|---|
KR101501929B1 (ko) | 2015-03-12 |
JP5465861B2 (ja) | 2014-04-09 |
EP2053415A3 (en) | 2010-10-06 |
EP2053415B1 (en) | 2011-06-29 |
EP2053415A2 (en) | 2009-04-29 |
US7564237B2 (en) | 2009-07-21 |
US20090102475A1 (en) | 2009-04-23 |
KR20090041344A (ko) | 2009-04-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5465861B2 (ja) | 一体型3軸場センサおよびその製造方法 | |
US7126330B2 (en) | Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device | |
US7095226B2 (en) | Vertical die chip-on-board | |
EP2752676B1 (en) | Triaxial magnetic field sensor | |
JP5157611B2 (ja) | 磁気センサ及びその製造方法 | |
US8742520B2 (en) | Three axis magnetic sensor device and method | |
TWI497097B (zh) | 三軸磁場感測器 | |
US20190101602A1 (en) | Magnetic field sensing apparatus | |
JP2015520840A (ja) | 折り畳み式基板 | |
JP2007240530A (ja) | 動きセンサ | |
KR20150102052A (ko) | 자기 센서 장치, 자기 감응 방법 및 그 제조 방법 | |
US8459112B2 (en) | Systems and methods for three dimensional sensors | |
CN111044951B (zh) | 三轴磁场传感器及其制造方法 | |
JP2010210348A (ja) | 磁気センサ素子の検査方法および磁気センサウエハ | |
RU2470410C2 (ru) | Способ изготовления микросистемы контроля трех компонент вектора магнитной индукции | |
JP2009294234A (ja) | 絶対位置検出方法、回転角度検出方法、及び絶対位置検出構造 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20111021 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120621 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120827 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130109 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130819 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20131118 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131119 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20131121 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131225 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140123 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5465861 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |