JP2009128899A - 光基板製造方法 - Google Patents
光基板製造方法 Download PDFInfo
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- JP2009128899A JP2009128899A JP2008112528A JP2008112528A JP2009128899A JP 2009128899 A JP2009128899 A JP 2009128899A JP 2008112528 A JP2008112528 A JP 2008112528A JP 2008112528 A JP2008112528 A JP 2008112528A JP 2009128899 A JP2009128899 A JP 2009128899A
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- Prior art keywords
- optical waveguide
- optical
- layer
- core layer
- waveguide core
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0274—Optical details, e.g. printed circuits comprising integral optical means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
【解決手段】本発明による光基板製造方法は、(a)第1光導波路クラッド層の上面に光導波路コア層を積層する段階と、(b)レーザーをマスクで回折させて前記光導波路コア層の一部を除去することにより傾斜面を形成する段階と、(c)前記傾斜面に反射層を積層する段階と、を含むことを特徴とする。
【選択図】図6
Description
11 金属板
12 第1光導波路クラッド層
13 光導波路コア層
14 傾斜面
15 マスク
16 レーザー装置
17 反射層
18 第2光導波路クラッド層
19 回路パターン
Claims (6)
- (a)第1光導波路クラッド層の上面に光導波路コア層を積層する段階と、
(b)レーザーをマスクで回折させて前記光導波路コア層の一部を除去することにより、傾斜面を形成する段階と、
(c)前記傾斜面に反射層を積層する段階と、
を含む光基板製造方法。 - 前記(c)段階の以後に、
(d)前記光導波路コア層を取り囲むように第2光導波路クラッド層を積層する段階をさらに含む請求項1に記載の光基板製造方法。 - 前記(d)段階の以後に、
(e)前記第1及び第2光導波路クラッド層に回路パターンを形成する段階をさらに含む請求項2に記載の光基板製造方法。 - (f)光導波路コア層を光導波路クラッド層で取り囲む段階と、
(g)レーザーをマスクで回折させて前記光導波路クラッドの一部及び前記光導波路コア層の一部を除去することにより、傾斜面を形成する段階と、
(h)前記傾斜面に反射層を積層する段階と、
を含む光基板製造方法。 - 前記(h)段階の以後に、
(i)前記光導波路クラッドの一部及び前記光導波路コア層の一部が除去された部分に充填材を充填する段階をさらに含む請求項4に記載の光基板製造方法。 - 前記(i)段階の以後に、
前記光導波路クラッド層の表面に回路パターンを形成する段階をさらに含む請求項5に記載の光基板製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070121690A KR20090054812A (ko) | 2007-11-27 | 2007-11-27 | 광기판 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009128899A true JP2009128899A (ja) | 2009-06-11 |
JP4635234B2 JP4635234B2 (ja) | 2011-02-23 |
Family
ID=40668585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008112528A Expired - Fee Related JP4635234B2 (ja) | 2007-11-27 | 2008-04-23 | 光基板製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20090133444A1 (ja) |
JP (1) | JP4635234B2 (ja) |
KR (1) | KR20090054812A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103926647A (zh) * | 2013-01-11 | 2014-07-16 | 上海美维科技有限公司 | 一种含有锥形光波导的印制线路板的制造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4969379B2 (ja) * | 2007-09-14 | 2012-07-04 | 新光電気工業株式会社 | 光導波路搭載基板及びその製造方法 |
JP2009069668A (ja) * | 2007-09-14 | 2009-04-02 | Shinko Electric Ind Co Ltd | 光導波路搭載基板及びその製造方法 |
CN103763855B (zh) * | 2014-01-28 | 2016-08-24 | 华进半导体封装先导技术研发中心有限公司 | 光电印制板及其制作方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05341144A (ja) * | 1992-06-11 | 1993-12-24 | Hitachi Cable Ltd | レーザ装置 |
JPH06265738A (ja) * | 1993-03-17 | 1994-09-22 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路端部ミラーの形成方法 |
JPH11271549A (ja) * | 1998-03-23 | 1999-10-08 | Univ Shizuoka | 面外分岐ミラーを有する光集積回路の製造方法 |
JP2002228867A (ja) * | 2001-01-31 | 2002-08-14 | Fujikura Ltd | 光導波路の製造方法 |
JP2005062557A (ja) * | 2003-08-15 | 2005-03-10 | Canon Inc | 光素子装置、それを用いた二次元光導波路素子及び光電融合配線基板 |
KR20060118647A (ko) * | 2005-05-16 | 2006-11-24 | 삼성전기주식회사 | 광도파로 제조방법, 상기 광도파로를 포함하는 광전기인쇄회로기판 및 그 제조방법 |
JP2007219143A (ja) * | 2006-02-16 | 2007-08-30 | Sumitomo Bakelite Co Ltd | 光導波路構造体および電子機器 |
-
2007
- 2007-11-27 KR KR1020070121690A patent/KR20090054812A/ko not_active Application Discontinuation
-
2008
- 2008-04-23 JP JP2008112528A patent/JP4635234B2/ja not_active Expired - Fee Related
- 2008-05-02 US US12/149,517 patent/US20090133444A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05341144A (ja) * | 1992-06-11 | 1993-12-24 | Hitachi Cable Ltd | レーザ装置 |
JPH06265738A (ja) * | 1993-03-17 | 1994-09-22 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路端部ミラーの形成方法 |
JPH11271549A (ja) * | 1998-03-23 | 1999-10-08 | Univ Shizuoka | 面外分岐ミラーを有する光集積回路の製造方法 |
JP2002228867A (ja) * | 2001-01-31 | 2002-08-14 | Fujikura Ltd | 光導波路の製造方法 |
JP2005062557A (ja) * | 2003-08-15 | 2005-03-10 | Canon Inc | 光素子装置、それを用いた二次元光導波路素子及び光電融合配線基板 |
KR20060118647A (ko) * | 2005-05-16 | 2006-11-24 | 삼성전기주식회사 | 광도파로 제조방법, 상기 광도파로를 포함하는 광전기인쇄회로기판 및 그 제조방법 |
JP2007219143A (ja) * | 2006-02-16 | 2007-08-30 | Sumitomo Bakelite Co Ltd | 光導波路構造体および電子機器 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103926647A (zh) * | 2013-01-11 | 2014-07-16 | 上海美维科技有限公司 | 一种含有锥形光波导的印制线路板的制造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20090054812A (ko) | 2009-06-01 |
JP4635234B2 (ja) | 2011-02-23 |
US20090133444A1 (en) | 2009-05-28 |
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