JP2009100076A - 圧電振動片 - Google Patents

圧電振動片 Download PDF

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Publication number
JP2009100076A
JP2009100076A JP2007267478A JP2007267478A JP2009100076A JP 2009100076 A JP2009100076 A JP 2009100076A JP 2007267478 A JP2007267478 A JP 2007267478A JP 2007267478 A JP2007267478 A JP 2007267478A JP 2009100076 A JP2009100076 A JP 2009100076A
Authority
JP
Japan
Prior art keywords
thin film
lower electrode
piezoelectric thin
piezoelectric
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007267478A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009100076A5 (zh
Inventor
Takashi Yamazaki
隆 山崎
Makoto Furuhata
誠 古畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Miyazaki Epson Corp
Original Assignee
Seiko Epson Corp
Miyazaki Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Miyazaki Epson Corp filed Critical Seiko Epson Corp
Priority to JP2007267478A priority Critical patent/JP2009100076A/ja
Publication of JP2009100076A publication Critical patent/JP2009100076A/ja
Publication of JP2009100076A5 publication Critical patent/JP2009100076A5/ja
Withdrawn legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2007267478A 2007-10-15 2007-10-15 圧電振動片 Withdrawn JP2009100076A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007267478A JP2009100076A (ja) 2007-10-15 2007-10-15 圧電振動片

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007267478A JP2009100076A (ja) 2007-10-15 2007-10-15 圧電振動片

Publications (2)

Publication Number Publication Date
JP2009100076A true JP2009100076A (ja) 2009-05-07
JP2009100076A5 JP2009100076A5 (zh) 2010-10-28

Family

ID=40702697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007267478A Withdrawn JP2009100076A (ja) 2007-10-15 2007-10-15 圧電振動片

Country Status (1)

Country Link
JP (1) JP2009100076A (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013178179A (ja) * 2012-02-28 2013-09-09 Seiko Epson Corp センサー素子、センサーデバイスおよび電子機器
JPWO2015111503A1 (ja) * 2014-01-24 2017-03-23 株式会社村田製作所 圧電振動子及び圧電振動装置
US11538981B2 (en) 2019-06-26 2022-12-27 Seiko Epson Corporation Vibration element, electronic apparatus, and vehicle

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013178179A (ja) * 2012-02-28 2013-09-09 Seiko Epson Corp センサー素子、センサーデバイスおよび電子機器
CN103292797A (zh) * 2012-02-28 2013-09-11 精工爱普生株式会社 传感器元件、传感器器件以及电子设备
JPWO2015111503A1 (ja) * 2014-01-24 2017-03-23 株式会社村田製作所 圧電振動子及び圧電振動装置
US11538981B2 (en) 2019-06-26 2022-12-27 Seiko Epson Corporation Vibration element, electronic apparatus, and vehicle

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