JP2009100076A5 - - Google Patents
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- Publication number
- JP2009100076A5 JP2009100076A5 JP2007267478A JP2007267478A JP2009100076A5 JP 2009100076 A5 JP2009100076 A5 JP 2009100076A5 JP 2007267478 A JP2007267478 A JP 2007267478A JP 2007267478 A JP2007267478 A JP 2007267478A JP 2009100076 A5 JP2009100076 A5 JP 2009100076A5
- Authority
- JP
- Japan
- Prior art keywords
- lower electrode
- thin film
- piezoelectric thin
- piezoelectric
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010409 thin film Substances 0.000 claims 15
- 235000014676 Phragmites communis Nutrition 0.000 claims 3
- 230000010287 polarization Effects 0.000 claims 3
- 238000005452 bending Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007267478A JP2009100076A (ja) | 2007-10-15 | 2007-10-15 | 圧電振動片 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007267478A JP2009100076A (ja) | 2007-10-15 | 2007-10-15 | 圧電振動片 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009100076A JP2009100076A (ja) | 2009-05-07 |
| JP2009100076A5 true JP2009100076A5 (zh) | 2010-10-28 |
Family
ID=40702697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007267478A Withdrawn JP2009100076A (ja) | 2007-10-15 | 2007-10-15 | 圧電振動片 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009100076A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013178179A (ja) * | 2012-02-28 | 2013-09-09 | Seiko Epson Corp | センサー素子、センサーデバイスおよび電子機器 |
| CN105874710B (zh) * | 2014-01-24 | 2018-09-18 | 株式会社村田制作所 | 压电振子以及压电振动装置 |
| JP2021005783A (ja) | 2019-06-26 | 2021-01-14 | セイコーエプソン株式会社 | 振動片、電子機器、および移動体 |
-
2007
- 2007-10-15 JP JP2007267478A patent/JP2009100076A/ja not_active Withdrawn
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