JP2009088406A - 太陽電池及びその製造方法 - Google Patents
太陽電池及びその製造方法 Download PDFInfo
- Publication number
- JP2009088406A JP2009088406A JP2007259023A JP2007259023A JP2009088406A JP 2009088406 A JP2009088406 A JP 2009088406A JP 2007259023 A JP2007259023 A JP 2007259023A JP 2007259023 A JP2007259023 A JP 2007259023A JP 2009088406 A JP2009088406 A JP 2009088406A
- Authority
- JP
- Japan
- Prior art keywords
- main surface
- hole
- electrode
- conductive material
- photoelectric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 239000004020 conductor Substances 0.000 claims abstract description 58
- 238000006243 chemical reaction Methods 0.000 claims description 56
- 238000000034 method Methods 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 24
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 229910021417 amorphous silicon Inorganic materials 0.000 description 7
- 239000000969 carrier Substances 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 238000009751 slip forming Methods 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001709 polysilazane Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
- H01L31/02245—Electrode arrangements specially adapted for back-contact solar cells for metallisation wrap-through [MWT] type solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sustainable Development (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
【解決手段】本発明の太陽電池の製造方法によれば、貫通孔8に導電性材料5aを充填する際支持体4を用いるため、充填不足の発生を抑制することが可能となり、信頼性を高めた太陽電池の製造方法を提供することが可能となる。また、本発明の太陽電池によれば、貫通孔8上に接続電極6bを配する際、平坦面51を提供することが可能となるので、接続の信頼性を高めることができる。
【選択図】図3
Description
(太陽電池)
本発明に係る太陽電池1について、図1乃至図3を参照して説明する。
(太陽電池の製造方法)
以下に、本発明の一実施形態に係る太陽電池の製造方法について、図4及び図5に示す工程別の断面図を参照して説明する。
本実施形態による太陽電池の製造方法によれば、支持体4を用い貫通孔8に導電性材料5aで充填することで、充填時又は充填後に貫通孔8から導電性材料5aの一部又は全部が抜けることを防ぐ。また、硬化後に支持体4を剥離するため、支持体4に導電性材料が付着し貫通孔8の支持体4側で導電性材料5aの充填不良が発生する確率を低減することが可能となる。
(その他の実施形態)
本実施形態では、単結晶シリコン基板2aの両面に凹凸構造を形成したが、第1主面又は第2主面のどちらかのみにテクスチャ構造を備えてもよい。この際、支持体4はテクスチャ構造を有する側に配する。
2 光電変換部
2a 単結晶シリコン基板
2b 第1積層膜
2c 第2積層膜
3 絶縁膜
4 支持体
5 スルーホール電極
5a 導電性材料
6a 第1主面側集電電極
6b 第1主面用接続電極
7a 第2主面側集電電極
7b 第2主面側接続電極
8 貫通孔
10 熱ヒーター
Claims (6)
- 一主面に凹凸構造を有し、前記一主面から他主面に貫通する複数の貫通孔を有する光電変換部を形成する工程と、
前記一主面上に、前記凹凸構造における凸部と直接又は間接に接するように、前記複数の貫通孔を覆う支持体を配する工程と、
前記他主面側から前記貫通孔内及び前記貫通孔周縁部の凹部に導電性材料を充填する工程と、
前記一主面上及び前記他主面における貫通孔の開口部を覆う位置に第一の極性用の電極を形成する工程と、
前記一主面上又は他主面上の一方に、前記第二の極性用の電極を形成する工程とを有する太陽電池の製造方法。 - 前記一主面と前記支持体の間に形成される隙間から、前記導電性材料を前記一主面上にはみ出させることを特徴とする請求項1記載の太陽電池の製造方法。
- 前記支持体が前記一主面側に略平坦な表面を有し、前記導電性材料の前記一主面側の表面に前記支持体の表面形状に対応して略平坦な形状を形成する請求項1又は2記載の太陽電池の製造方法。
- 一主面に凹凸構造を有すると共に、前記一主面から他主面に貫通する複数の貫通孔を有する光電変換部と、
前記複数の貫通孔に充填された導電性材料と、
前記一主面上及び前記他主面上に前記導電性材料と電気的に接続して配された、第一の極性用の電極と、
前記一主面上に、前記第一の極性用の電極と電気的に絶縁されて配された、第二の極性用の電極と、を備え、
前記導電性材料の前記一主面側の表面は、前記一主面の凹凸構造よりも平坦な平坦面を有し、
前記第一主面上に配された前記第一の極性用の電極は、前記平坦面上に配されていることを特徴とする太陽電池。 - 前記導電性材料は、前記貫通孔の内壁面から前記光電変換部の前記一主面に跨って形成されていることを特徴とする請求項4記載の太陽電池。
- 前記導電性材料は、前記一主面における前記貫通孔の開口部近傍において、前記凹凸構造の凹部に充填されていることを特徴とする請求項4又は5記載の太陽電池。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007259023A JP2009088406A (ja) | 2007-10-02 | 2007-10-02 | 太陽電池及びその製造方法 |
US12/204,859 US8258397B2 (en) | 2007-10-02 | 2008-09-05 | Solar cell and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007259023A JP2009088406A (ja) | 2007-10-02 | 2007-10-02 | 太陽電池及びその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009088406A true JP2009088406A (ja) | 2009-04-23 |
Family
ID=40506822
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007259023A Pending JP2009088406A (ja) | 2007-10-02 | 2007-10-02 | 太陽電池及びその製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8258397B2 (ja) |
JP (1) | JP2009088406A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8916410B2 (en) | 2011-05-27 | 2014-12-23 | Csi Cells Co., Ltd | Methods of manufacturing light to current converter devices |
US9153713B2 (en) | 2011-04-02 | 2015-10-06 | Csi Cells Co., Ltd | Solar cell modules and methods of manufacturing the same |
KR101563412B1 (ko) | 2011-04-04 | 2015-10-26 | 미쓰비시덴키 가부시키가이샤 | 태양전지 및 그 제조 방법, 태양전지 모듈 |
KR101823709B1 (ko) * | 2010-05-11 | 2018-02-01 | 쉬티흐틴크 에네르지온데르조크 센트룸 네델란드 | 태양전지 및 그 태양전지의 제조방법 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120211049A1 (en) * | 2009-10-26 | 2012-08-23 | Kyocera Corporation | Solar cell element and solar cell module |
US8115097B2 (en) | 2009-11-19 | 2012-02-14 | International Business Machines Corporation | Grid-line-free contact for a photovoltaic cell |
NL2004310C2 (en) * | 2010-02-26 | 2011-08-30 | Stichting Energie | Method of fabrication of a back-contacted photovoltaic cell, and back-contacted photovoltaic cell made by such a method. |
JPWO2011132707A1 (ja) * | 2010-04-20 | 2013-07-18 | 京セラ株式会社 | 太陽電池素子およびそれを用いた太陽電池モジュール |
CN102800744A (zh) * | 2011-05-27 | 2012-11-28 | 苏州阿特斯阳光电力科技有限公司 | 背接触晶体硅太阳能电池片制造方法 |
DE102011051307A1 (de) * | 2011-06-24 | 2012-12-27 | Rena Gmbh | Verfahren zur Herstellung durchkontaktierter Solarzellen |
TWI563673B (en) * | 2011-10-14 | 2016-12-21 | Au Optronics Corp | Photovoltaic package |
JP6506837B2 (ja) * | 2015-03-31 | 2019-04-24 | 株式会社カネカ | 光電変換装置および光電変換モジュール |
US11908958B2 (en) * | 2016-12-30 | 2024-02-20 | Maxeon Solar Pte. Ltd. | Metallization structures for solar cells |
CN113035998A (zh) * | 2021-02-08 | 2021-06-25 | 江苏日托光伏科技股份有限公司 | 一种mwt电池正负电极点丝网印刷方式 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04223378A (ja) * | 1990-12-25 | 1992-08-13 | Sharp Corp | 太陽電池 |
JP2002500825A (ja) * | 1997-05-30 | 2002-01-08 | アンテルユニヴェルシテール・ミクロ−エレクトロニカ・サントリュム・ヴェー・ゼッド・ドゥブルヴェ | 太陽電池及びその製造方法 |
JP2005136081A (ja) * | 2003-10-29 | 2005-05-26 | Sharp Corp | 太陽電池の製造方法 |
JP2006216841A (ja) * | 2005-02-04 | 2006-08-17 | Toyota Motor Corp | 光電変換素子 |
JP2007525008A (ja) * | 2003-06-26 | 2007-08-30 | アドベント ソーラー,インク. | 内蔵導電性バイアを有するバックコンタクト型太陽電池及びその製造方法 |
JP2007311425A (ja) * | 2006-05-16 | 2007-11-29 | Nippon Telegr & Teleph Corp <Ntt> | 太陽電池の製造方法および太陽電池 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3903427A (en) * | 1973-12-28 | 1975-09-02 | Hughes Aircraft Co | Solar cell connections |
JP3719632B2 (ja) * | 1998-12-17 | 2005-11-24 | 三菱電機株式会社 | シリコン太陽電池の製造方法 |
US7595220B2 (en) * | 2007-06-29 | 2009-09-29 | Visera Technologies Company Limited | Image sensor package and fabrication method thereof |
-
2007
- 2007-10-02 JP JP2007259023A patent/JP2009088406A/ja active Pending
-
2008
- 2008-09-05 US US12/204,859 patent/US8258397B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04223378A (ja) * | 1990-12-25 | 1992-08-13 | Sharp Corp | 太陽電池 |
JP2002500825A (ja) * | 1997-05-30 | 2002-01-08 | アンテルユニヴェルシテール・ミクロ−エレクトロニカ・サントリュム・ヴェー・ゼッド・ドゥブルヴェ | 太陽電池及びその製造方法 |
JP2007525008A (ja) * | 2003-06-26 | 2007-08-30 | アドベント ソーラー,インク. | 内蔵導電性バイアを有するバックコンタクト型太陽電池及びその製造方法 |
JP2005136081A (ja) * | 2003-10-29 | 2005-05-26 | Sharp Corp | 太陽電池の製造方法 |
JP2006216841A (ja) * | 2005-02-04 | 2006-08-17 | Toyota Motor Corp | 光電変換素子 |
JP2007311425A (ja) * | 2006-05-16 | 2007-11-29 | Nippon Telegr & Teleph Corp <Ntt> | 太陽電池の製造方法および太陽電池 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101823709B1 (ko) * | 2010-05-11 | 2018-02-01 | 쉬티흐틴크 에네르지온데르조크 센트룸 네델란드 | 태양전지 및 그 태양전지의 제조방법 |
US9153713B2 (en) | 2011-04-02 | 2015-10-06 | Csi Cells Co., Ltd | Solar cell modules and methods of manufacturing the same |
KR101563412B1 (ko) | 2011-04-04 | 2015-10-26 | 미쓰비시덴키 가부시키가이샤 | 태양전지 및 그 제조 방법, 태양전지 모듈 |
US9490375B2 (en) | 2011-04-04 | 2016-11-08 | Mitsubishi Electric Corporation | Solar cell and method for manufacturing the same, and solar cell module |
US8916410B2 (en) | 2011-05-27 | 2014-12-23 | Csi Cells Co., Ltd | Methods of manufacturing light to current converter devices |
US9209342B2 (en) | 2011-05-27 | 2015-12-08 | Csi Cells Co., Ltd | Methods of manufacturing light to current converter devices |
US9281435B2 (en) | 2011-05-27 | 2016-03-08 | Csi Cells Co., Ltd | Light to current converter devices and methods of manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
US20090084437A1 (en) | 2009-04-02 |
US8258397B2 (en) | 2012-09-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2009088406A (ja) | 太陽電池及びその製造方法 | |
JP6837036B2 (ja) | ベース拡散エリアを小さくした太陽電池および該製造方法 | |
JP2008294080A (ja) | 太陽電池セル及び太陽電池セルの製造方法 | |
JP2009135338A (ja) | 太陽電池及び太陽電池の製造方法 | |
JP2012522393A (ja) | 太陽光発電装置及びその製造方法 | |
JP5335140B2 (ja) | 印刷版および該印刷版を用いた太陽電池素子の製造方法 | |
US20130269774A1 (en) | Electrode of solar cell | |
JP2010283201A (ja) | 太陽電池セル、配線シート付き太陽電池セルおよび太陽電池モジュール | |
JP2013120863A (ja) | 太陽電池の製造方法 | |
TW201523909A (zh) | 用於製造太陽能電池裝置背側觸點的方法和太陽能電池裝置 | |
JP2010050350A (ja) | 太陽電池モジュール及び太陽電池 | |
JP2010251343A (ja) | 太陽電池およびその製造方法 | |
JP2010080578A (ja) | 光電変換素子およびその製造方法 | |
KR20140143279A (ko) | 태양 전지 | |
JP2010080885A (ja) | 太陽電池の製造方法 | |
JP2009182260A (ja) | 太陽電池 | |
KR101198430B1 (ko) | 양면 수광형 국부화 에미터 태양전지 및 그 제조 방법 | |
TW201442260A (zh) | 太陽能電池及其製造方法 | |
JP2018092982A (ja) | 太陽電池の製造方法 | |
JP2009212396A (ja) | 太陽電池モジュール及びその製造方法 | |
KR20110001792A (ko) | 태양전지 및 이의 제조방법 | |
JP2005260158A (ja) | 太陽電池モジュール | |
KR20200017007A (ko) | 2이상의 태양전지 셀을 포함하는 태양전지 셀 스트링 및 그의 제조방법 | |
JP2014056875A (ja) | 光電変換素子および光電変換素子の製造方法 | |
JP5452535B2 (ja) | 太陽電池の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100929 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110831 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20111116 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20111130 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130219 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20130628 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20130827 |