JP2009080069A5 - - Google Patents

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Publication number
JP2009080069A5
JP2009080069A5 JP2007250785A JP2007250785A JP2009080069A5 JP 2009080069 A5 JP2009080069 A5 JP 2009080069A5 JP 2007250785 A JP2007250785 A JP 2007250785A JP 2007250785 A JP2007250785 A JP 2007250785A JP 2009080069 A5 JP2009080069 A5 JP 2009080069A5
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JP
Japan
Prior art keywords
acceleration sensor
base
arm
main
vibration arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007250785A
Other languages
English (en)
Japanese (ja)
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JP2009080069A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007250785A priority Critical patent/JP2009080069A/ja
Priority claimed from JP2007250785A external-priority patent/JP2009080069A/ja
Publication of JP2009080069A publication Critical patent/JP2009080069A/ja
Publication of JP2009080069A5 publication Critical patent/JP2009080069A5/ja
Withdrawn legal-status Critical Current

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JP2007250785A 2007-09-27 2007-09-27 加速度センサ、荷重センサ Withdrawn JP2009080069A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007250785A JP2009080069A (ja) 2007-09-27 2007-09-27 加速度センサ、荷重センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007250785A JP2009080069A (ja) 2007-09-27 2007-09-27 加速度センサ、荷重センサ

Publications (2)

Publication Number Publication Date
JP2009080069A JP2009080069A (ja) 2009-04-16
JP2009080069A5 true JP2009080069A5 (cg-RX-API-DMAC7.html) 2010-10-14

Family

ID=40654914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007250785A Withdrawn JP2009080069A (ja) 2007-09-27 2007-09-27 加速度センサ、荷重センサ

Country Status (1)

Country Link
JP (1) JP2009080069A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5341807B2 (ja) * 2010-03-26 2013-11-13 株式会社東芝 加速度センサ
JP6796508B2 (ja) * 2017-02-11 2020-12-09 新光電子株式会社 音叉振動子を備える荷重検出センサー
JP7397782B2 (ja) * 2020-11-05 2023-12-13 株式会社東芝 センサ及び電子装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596370B2 (ja) * 1979-05-11 1984-02-10 横河電機株式会社 力変換機構
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
CH687103A5 (de) * 1993-08-20 1996-09-13 Mettler Toledo Ag Flache einstueckige Messaite mit zwei Knoten zur Weg- oder Kraftmessung.
JP2004251702A (ja) * 2003-02-19 2004-09-09 Matsushita Electric Ind Co Ltd 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサおよび振動型圧電加速度センサ装置
JP2005140516A (ja) * 2003-11-04 2005-06-02 Matsushita Electric Ind Co Ltd 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ

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