JP2009080069A5 - - Google Patents
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- Publication number
- JP2009080069A5 JP2009080069A5 JP2007250785A JP2007250785A JP2009080069A5 JP 2009080069 A5 JP2009080069 A5 JP 2009080069A5 JP 2007250785 A JP2007250785 A JP 2007250785A JP 2007250785 A JP2007250785 A JP 2007250785A JP 2009080069 A5 JP2009080069 A5 JP 2009080069A5
- Authority
- JP
- Japan
- Prior art keywords
- acceleration sensor
- base
- arm
- main
- vibration arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000001133 acceleration Effects 0.000 claims 5
Claims (3)
前記支持部にヒンジを介して接続された可動質量部と、
前記可動質量部の外側に設けられた振動体と、を有し、
前記支持部は、支持部基部を有し、
前記可動質量部は、前記支持部とは反対側の端部に質量部基部を有し、
前記振動体は、前記支持部基部と前記質量部基部との間に橋渡しされた主振動腕と、前記支持部基部及び前記質量部基部のそれぞれから前記主振動腕に並んで延在され且つ一端が浮いた副振動腕と、少なくとも前記主振動腕に設けられた励振手段と、を有したことを特徴とする加速度センサ。 A support part;
A movable mass connected to the support via a hinge;
A vibrating body provided outside the movable mass portion,
The support part has a support part base part,
The movable mass part has a mass part base at an end opposite to the support part,
The vibrating body includes a main vibrating arm that is bridged between the supporting portion base and the mass portion base, and extends from the supporting portion base and the mass portion base alongside the main vibrating arm and has one end. an acceleration sensor, wherein the auxiliary vibration arm is floating, that had a exciting means provided on at least the main vibration arms.
前記主振動腕と前記副振動腕の共振周波数が一致していることを特徴とする加速度センサ。 The acceleration sensor according to claim 1,
An acceleration sensor characterized in that resonance frequencies of the main vibration arm and the sub vibration arm coincide with each other .
前記主振動腕は、前記可動質量部と前記副振動腕との間に設けられたことを特徴とする加速度センサ。 The acceleration sensor according to claim 1 or 2,
The acceleration sensor , wherein the main vibration arm is provided between the movable mass portion and the sub vibration arm .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007250785A JP2009080069A (en) | 2007-09-27 | 2007-09-27 | Acceleration sensor, and load sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007250785A JP2009080069A (en) | 2007-09-27 | 2007-09-27 | Acceleration sensor, and load sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009080069A JP2009080069A (en) | 2009-04-16 |
| JP2009080069A5 true JP2009080069A5 (en) | 2010-10-14 |
Family
ID=40654914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007250785A Withdrawn JP2009080069A (en) | 2007-09-27 | 2007-09-27 | Acceleration sensor, and load sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009080069A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5341807B2 (en) * | 2010-03-26 | 2013-11-13 | 株式会社東芝 | Acceleration sensor |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS596370B2 (en) * | 1979-05-11 | 1984-02-10 | 横河電機株式会社 | force conversion mechanism |
| FR2627592B1 (en) * | 1988-02-22 | 1990-07-27 | Sagem | PENDULUM ACCELEROMETER NOT SERVED WITH RESONANT BEAM |
| CH687103A5 (en) * | 1993-08-20 | 1996-09-13 | Mettler Toledo Ag | Flat one-piece measuring string with two knots for displacement or force measurement. |
| JP2004251702A (en) * | 2003-02-19 | 2004-09-09 | Matsushita Electric Ind Co Ltd | Vibration piezoelectric acceleration sensor element, vibration piezoelectric acceleration sensor using the same, and vibration piezoelectric acceleration sensor device |
| JP2005140516A (en) * | 2003-11-04 | 2005-06-02 | Matsushita Electric Ind Co Ltd | Vibration-type piezoelectric acceleration sensor element, and vibration-type piezoelectric acceleration sensor using the same |
-
2007
- 2007-09-27 JP JP2007250785A patent/JP2009080069A/en not_active Withdrawn
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