JP2009071194A5 - - Google Patents

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Publication number
JP2009071194A5
JP2009071194A5 JP2007240180A JP2007240180A JP2009071194A5 JP 2009071194 A5 JP2009071194 A5 JP 2009071194A5 JP 2007240180 A JP2007240180 A JP 2007240180A JP 2007240180 A JP2007240180 A JP 2007240180A JP 2009071194 A5 JP2009071194 A5 JP 2009071194A5
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JP
Japan
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processed
job
article
advance
semiconductor manufacturing
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Pending
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JP2007240180A
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English (en)
Japanese (ja)
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JP2009071194A (ja
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Priority to JP2007240180A priority Critical patent/JP2009071194A/ja
Priority claimed from JP2007240180A external-priority patent/JP2009071194A/ja
Priority to US12/207,903 priority patent/US8175738B2/en
Publication of JP2009071194A publication Critical patent/JP2009071194A/ja
Publication of JP2009071194A5 publication Critical patent/JP2009071194A5/ja
Pending legal-status Critical Current

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JP2007240180A 2007-09-14 2007-09-14 半導体製造装置、半導体製造方法及びデバイス製造方法 Pending JP2009071194A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007240180A JP2009071194A (ja) 2007-09-14 2007-09-14 半導体製造装置、半導体製造方法及びデバイス製造方法
US12/207,903 US8175738B2 (en) 2007-09-14 2008-09-10 Device manufacturing apparatus and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007240180A JP2009071194A (ja) 2007-09-14 2007-09-14 半導体製造装置、半導体製造方法及びデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2009071194A JP2009071194A (ja) 2009-04-02
JP2009071194A5 true JP2009071194A5 (https=) 2010-11-04

Family

ID=40454868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007240180A Pending JP2009071194A (ja) 2007-09-14 2007-09-14 半導体製造装置、半導体製造方法及びデバイス製造方法

Country Status (2)

Country Link
US (1) US8175738B2 (https=)
JP (1) JP2009071194A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9678505B2 (en) * 2013-10-14 2017-06-13 Invensys Systems, Inc. Line management in manufacturing execution system

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2869826B2 (ja) * 1991-08-28 1999-03-10 キヤノン株式会社 半導体製造方法
JPH08167562A (ja) 1994-12-09 1996-06-25 Canon Inc 半導体製造装置およびデバイス製造方法
JP3419186B2 (ja) * 1995-04-18 2003-06-23 株式会社デンソー 半導体基板の生産制御装置
JPH11162827A (ja) * 1997-12-02 1999-06-18 Nikon Corp 露光装置
DE69926798T2 (de) * 1998-12-31 2006-09-14 Silicon Valley Group, Inc., San Jose Verfahren zum synchronisieren eines substratbehandlungssystems
JP3818620B2 (ja) * 1999-05-12 2006-09-06 キヤノン株式会社 露光装置
US6360133B1 (en) * 1999-06-17 2002-03-19 Advanced Micro Devices, Inc. Method and apparatus for automatic routing for reentrant process
US6403905B1 (en) * 2000-02-02 2002-06-11 Advanced Micro Devices, Inc. Reticle stocking and sorting management system
JP4738563B2 (ja) * 2000-04-21 2011-08-03 キヤノン株式会社 半導体製造装置およびデバイス製造方法
JP2002057087A (ja) * 2000-08-09 2002-02-22 Nikon Corp 露光装置
US6351684B1 (en) * 2000-09-19 2002-02-26 Advanced Micro Devices, Inc. Mask identification database server
JP2002190443A (ja) * 2000-12-20 2002-07-05 Hitachi Ltd 露光方法およびその露光システム
JP2003022962A (ja) * 2001-07-10 2003-01-24 Canon Inc 露光システム、デバイス製造方法、半導体製造工場および露光装置の保守方法
JP3626448B2 (ja) * 2001-11-28 2005-03-09 株式会社東芝 露光方法
JP2005294473A (ja) * 2004-03-31 2005-10-20 Canon Inc 露光装置、デバイス製造方法及びデバイス
US7206652B2 (en) * 2004-08-20 2007-04-17 International Business Machines Corporation Method and system for intelligent automated reticle management
JP4489547B2 (ja) * 2004-09-24 2010-06-23 株式会社ルネサステクノロジ フォトマスクの搬送方法、露光方法及び露光処理システム、並びに半導体装置の製造方法
JP2006108474A (ja) * 2004-10-07 2006-04-20 Canon Inc 露光装置及びそれを用いたデバイス製造方法
JP2006339268A (ja) * 2005-05-31 2006-12-14 Canon Inc 半導体製造装置及びその制御方法並びにデバイス製造方法
US7089077B1 (en) * 2005-07-06 2006-08-08 International Business Machines Corporation Monitor wafer purchase and controls database
US8050793B1 (en) * 2006-04-04 2011-11-01 Advanced Micro Devices, Inc. Method and apparatus for linking reticle manufacturing data
US7194328B1 (en) * 2006-04-04 2007-03-20 Advanced Micro Devices, Inc. Method and apparatus for tracking reticle history
US7257459B1 (en) * 2006-12-27 2007-08-14 Advanced Micro Devices, Inc. Method and apparatus for scheduling pilot lots
US20080201003A1 (en) * 2007-02-20 2008-08-21 Tech Semiconductor Singapore Pte Ltd Method and system for reticle scheduling

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