JP2009044755A5 - - Google Patents

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Publication number
JP2009044755A5
JP2009044755A5 JP2008253515A JP2008253515A JP2009044755A5 JP 2009044755 A5 JP2009044755 A5 JP 2009044755A5 JP 2008253515 A JP2008253515 A JP 2008253515A JP 2008253515 A JP2008253515 A JP 2008253515A JP 2009044755 A5 JP2009044755 A5 JP 2009044755A5
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JP
Japan
Prior art keywords
top electrode
thin film
support frame
film resonator
piezoelectric thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008253515A
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English (en)
Japanese (ja)
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JP4935788B2 (ja
JP2009044755A (ja
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Priority to JP2008253515A priority Critical patent/JP4935788B2/ja
Priority claimed from JP2008253515A external-priority patent/JP4935788B2/ja
Publication of JP2009044755A publication Critical patent/JP2009044755A/ja
Publication of JP2009044755A5 publication Critical patent/JP2009044755A5/ja
Application granted granted Critical
Publication of JP4935788B2 publication Critical patent/JP4935788B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2008253515A 2008-09-30 2008-09-30 圧電薄膜共振子およびその製造方法 Expired - Fee Related JP4935788B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008253515A JP4935788B2 (ja) 2008-09-30 2008-09-30 圧電薄膜共振子およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008253515A JP4935788B2 (ja) 2008-09-30 2008-09-30 圧電薄膜共振子およびその製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006104021A Division JP2007281757A (ja) 2006-04-05 2006-04-05 圧電薄膜共振子およびその製造方法

Publications (3)

Publication Number Publication Date
JP2009044755A JP2009044755A (ja) 2009-02-26
JP2009044755A5 true JP2009044755A5 (https=) 2009-05-21
JP4935788B2 JP4935788B2 (ja) 2012-05-23

Family

ID=40444914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008253515A Expired - Fee Related JP4935788B2 (ja) 2008-09-30 2008-09-30 圧電薄膜共振子およびその製造方法

Country Status (1)

Country Link
JP (1) JP4935788B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114978094B (zh) * 2022-05-16 2024-11-15 武汉敏声新技术有限公司 一种体声波谐振器及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645095A (en) * 1987-06-26 1989-01-10 Tdk Corp Formation of conductive pattern
US6150703A (en) * 1998-06-29 2000-11-21 Trw Inc. Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials
JP2002374144A (ja) * 2001-06-15 2002-12-26 Ube Electronics Ltd 薄膜圧電共振器
JP2005318477A (ja) * 2004-04-30 2005-11-10 Seiko Epson Corp 圧電振動片、その電極形成方法、及び圧電デバイス
EP1887688A4 (en) * 2005-06-02 2009-08-05 Murata Manufacturing Co PIEZOELECTRIC RESONATOR AND PIEZOELECTRIC THIN-FILTER FILTER

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