JP2013528817A5 - - Google Patents

Download PDF

Info

Publication number
JP2013528817A5
JP2013528817A5 JP2013515369A JP2013515369A JP2013528817A5 JP 2013528817 A5 JP2013528817 A5 JP 2013528817A5 JP 2013515369 A JP2013515369 A JP 2013515369A JP 2013515369 A JP2013515369 A JP 2013515369A JP 2013528817 A5 JP2013528817 A5 JP 2013528817A5
Authority
JP
Japan
Prior art keywords
conductive sheet
conductive
electrode
sheet
partially
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013515369A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013528817A (ja
JP5800897B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2011/038844 external-priority patent/WO2011159480A1/en
Publication of JP2013528817A publication Critical patent/JP2013528817A/ja
Publication of JP2013528817A5 publication Critical patent/JP2013528817A5/ja
Application granted granted Critical
Publication of JP5800897B2 publication Critical patent/JP5800897B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013515369A 2010-06-15 2011-06-02 可変静電容量センサ及びその作製方法 Expired - Fee Related JP5800897B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35484310P 2010-06-15 2010-06-15
US61/354,843 2010-06-15
PCT/US2011/038844 WO2011159480A1 (en) 2010-06-15 2011-06-02 Variable capacitance sensors and methods of making the same

Publications (3)

Publication Number Publication Date
JP2013528817A JP2013528817A (ja) 2013-07-11
JP2013528817A5 true JP2013528817A5 (https=) 2014-07-17
JP5800897B2 JP5800897B2 (ja) 2015-10-28

Family

ID=44395752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013515369A Expired - Fee Related JP5800897B2 (ja) 2010-06-15 2011-06-02 可変静電容量センサ及びその作製方法

Country Status (5)

Country Link
US (1) US9018060B2 (https=)
EP (1) EP2583090B1 (https=)
JP (1) JP5800897B2 (https=)
CN (1) CN103069269B (https=)
WO (1) WO2011159480A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5932806B2 (ja) 2010-09-30 2016-06-08 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
CN103154712B (zh) 2010-09-30 2015-11-25 3M创新有限公司 传感器元件及其制备方法和包括所述传感器元件的传感器装置
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
KR101968999B1 (ko) 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
EP2718706B1 (en) 2011-06-08 2015-03-11 3M Innovative Properties Company Humidity sensor and sensor element therefor
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
CN104583763B (zh) 2012-06-25 2017-03-08 3M创新有限公司 传感器元件及其制备和使用方法
JP6263179B2 (ja) 2012-08-02 2018-01-17 スリーエム イノベイティブ プロパティズ カンパニー 携帯用電子装置及び蒸気センサカード
EP3111202B1 (en) * 2014-02-27 2021-07-14 3M Innovative Properties Company Flexible sensor patch and method of using the same
TWI711806B (zh) 2014-07-22 2020-12-01 美商布魯爾科技公司 傳感器、感測器以及偵測條件之存在的方法
KR102238937B1 (ko) * 2014-07-22 2021-04-09 주식회사 키 파운드리 배선 사이의 중공에 형성된 습도 센서 및 그 제조 방법
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US9805875B2 (en) 2015-05-06 2017-10-31 Unimicron Technology Corp. Capacitor and manufacturing method thereof
CN107966165B (zh) * 2016-10-19 2020-12-22 华邦电子股份有限公司 电阻式环境传感器及电阻式环境传感器阵列

Family Cites Families (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603372A (en) 1984-11-05 1986-07-29 Direction De La Meteorologie Du Ministere Des Transports Method of fabricating a temperature or humidity sensor of the thin film type, and sensors obtained thereby
JPS61237044A (ja) 1985-04-12 1986-10-22 Hamamatsu Photonics Kk 湿度検出素子およびその製造方法
JPS6331361U (https=) 1986-08-15 1988-02-29
US5135691A (en) * 1987-10-16 1992-08-04 The Washington Technology Centre Low temperature sintering of ceramic materials
JPH02151753A (ja) 1988-12-02 1990-06-11 Shinagawa Refract Co Ltd 積層構造型湿度センサ素子
EP0426989B1 (de) 1989-11-04 1994-02-02 Dornier Gmbh Selektiver Gassensor
JPH0831392B2 (ja) * 1990-04-26 1996-03-27 株式会社村田製作所 積層コンデンサ
EP0475025B1 (de) 1990-09-12 1995-03-29 Endress + Hauser Gmbh + Co. Verfahren zum Herstellen eines kapazitiven Feuchtesensors
JPH0618392A (ja) 1992-06-30 1994-01-25 Kyocera Corp チップ型電子部品の耐熱衝撃試験方法
GB9309797D0 (en) 1993-05-12 1993-06-23 Medisense Inc Electrochemical sensors
US5443746A (en) * 1994-02-14 1995-08-22 Hughes Aircraft Company Ferroelectric aerogel composites for voltage-variable dielectric tuning, and method for making the same
US5676745A (en) * 1995-06-07 1997-10-14 The United States Of America, As Represented By The Secretary Of Commerce Pre-ceramic polymers in fabrication of ceramic composites
US5818149A (en) * 1996-03-25 1998-10-06 Rutgers, The State University Of New Jersey Ceramic composites and methods for producing same
US5771567A (en) * 1996-08-29 1998-06-30 Raytheon Company Methods of fabricating continuous transverse stub radiating structures and antennas
US6202471B1 (en) * 1997-10-10 2001-03-20 Nanomaterials Research Corporation Low-cost multilaminate sensors
US6832735B2 (en) * 2002-01-03 2004-12-21 Nanoproducts Corporation Post-processed nanoscale powders and method for such post-processing
JPH10293107A (ja) 1997-02-19 1998-11-04 Tokin Corp 積層セラミックコンデンサの内部欠陥検査方法
US5997795A (en) * 1997-05-29 1999-12-07 Rutgers, The State University Processes for forming photonic bandgap structures
NZ504675A (en) 1997-08-08 2003-12-19 Cyrano Sciences Inc Techniques and systems for analyte detection
US5951908A (en) * 1998-01-07 1999-09-14 Alliedsignal Inc. Piezoelectrics and related devices from ceramics dispersed in polymers
EP1070244A4 (en) 1998-04-09 2002-04-17 California Inst Of Techn ELECTRONIC TECHNIQUES USED FOR THE DETECTION OF ANALYTES
AU4208099A (en) 1998-05-27 1999-12-13 California Institute Of Technology Method of resolving analytes in a fluid
US6309703B1 (en) * 1998-06-08 2001-10-30 The United States Of America As Represented By The Secretary Of The Air Force Carbon and ceramic matrix composites fabricated by a rapid low-cost process incorporating in-situ polymerization of wetting monomers
JP3091192B2 (ja) 1998-07-29 2000-09-25 ティーディーケイ株式会社 誘電体磁器組成物および電子部品
US20030148024A1 (en) * 2001-10-05 2003-08-07 Kodas Toivo T. Low viscosity precursor compositons and methods for the depositon of conductive electronic features
US6222376B1 (en) 1999-01-16 2001-04-24 Honeywell International Inc. Capacitive moisture detector and method of making the same
US6532824B1 (en) 1999-07-09 2003-03-18 Tokin Corporation Capacitive strain sensor and method for using the same
US7449146B2 (en) 2002-09-30 2008-11-11 3M Innovative Properties Company Colorimetric sensor
WO2005010480A2 (en) 2003-04-28 2005-02-03 Eikos, Inc. Sensor device utilizing carbon nanotubes
US6938482B2 (en) 2003-06-03 2005-09-06 General Electric Co. Humidity sensor element containing polyphenylsulfone
US6979938B2 (en) * 2003-06-18 2005-12-27 Xerox Corporation Electronic device formed from a thin film with vertically oriented columns with an insulating filler material
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
WO2005025853A1 (en) * 2003-09-05 2005-03-24 Helicon Research, L.L.C. Nanophase multilayer barrier and process
GB0503460D0 (en) 2005-02-19 2005-03-30 Univ Cranfield Gas or vapour sensor
KR100676088B1 (ko) 2005-03-23 2007-02-01 (주)에스와이하이테크 정전용량형 습도센서 및 그 제조방법
US8060174B2 (en) * 2005-04-15 2011-11-15 Dexcom, Inc. Analyte sensing biointerface
US7556774B2 (en) 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
US8293340B2 (en) 2005-12-21 2012-10-23 3M Innovative Properties Company Plasma deposited microporous analyte detection layer
US7767143B2 (en) 2006-06-27 2010-08-03 3M Innovative Properties Company Colorimetric sensors
US8067110B2 (en) 2006-09-11 2011-11-29 3M Innovative Properties Company Organic vapor sorbent protective device with thin-film indicator
US7901776B2 (en) 2006-12-29 2011-03-08 3M Innovative Properties Company Plasma deposited microporous carbon material
US20080236251A1 (en) 2007-03-28 2008-10-02 Tepper Gary C Chemical Sensing Apparatuses, Methods and Systems
JP2010540966A (ja) 2007-10-05 2010-12-24 スリーエム イノベイティブ プロパティズ カンパニー ミクロ孔質ポリマーを含む有機化学センサー、及び使用方法
EP2208058B1 (en) 2007-10-05 2018-07-11 3M Innovative Properties Company Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using
US7683636B2 (en) 2007-10-26 2010-03-23 Honeywell International Inc. Structure for capacitive balancing of integrated relative humidity sensor
MY164505A (en) 2007-11-23 2017-12-29 Mimos Berhad Capacitive sensor
US7816681B2 (en) 2008-12-03 2010-10-19 Electronics And Telecommunications Research Institute Capacitive gas sensor and method of fabricating the same
JP5662945B2 (ja) 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
CN202794129U (zh) 2009-01-29 2013-03-13 3M创新有限公司 用于检测环境空气中有机被分析物存在情况的监控器
KR101720364B1 (ko) 2009-03-30 2017-03-27 쓰리엠 이노베이티브 프로퍼티즈 컴파니 분석물의 검출을 위한 광전자 방법 및 장치
US20130126774A1 (en) * 2011-11-17 2013-05-23 The Research Foundation Of State University Of New York Piezoelectric foam structures and hydrophone utilizing same

Similar Documents

Publication Publication Date Title
JP2013528817A5 (https=)
JP2010117943A5 (https=)
EP2741064A3 (en) Capacitive Tactile Sensor
JP2012247372A5 (https=)
WO2011109480A3 (en) Spiral wound electrical devices containing carbon nanotube-infused electrode materials and methods and apparatuses for production thereof
JP2013156102A5 (https=)
JP2006121088A5 (https=)
WO2013167338A3 (de) Keramischer vielschichtkondensator
JP2017506752A5 (https=)
WO2014163801A8 (en) Flipped cell sensor pattern
EP3970610A3 (en) Analyte sensors and methods of manufacturing same
WO2009134707A3 (en) Ultracapacitors and methods of making and using
JP2010524177A5 (https=)
WO2012031963A3 (de) Widerstandsbauelement und verfahren zur herstellung eines widerstandsbauelements
JP2017513572A5 (https=)
WO2010136174A3 (de) Elektrodenwickel
JP2013051040A5 (https=)
JP2011176245A5 (https=)
EP2631960A3 (en) Nano-piezoelectric generator and method of manufacturing the same
WO2008094893A3 (en) An ultracapacitor and method of manufacturing the same
WO2010088186A3 (en) Carbon-based ultracapacitor
WO2018069949A3 (en) Capacitive voltage sensor
WO2009112995A3 (en) Multi-element piezoelectric transducers
JP2012522226A5 (https=)
WO2011075508A3 (en) Sintered capacitor electrode including a folded connection