JP2013528817A5 - - Google Patents

Download PDF

Info

Publication number
JP2013528817A5
JP2013528817A5 JP2013515369A JP2013515369A JP2013528817A5 JP 2013528817 A5 JP2013528817 A5 JP 2013528817A5 JP 2013515369 A JP2013515369 A JP 2013515369A JP 2013515369 A JP2013515369 A JP 2013515369A JP 2013528817 A5 JP2013528817 A5 JP 2013528817A5
Authority
JP
Japan
Prior art keywords
conductive sheet
conductive
electrode
sheet
partially
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013515369A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013528817A (ja
JP5800897B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2011/038844 external-priority patent/WO2011159480A1/en
Publication of JP2013528817A publication Critical patent/JP2013528817A/ja
Publication of JP2013528817A5 publication Critical patent/JP2013528817A5/ja
Application granted granted Critical
Publication of JP5800897B2 publication Critical patent/JP5800897B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013515369A 2010-06-15 2011-06-02 可変静電容量センサ及びその作製方法 Expired - Fee Related JP5800897B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35484310P 2010-06-15 2010-06-15
US61/354,843 2010-06-15
PCT/US2011/038844 WO2011159480A1 (en) 2010-06-15 2011-06-02 Variable capacitance sensors and methods of making the same

Publications (3)

Publication Number Publication Date
JP2013528817A JP2013528817A (ja) 2013-07-11
JP2013528817A5 true JP2013528817A5 (https=) 2014-07-17
JP5800897B2 JP5800897B2 (ja) 2015-10-28

Family

ID=44395752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013515369A Expired - Fee Related JP5800897B2 (ja) 2010-06-15 2011-06-02 可変静電容量センサ及びその作製方法

Country Status (5)

Country Link
US (1) US9018060B2 (https=)
EP (1) EP2583090B1 (https=)
JP (1) JP5800897B2 (https=)
CN (1) CN103069269B (https=)
WO (1) WO2011159480A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9341588B2 (en) 2010-09-30 2016-05-17 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
WO2012050686A1 (en) 2010-09-30 2012-04-19 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
US9279792B2 (en) 2011-04-13 2016-03-08 3M Innovative Properties Company Method of using an absorptive sensor element
KR101922035B1 (ko) 2011-06-08 2018-11-26 쓰리엠 이노베이티브 프로퍼티즈 컴파니 습도 센서 및 그를 위한 센서 요소
JP6038950B2 (ja) 2011-12-13 2016-12-07 スリーエム イノベイティブ プロパティズ カンパニー 気体媒質内の未知の有機化合物の同定及び定量測定方法
CN104583763B (zh) 2012-06-25 2017-03-08 3M创新有限公司 传感器元件及其制备和使用方法
US9702840B2 (en) 2012-08-02 2017-07-11 3M Innovative Properties Company Portable electronic device and vapor sensor card
EP3111202B1 (en) * 2014-02-27 2021-07-14 3M Innovative Properties Company Flexible sensor patch and method of using the same
KR102238937B1 (ko) * 2014-07-22 2021-04-09 주식회사 키 파운드리 배선 사이의 중공에 형성된 습도 센서 및 그 제조 방법
TWI711806B (zh) 2014-07-22 2020-12-01 美商布魯爾科技公司 傳感器、感測器以及偵測條件之存在的方法
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US9805875B2 (en) 2015-05-06 2017-10-31 Unimicron Technology Corp. Capacitor and manufacturing method thereof
CN107966165B (zh) * 2016-10-19 2020-12-22 华邦电子股份有限公司 电阻式环境传感器及电阻式环境传感器阵列

Family Cites Families (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603372A (en) 1984-11-05 1986-07-29 Direction De La Meteorologie Du Ministere Des Transports Method of fabricating a temperature or humidity sensor of the thin film type, and sensors obtained thereby
JPS61237044A (ja) * 1985-04-12 1986-10-22 Hamamatsu Photonics Kk 湿度検出素子およびその製造方法
JPS6331361U (https=) * 1986-08-15 1988-02-29
US5135691A (en) * 1987-10-16 1992-08-04 The Washington Technology Centre Low temperature sintering of ceramic materials
JPH02151753A (ja) * 1988-12-02 1990-06-11 Shinagawa Refract Co Ltd 積層構造型湿度センサ素子
EP0426989B1 (de) 1989-11-04 1994-02-02 Dornier Gmbh Selektiver Gassensor
JPH0831392B2 (ja) * 1990-04-26 1996-03-27 株式会社村田製作所 積層コンデンサ
DE59105040D1 (de) 1990-09-12 1995-05-04 Endress Hauser Gmbh Co Verfahren zum Herstellen eines kapazitiven Feuchtesensors.
JPH0618392A (ja) 1992-06-30 1994-01-25 Kyocera Corp チップ型電子部品の耐熱衝撃試験方法
GB9309797D0 (en) 1993-05-12 1993-06-23 Medisense Inc Electrochemical sensors
US5443746A (en) * 1994-02-14 1995-08-22 Hughes Aircraft Company Ferroelectric aerogel composites for voltage-variable dielectric tuning, and method for making the same
US5676745A (en) * 1995-06-07 1997-10-14 The United States Of America, As Represented By The Secretary Of Commerce Pre-ceramic polymers in fabrication of ceramic composites
US5818149A (en) * 1996-03-25 1998-10-06 Rutgers, The State University Of New Jersey Ceramic composites and methods for producing same
US5771567A (en) * 1996-08-29 1998-06-30 Raytheon Company Methods of fabricating continuous transverse stub radiating structures and antennas
US6832735B2 (en) * 2002-01-03 2004-12-21 Nanoproducts Corporation Post-processed nanoscale powders and method for such post-processing
US6202471B1 (en) * 1997-10-10 2001-03-20 Nanomaterials Research Corporation Low-cost multilaminate sensors
JPH10293107A (ja) * 1997-02-19 1998-11-04 Tokin Corp 積層セラミックコンデンサの内部欠陥検査方法
US5997795A (en) * 1997-05-29 1999-12-07 Rutgers, The State University Processes for forming photonic bandgap structures
EP1019715B1 (en) 1997-08-08 2005-01-26 California Institute Of Technology Techniques and systems for analyte detection
US5951908A (en) * 1998-01-07 1999-09-14 Alliedsignal Inc. Piezoelectrics and related devices from ceramics dispersed in polymers
JP4482228B2 (ja) 1998-04-09 2010-06-16 カリフォルニア・インスティテュート・オブ・テクノロジー アナライト検出のための電子技術
WO1999061902A1 (en) 1998-05-27 1999-12-02 California Institute Of Technology Method of resolving analytes in a fluid
US6309703B1 (en) * 1998-06-08 2001-10-30 The United States Of America As Represented By The Secretary Of The Air Force Carbon and ceramic matrix composites fabricated by a rapid low-cost process incorporating in-situ polymerization of wetting monomers
JP3091192B2 (ja) * 1998-07-29 2000-09-25 ティーディーケイ株式会社 誘電体磁器組成物および電子部品
US20030148024A1 (en) * 2001-10-05 2003-08-07 Kodas Toivo T. Low viscosity precursor compositons and methods for the depositon of conductive electronic features
US6222376B1 (en) 1999-01-16 2001-04-24 Honeywell International Inc. Capacitive moisture detector and method of making the same
WO2001004593A1 (en) 1999-07-09 2001-01-18 Tokin Corporation Capacitive strain sensor and method for using the same
US7449146B2 (en) 2002-09-30 2008-11-11 3M Innovative Properties Company Colorimetric sensor
US7342479B2 (en) 2003-04-28 2008-03-11 Eikos, Inc. Sensor device utilizing carbon nanotubes
US6938482B2 (en) 2003-06-03 2005-09-06 General Electric Co. Humidity sensor element containing polyphenylsulfone
US6979938B2 (en) * 2003-06-18 2005-12-27 Xerox Corporation Electronic device formed from a thin film with vertically oriented columns with an insulating filler material
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
WO2005025853A1 (en) * 2003-09-05 2005-03-24 Helicon Research, L.L.C. Nanophase multilayer barrier and process
GB0503460D0 (en) 2005-02-19 2005-03-30 Univ Cranfield Gas or vapour sensor
KR100676088B1 (ko) 2005-03-23 2007-02-01 (주)에스와이하이테크 정전용량형 습도센서 및 그 제조방법
US8060174B2 (en) * 2005-04-15 2011-11-15 Dexcom, Inc. Analyte sensing biointerface
US8293340B2 (en) 2005-12-21 2012-10-23 3M Innovative Properties Company Plasma deposited microporous analyte detection layer
US7556774B2 (en) 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
US7767143B2 (en) 2006-06-27 2010-08-03 3M Innovative Properties Company Colorimetric sensors
US8067110B2 (en) 2006-09-11 2011-11-29 3M Innovative Properties Company Organic vapor sorbent protective device with thin-film indicator
US7901776B2 (en) 2006-12-29 2011-03-08 3M Innovative Properties Company Plasma deposited microporous carbon material
US20080236251A1 (en) 2007-03-28 2008-10-02 Tepper Gary C Chemical Sensing Apparatuses, Methods and Systems
WO2009046011A2 (en) 2007-10-05 2009-04-09 3M Innovative Properties Company Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using
US8835180B2 (en) 2007-10-05 2014-09-16 3M Innovative Properties Company Organic chemical sensor comprising microporous polymer, and method of use
US7683636B2 (en) 2007-10-26 2010-03-23 Honeywell International Inc. Structure for capacitive balancing of integrated relative humidity sensor
MY164505A (en) 2007-11-23 2017-12-29 Mimos Berhad Capacitive sensor
US7816681B2 (en) 2008-12-03 2010-10-19 Electronics And Telecommunications Research Institute Capacitive gas sensor and method of fabricating the same
CN102405409B (zh) 2008-12-23 2014-11-05 3M创新有限公司 具有微孔有机硅材料的有机化学传感器
WO2010088088A2 (en) 2009-01-29 2010-08-05 3M Innovative Properties Company Monitor for optical detection of organic analytes
JP5889182B2 (ja) 2009-03-30 2016-03-22 スリーエム イノベイティブ プロパティズ カンパニー 検体の検出のための光電子法及びデバイス
US20130126774A1 (en) * 2011-11-17 2013-05-23 The Research Foundation Of State University Of New York Piezoelectric foam structures and hydrophone utilizing same

Similar Documents

Publication Publication Date Title
JP2013528817A5 (https=)
JP2010117943A5 (https=)
EP2741064A3 (en) Capacitive Tactile Sensor
JP2012247372A5 (https=)
WO2011109480A3 (en) Spiral wound electrical devices containing carbon nanotube-infused electrode materials and methods and apparatuses for production thereof
JP2013156102A5 (https=)
JP2006121088A5 (https=)
WO2013167338A3 (de) Keramischer vielschichtkondensator
JP2017503241A5 (https=)
JP2017506752A5 (https=)
WO2014163801A8 (en) Flipped cell sensor pattern
IN2012DN03054A (https=)
EP3970610A3 (en) Analyte sensors and methods of manufacturing same
WO2009134707A3 (en) Ultracapacitors and methods of making and using
JP2010524177A5 (https=)
JP2009508317A5 (https=)
WO2012031963A3 (de) Widerstandsbauelement und verfahren zur herstellung eines widerstandsbauelements
RU2016144029A (ru) Игла с датчиками на основе пьезоэлектрических полимеров
JP2017513572A5 (https=)
WO2010136174A3 (de) Elektrodenwickel
WO2015073745A3 (en) Battery
WO2012135238A9 (en) Method to increase the capacitance of electrochemical carbon nanotube capacitors by conformal deposition of nanoparticles
JP2011176245A5 (https=)
EP2631960A3 (en) Nano-piezoelectric generator and method of manufacturing the same
WO2010088186A3 (en) Carbon-based ultracapacitor