JP2009004615A5 - - Google Patents

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Publication number
JP2009004615A5
JP2009004615A5 JP2007165018A JP2007165018A JP2009004615A5 JP 2009004615 A5 JP2009004615 A5 JP 2009004615A5 JP 2007165018 A JP2007165018 A JP 2007165018A JP 2007165018 A JP2007165018 A JP 2007165018A JP 2009004615 A5 JP2009004615 A5 JP 2009004615A5
Authority
JP
Japan
Prior art keywords
semiconductor substrate
image sensor
backside
back surface
charge storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007165018A
Other languages
English (en)
Japanese (ja)
Other versions
JP4659788B2 (ja
JP2009004615A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007165018A priority Critical patent/JP4659788B2/ja
Priority claimed from JP2007165018A external-priority patent/JP4659788B2/ja
Priority to US12/142,569 priority patent/US8072007B2/en
Publication of JP2009004615A publication Critical patent/JP2009004615A/ja
Publication of JP2009004615A5 publication Critical patent/JP2009004615A5/ja
Application granted granted Critical
Publication of JP4659788B2 publication Critical patent/JP4659788B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007165018A 2007-06-22 2007-06-22 裏面照射型撮像素子 Expired - Fee Related JP4659788B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007165018A JP4659788B2 (ja) 2007-06-22 2007-06-22 裏面照射型撮像素子
US12/142,569 US8072007B2 (en) 2007-06-22 2008-06-19 Backside-illuminated imaging device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007165018A JP4659788B2 (ja) 2007-06-22 2007-06-22 裏面照射型撮像素子

Publications (3)

Publication Number Publication Date
JP2009004615A JP2009004615A (ja) 2009-01-08
JP2009004615A5 true JP2009004615A5 (OSRAM) 2010-08-26
JP4659788B2 JP4659788B2 (ja) 2011-03-30

Family

ID=40320666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007165018A Expired - Fee Related JP4659788B2 (ja) 2007-06-22 2007-06-22 裏面照射型撮像素子

Country Status (2)

Country Link
US (1) US8072007B2 (OSRAM)
JP (1) JP4659788B2 (OSRAM)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8358365B2 (en) * 2009-05-01 2013-01-22 Samsung Electronics Co., Ltd. Photo detecting device and image pickup device and method thereon
JP5394814B2 (ja) 2009-05-01 2014-01-22 三星電子株式会社 光検出素子及び撮像装置
US8334195B2 (en) 2009-09-09 2012-12-18 International Business Machines Corporation Pixel sensors of multiple pixel size and methods of implant dose control
US8461532B2 (en) * 2009-11-05 2013-06-11 The Aerospace Corporation Refraction assisted illumination for imaging
US8138476B2 (en) 2009-11-05 2012-03-20 The Aerospace Corporation Refraction assisted illumination for imaging
US8450688B2 (en) 2009-11-05 2013-05-28 The Aerospace Corporation Refraction assisted illumination for imaging
JP5478217B2 (ja) * 2009-11-25 2014-04-23 パナソニック株式会社 固体撮像装置
JP5358747B2 (ja) 2011-03-25 2013-12-04 富士フイルム株式会社 裏面照射型固体撮像素子及びその製造方法並びに撮像装置
US9007454B2 (en) 2012-10-31 2015-04-14 The Aerospace Corporation Optimized illumination for imaging
JP2014179413A (ja) * 2013-03-14 2014-09-25 Toshiba Corp 固体撮像装置
CN109599408B (zh) * 2018-12-26 2022-05-03 中国电子科技集团公司第四十四研究所 一种cmos图像传感器像素结构及其制备、使用方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11355790A (ja) 1998-06-09 1999-12-24 Fuji Film Microdevices Co Ltd 二次元カラー撮像素子
KR100485892B1 (ko) * 2002-11-14 2005-04-29 매그나칩 반도체 유한회사 시모스 이미지센서 및 그 제조방법
JP2004304706A (ja) * 2003-04-01 2004-10-28 Fuji Photo Film Co Ltd 固体撮像装置およびその補間処理方法
JP4046067B2 (ja) 2003-11-04 2008-02-13 ソニー株式会社 固体撮像素子の製造方法
JP4507769B2 (ja) * 2004-08-31 2010-07-21 ソニー株式会社 固体撮像素子、カメラモジュール及び電子機器モジュール
US7456384B2 (en) * 2004-12-10 2008-11-25 Sony Corporation Method and apparatus for acquiring physical information, method for manufacturing semiconductor device including array of plurality of unit components for detecting physical quantity distribution, light-receiving device and manufacturing method therefor, and solid-state imaging device and manufacturing method therefor

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