JP2008546550A - Ｃｍｐのための透過性微細多孔質材料 - Google Patents

Ｃｍｐのための透過性微細多孔質材料 Download PDF

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Publication number
JP2008546550A
JP2008546550A JP2008518178A JP2008518178A JP2008546550A JP 2008546550 A JP2008546550 A JP 2008546550A JP 2008518178 A JP2008518178 A JP 2008518178A JP 2008518178 A JP2008518178 A JP 2008518178A JP 2008546550 A JP2008546550 A JP 2008546550A
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JP
Japan
Prior art keywords
polishing pad
pad substrate
polishing
substrate
thermoplastic polyurethane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008518178A
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English (en)
Japanese (ja)
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JP2008546550A5 (enExample
Inventor
プラサード，アバネシュワー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CMC Materials LLC
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Publication of JP2008546550A publication Critical patent/JP2008546550A/ja
Publication of JP2008546550A5 publication Critical patent/JP2008546550A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
    • B24D13/12—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery comprising assemblies of felted or spongy material, e.g. felt, steel wool, foamed latex
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure
    • H10P52/00—

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
JP2008518178A 2005-06-22 2006-05-24 Ｃｍｐのための透過性微細多孔質材料 Pending JP2008546550A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/158,694 US7267607B2 (en) 2002-10-28 2005-06-22 Transparent microporous materials for CMP
PCT/US2006/020193 WO2007001699A1 (en) 2005-06-22 2006-05-24 Tranparent microporous materials for cmp

Publications (2)

Publication Number Publication Date
JP2008546550A true JP2008546550A (ja) 2008-12-25
JP2008546550A5 JP2008546550A5 (enExample) 2009-07-09

Family

ID=37101929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008518178A Pending JP2008546550A (ja) 2005-06-22 2006-05-24 Ｃｍｐのための透過性微細多孔質材料

Country Status (8)

Country Link
US (1) US7267607B2 (enExample)
EP (1) EP1915233B1 (enExample)
JP (1) JP2008546550A (enExample)
KR (1) KR101265370B1 (enExample)
CN (1) CN101208180A (enExample)
IL (1) IL187705A (enExample)
TW (1) TWI295946B (enExample)
WO (1) WO2007001699A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016528054A (ja) * 2013-08-22 2016-09-15 キャボット マイクロエレクトロニクス コーポレイション 独立気泡構造を有する超高空隙体積研磨パッド
JP2016533037A (ja) * 2013-08-22 2016-10-20 キャボット マイクロエレクトロニクス コーポレイション 多孔質界面および中実コアを備えた研磨パッドならびにその装置および方法
JP2019521231A (ja) * 2016-07-11 2019-07-25 浙江新恒泰新材料有限公司 高倍率の熱可塑性ポリウレタン微細孔発泡シート及びその生産方法

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KR101217265B1 (ko) 2009-06-24 2012-12-31 주식회사 엘지화학 다공성 시트의 제조방법 및 이에 의해 제조된 다공성 시트
US8162728B2 (en) 2009-09-28 2012-04-24 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Dual-pore structure polishing pad
US9017140B2 (en) 2010-01-13 2015-04-28 Nexplanar Corporation CMP pad with local area transparency
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US9156124B2 (en) 2010-07-08 2015-10-13 Nexplanar Corporation Soft polishing pad for polishing a semiconductor substrate
DE102010026722A1 (de) 2010-07-09 2012-01-12 Ahlbrandt System Gmbh Vorrichtung zum Modifizieren der Oberfläche von Bahn-, Platten- oder Bogenware
US9186772B2 (en) 2013-03-07 2015-11-17 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad with broad spectrum, endpoint detection window and method of polishing therewith
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US10399201B2 (en) 2014-10-17 2019-09-03 Applied Materials, Inc. Advanced polishing pads having compositional gradients by use of an additive manufacturing process
US10821573B2 (en) 2014-10-17 2020-11-03 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US10875145B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
CN107078048B (zh) 2014-10-17 2021-08-13 应用材料公司 使用加成制造工艺的具复合材料特性的cmp衬垫建构
US20160121578A1 (en) * 2014-10-29 2016-05-05 Nonwoven Networks Llc High performance moldable composite
CN113103145B (zh) 2015-10-30 2023-04-11 应用材料公司 形成具有期望ζ电位的抛光制品的设备与方法
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
CN108698206B (zh) 2016-01-19 2021-04-02 应用材料公司 多孔化学机械抛光垫
US10259099B2 (en) * 2016-08-04 2019-04-16 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Tapering method for poromeric polishing pad
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (en) 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
WO2020050932A1 (en) 2018-09-04 2020-03-12 Applied Materials, Inc. Formulations for advanced polishing pads
US11813712B2 (en) 2019-12-20 2023-11-14 Applied Materials, Inc. Polishing pads having selectively arranged porosity
US11806829B2 (en) 2020-06-19 2023-11-07 Applied Materials, Inc. Advanced polishing pads and related polishing pad manufacturing methods
KR102794221B1 (ko) * 2020-11-19 2025-04-15 주식회사 케이씨텍 기판 연마 장치
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ
CN114536212B (zh) * 2022-01-29 2024-02-09 浙江环龙新材料科技有限公司 一种微孔热塑性聚氨酯抛光垫及其半连续制备方法

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016528054A (ja) * 2013-08-22 2016-09-15 キャボット マイクロエレクトロニクス コーポレイション 独立気泡構造を有する超高空隙体積研磨パッド
JP2016533037A (ja) * 2013-08-22 2016-10-20 キャボット マイクロエレクトロニクス コーポレイション 多孔質界面および中実コアを備えた研磨パッドならびにその装置および方法
JP2019521231A (ja) * 2016-07-11 2019-07-25 浙江新恒泰新材料有限公司 高倍率の熱可塑性ポリウレタン微細孔発泡シート及びその生産方法

Also Published As

Publication number Publication date
IL187705A (en) 2013-03-24
WO2007001699A1 (en) 2007-01-04
TW200702102A (en) 2007-01-16
TWI295946B (en) 2008-04-21
EP1915233B1 (en) 2019-01-30
EP1915233A1 (en) 2008-04-30
KR20080016663A (ko) 2008-02-21
CN101208180A (zh) 2008-06-25
US7267607B2 (en) 2007-09-11
KR101265370B1 (ko) 2013-05-22
US20050277371A1 (en) 2005-12-15
IL187705A0 (en) 2008-08-07

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