JP2008535752A5 - - Google Patents

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Publication number
JP2008535752A5
JP2008535752A5 JP2008500973A JP2008500973A JP2008535752A5 JP 2008535752 A5 JP2008535752 A5 JP 2008535752A5 JP 2008500973 A JP2008500973 A JP 2008500973A JP 2008500973 A JP2008500973 A JP 2008500973A JP 2008535752 A5 JP2008535752 A5 JP 2008535752A5
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JP
Japan
Prior art keywords
particles
deposited
substrate
filter substrate
nanotube
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Application number
JP2008500973A
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English (en)
Japanese (ja)
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JP2008535752A (ja
JP4993642B2 (ja
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Priority claimed from PCT/US2006/008622 external-priority patent/WO2006099156A2/en
Publication of JP2008535752A publication Critical patent/JP2008535752A/ja
Publication of JP2008535752A5 publication Critical patent/JP2008535752A5/ja
Application granted granted Critical
Publication of JP4993642B2 publication Critical patent/JP4993642B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008500973A 2005-03-10 2006-03-10 薄膜製造法および装置 Expired - Fee Related JP4993642B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US66041205P 2005-03-10 2005-03-10
US60/660,412 2005-03-10
PCT/US2006/008622 WO2006099156A2 (en) 2005-03-10 2006-03-10 Thin film production method and apparatus

Publications (3)

Publication Number Publication Date
JP2008535752A JP2008535752A (ja) 2008-09-04
JP2008535752A5 true JP2008535752A5 (enExample) 2009-04-23
JP4993642B2 JP4993642B2 (ja) 2012-08-08

Family

ID=36992275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008500973A Expired - Fee Related JP4993642B2 (ja) 2005-03-10 2006-03-10 薄膜製造法および装置

Country Status (6)

Country Link
US (1) US7771784B2 (enExample)
EP (1) EP1877255A4 (enExample)
JP (1) JP4993642B2 (enExample)
KR (1) KR20070116866A (enExample)
CA (1) CA2600524C (enExample)
WO (1) WO2006099156A2 (enExample)

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