JP2008535752A5 - - Google Patents

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Publication number
JP2008535752A5
JP2008535752A5 JP2008500973A JP2008500973A JP2008535752A5 JP 2008535752 A5 JP2008535752 A5 JP 2008535752A5 JP 2008500973 A JP2008500973 A JP 2008500973A JP 2008500973 A JP2008500973 A JP 2008500973A JP 2008535752 A5 JP2008535752 A5 JP 2008535752A5
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JP
Japan
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particles
deposited
substrate
filter substrate
nanotube
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JP2008500973A
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English (en)
Japanese (ja)
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JP4993642B2 (ja
JP2008535752A (ja
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Priority claimed from PCT/US2006/008622 external-priority patent/WO2006099156A2/en
Publication of JP2008535752A publication Critical patent/JP2008535752A/ja
Publication of JP2008535752A5 publication Critical patent/JP2008535752A5/ja
Application granted granted Critical
Publication of JP4993642B2 publication Critical patent/JP4993642B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2008500973A 2005-03-10 2006-03-10 薄膜製造法および装置 Expired - Fee Related JP4993642B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US66041205P 2005-03-10 2005-03-10
US60/660,412 2005-03-10
PCT/US2006/008622 WO2006099156A2 (en) 2005-03-10 2006-03-10 Thin film production method and apparatus

Publications (3)

Publication Number Publication Date
JP2008535752A JP2008535752A (ja) 2008-09-04
JP2008535752A5 true JP2008535752A5 (enExample) 2009-04-23
JP4993642B2 JP4993642B2 (ja) 2012-08-08

Family

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Family Applications (1)

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JP2008500973A Expired - Fee Related JP4993642B2 (ja) 2005-03-10 2006-03-10 薄膜製造法および装置

Country Status (6)

Country Link
US (1) US7771784B2 (enExample)
EP (1) EP1877255A4 (enExample)
JP (1) JP4993642B2 (enExample)
KR (1) KR20070116866A (enExample)
CA (1) CA2600524C (enExample)
WO (1) WO2006099156A2 (enExample)

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2683744T3 (es) 2005-07-28 2018-09-27 Nanocomp Technologies, Inc. Aparato y método para formación y recolección de hojas no tejidas nanofibrosas
US8951632B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused carbon fiber materials and process therefor
US8951631B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused metal fiber materials and process therefor
US9005755B2 (en) 2007-01-03 2015-04-14 Applied Nanostructured Solutions, Llc CNS-infused carbon nanomaterials and process therefor
US20090047513A1 (en) * 2007-02-27 2009-02-19 Nanocomp Technologies, Inc. Materials for Thermal Protection and Methods of Manufacturing Same
GB0708294D0 (en) * 2007-04-28 2007-06-06 Q Flo Ltd A continuous process for preparing and collecting nanotube films that are supporated by a substrate
CN101315974B (zh) * 2007-06-01 2010-05-26 清华大学 锂离子电池负极及其制备方法
US9061913B2 (en) 2007-06-15 2015-06-23 Nanocomp Technologies, Inc. Injector apparatus and methods for production of nanostructures
FI20075482L (fi) 2007-06-25 2008-12-26 Canatu Oy Kuituverkostot sekä menetelmä ja laite kuituverkostojen jatkuvasti tai erinä tapahtuvaan tuotantoon
CN101707904B (zh) * 2007-07-06 2013-03-20 独立行政法人产业技术总合研究所 碳纳米管成膜方法、成膜装置及碳纳米管薄膜
JP2011508364A (ja) 2007-08-07 2011-03-10 ナノコンプ テクノロジーズ インコーポレイテッド 非金属電気伝導性および熱伝導性ナノ構造体ベースアダプター
JP5205672B2 (ja) * 2007-08-29 2013-06-05 独立行政法人物質・材料研究機構 フラーレン細線付き基盤とその製造方法
CN101450288B (zh) * 2007-11-30 2012-08-29 清华大学 过滤膜及其制备方法
FI20085085A0 (fi) * 2008-01-31 2008-01-31 Jyrki Maekelae Rullalta rullalle -menetelmä ja pinnoituslaite
KR100922399B1 (ko) 2008-02-29 2009-10-19 고려대학교 산학협력단 전자방출원, 이를 적용한 전자장치 및 전자방출원의제조방법
GB0805837D0 (en) * 2008-03-31 2008-06-04 Qinetiq Ltd Chemical Vapour Deposition Process
US10358535B2 (en) * 2008-04-25 2019-07-23 The University Of Kentucky Research Foundation Thermal interface material
JP5864253B2 (ja) 2008-05-07 2016-02-17 ナノコンプ テクノロジーズ インコーポレイテッド ナノ構造複合材シートの形成方法
JP5968621B2 (ja) 2008-05-07 2016-08-10 ナノコンプ テクノロジーズ インコーポレイテッド ナノ構造体ベースの加熱装置およびその使用方法
US20100115672A1 (en) * 2008-05-13 2010-05-06 Northwestern University Scanning probe epitaxy
US7993524B2 (en) * 2008-06-30 2011-08-09 Nanoasis Technologies, Inc. Membranes with embedded nanotubes for selective permeability
KR100904218B1 (ko) 2008-09-16 2009-06-25 주식회사 나노베이스 탄소 나노튜브 코팅 장치 및 그 방법
KR101082831B1 (ko) * 2008-11-25 2011-11-11 금호석유화학 주식회사 탄소나노튜브 합성장치
KR101162686B1 (ko) 2008-12-01 2012-07-05 주식회사 나노베이스 탄소 나노튜브 코팅 장치 및 그 방법
FI124440B (fi) * 2009-01-28 2014-08-29 Canatu Oy Rakenteita, jotka käsittävät korkean aspektisuhteen omaavia molekyylirakenteita, ja valmistusmenetelmiä
US20100224129A1 (en) 2009-03-03 2010-09-09 Lockheed Martin Corporation System and method for surface treatment and barrier coating of fibers for in situ cnt growth
JP5604506B2 (ja) * 2009-04-10 2014-10-08 アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニー 繊維にカーボン・ナノチューブを浸出するために垂直炉を用いるための方法及び装置
JP2010254494A (ja) * 2009-04-22 2010-11-11 Nec Corp ナノチューブ状物質の分離方法、製造方法及び分離装置
CN101920955B (zh) * 2009-06-09 2012-09-19 清华大学 碳纳米管膜保护结构及其制备方法
TWI462838B (zh) * 2009-06-18 2014-12-01 Hon Hai Prec Ind Co Ltd 奈米碳管膜保護結構及其製備方法
EP2442681A1 (en) * 2009-06-19 2012-04-25 Under Armour, Inc. Nanoadhesion structures for sporting gear
AU2010279709A1 (en) 2009-08-03 2012-01-19 Applied Nanostructured Solutions, Llc. Incorporation of nanoparticles in composite fibers
CN104475313B (zh) 2010-09-14 2017-05-17 应用奈米结构公司 长有碳纳米管玻璃基板及其制造方法
CN103118975A (zh) 2010-09-22 2013-05-22 应用奈米结构公司 具有碳纳米管成长于其上的碳纤维基板及其制造方法
ES2721377T3 (es) 2011-01-04 2019-07-31 Nanocomp Technologies Inc Aislantes térmicos basados en nanotubos, su uso y método de aislamiento térmico
TWI441940B (zh) * 2011-06-09 2014-06-21 識驊科技股份有限公司 圖案化導電元件的製備方法
CN102994980B (zh) * 2012-12-13 2015-01-14 苏州汉纳材料科技有限公司 高导电碳纳米管薄膜的制备方法及装置
EP3010853B1 (en) 2013-06-17 2023-02-22 Nanocomp Technologies, Inc. Exfoliating-dispersing agents for nanotubes, bundles and fibers
JP6843738B2 (ja) * 2014-07-30 2021-03-17 ジェネラル ナノ エルエルシー カーボンナノチューブシート構造体およびその製造方法
CA2957918A1 (en) 2014-08-11 2016-02-18 The Arizona Board Of Regents On Behalf Of The University Of Arizona Aligned graphene-carbon nanotube porous carbon composite
EP3253709A4 (en) 2015-02-03 2018-10-31 Nanocomp Technologies, Inc. Carbon nanotube structures and methods for production thereof
US10758936B2 (en) 2015-12-08 2020-09-01 The Boeing Company Carbon nanomaterial composite sheet and method for making the same
US11021369B2 (en) 2016-02-04 2021-06-01 General Nano Llc Carbon nanotube sheet structure and method for its making
US10581082B2 (en) 2016-11-15 2020-03-03 Nanocomp Technologies, Inc. Systems and methods for making structures defined by CNT pulp networks
US11279836B2 (en) 2017-01-09 2022-03-22 Nanocomp Technologies, Inc. Intumescent nanostructured materials and methods of manufacturing same
CN109295451B (zh) * 2018-10-12 2021-04-09 哈尔滨工业大学 等离子体辅助气溶胶沉积成膜方法及气溶胶沉积装置
FI129565B (en) 2019-04-24 2022-04-29 Canatu Oy Apparatuses and method for oriented deposition

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6630772B1 (en) * 1998-09-21 2003-10-07 Agere Systems Inc. Device comprising carbon nanotube field emitter structure and process for forming device
AUPQ304199A0 (en) * 1999-09-23 1999-10-21 Commonwealth Scientific And Industrial Research Organisation Patterned carbon nanotubes
JP2005097003A (ja) * 2000-05-31 2005-04-14 Nec Corp カーボンナノチューブの固着方法
EP1373137B1 (en) * 2001-03-26 2009-05-06 National Research Council Of Canada Process and apparatus for synthesis of nanotubes
JP2002361599A (ja) * 2001-06-07 2002-12-18 Sony Corp カーボン・ナノチューブ構造体及びその製造方法、冷陰極電界電子放出素子及びその製造方法、並びに、冷陰極電界電子放出表示装置及びその製造方法
US6835591B2 (en) * 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US6749862B2 (en) * 2001-08-06 2004-06-15 Phillip G. Landers Method and composition of disrupting feeding patterns of woodpeckers
US7138100B2 (en) * 2001-11-21 2006-11-21 William Marsh Rice Univesity Process for making single-wall carbon nanotubes utilizing refractory particles
US6902658B2 (en) * 2001-12-18 2005-06-07 Motorola, Inc. FED cathode structure using electrophoretic deposition and method of fabrication
US6713519B2 (en) * 2001-12-21 2004-03-30 Battelle Memorial Institute Carbon nanotube-containing catalysts, methods of making, and reactions catalyzed over nanotube catalysts
GB2385864A (en) * 2002-02-28 2003-09-03 Qinetiq Ltd Production of nanocarbons
AU2003249324A1 (en) * 2002-07-19 2004-02-09 University Of Florida Transparent electrodes from single wall carbon nanotubes
JP3998241B2 (ja) * 2002-10-18 2007-10-24 キヤノン株式会社 カーボンファイバーが固定された基体の製造方法
US7150801B2 (en) * 2003-02-26 2006-12-19 Mitsubishi Gas Chemical Company, Inc. Process for producing cold field-emission cathodes
JP3869394B2 (ja) * 2003-06-30 2007-01-17 富士通株式会社 微粒子の堆積方法及びカーボンナノチューブの形成方法
US7611579B2 (en) * 2004-01-15 2009-11-03 Nanocomp Technologies, Inc. Systems and methods for synthesis of extended length nanostructures
ES2683744T3 (es) * 2005-07-28 2018-09-27 Nanocomp Technologies, Inc. Aparato y método para formación y recolección de hojas no tejidas nanofibrosas

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